Rotation rate sensor
First Claim
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1. A yaw-rate sensor comprising:
- a first Coriolis element;
a second Coriolis element;
an excitation arrangement to induce the first Coriolis element and the second Coriolis element to oscillate parallel to a first axis;
a substrate; and
a detection arrangement to verify a deflection of the first Coriolis element and the second Coriolis element based on a Coriolis force in a second axis that is perpendicular to the first axis, the first axis and the second axis being parallel to a surface of the substrate;
wherein the first Coriolis element and the second Coriolis element are arranged side-by-side above a surface of a substrate, and the first Coriolis element and the second Coriolis element oscillate in phase opposition to each other on a first path and a second path that, without an effect of the Coriolis force, are a first straight line and a second straight line that are parallel.
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Abstract
A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.
54 Citations
13 Claims
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1. A yaw-rate sensor comprising:
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a first Coriolis element;
a second Coriolis element;
an excitation arrangement to induce the first Coriolis element and the second Coriolis element to oscillate parallel to a first axis;
a substrate; and
a detection arrangement to verify a deflection of the first Coriolis element and the second Coriolis element based on a Coriolis force in a second axis that is perpendicular to the first axis, the first axis and the second axis being parallel to a surface of the substrate;
wherein the first Coriolis element and the second Coriolis element are arranged side-by-side above a surface of a substrate, and the first Coriolis element and the second Coriolis element oscillate in phase opposition to each other on a first path and a second path that, without an effect of the Coriolis force, are a first straight line and a second straight line that are parallel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification