Accelerometer

• US 6,705,167 B2
• Filed: 05/22/2001
• Issued: 03/16/2004
• Est. Priority Date: 07/10/2000
• Status: Expired due to Term

• Current Assignee: Infineon Technologies AG
• Original Assignee: SensoNor ASA (Infineon Technologies AG)
• Inventors: Moe, Sigurd, Skulstad, Paul, Nord, Asgeir, Berstein, Ralph, Munch, Kai Viggo, Goalby, Norman, Kvisteroey, Terje
• Primary Examiner(s): MOLLER, RICHARD ALAN
• Application Number:
  US09/863,665
• Publication Number:
  US 20020002864A1
• Time in Patent Office: 1,029 Days
• Field of Search: 735/143.8, 735/143.2, 735/143.3, 735/143.4, 735/141.2, 735/141.3, 735/141.7, 735/142.1, 735/142.4
• US Class Current: 73/514.38
• CPC Class Codes: G01P 1/003 used for damping
• CPC Class Codes: G01P 15/123 by piezo-resistive elements, e.g. semiconductor strain gauges
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass

Abstract

An accelerometer comprises a housing including a mass-supporting frame and a mass supported on the frame by a pair of outer spring member aligned along a first axis. The mass may comprise an outer mass connected to the pair of outer spring members and an inner mass connected to the outer mass by a number of inner spring members, the inner spring members aligned along one or more axes, which form a plane which the axis of the outer spring members also may be aligned. Also provided is means for detecting rotation of the mass and translation of the inner mass.

Claims

1. An accelerometer comprising:

a housing including a mass-supporting frame;

a mass supported on the frame;

support means for supporting the mass on the frame;

a first means for detecting rotation of the mass about a first axis with respect to the support means and;

second, separate means for detecting translation of the mass along a second axis with respect to the support means, wherein the first axis and the second axis are substantially perpendicular to one another.

2. An accelerometer according to claim 1, formed from semiconductor material.

3. An accelerometer according to claim 1, formed from a material having anistropic properties.

4. An accelerometer according to claim 1, formed from a material having piezoresistive properties.

5. An accelerometer according to claim 1, formed from silicon.

17. An accelerometer according to claim 1, further comprising a third means of independently detecting rotational and translation movements by capacitive detection.

6. An accelerometer comprising:

a housing including a mass-supporting frame;

a mass supported on the frame;

support means for supporting the mass on the frame;

means for detecting rotation of the mass with respect to the support means;

means for detecting translation of the mass with respect to the support means; and

an upper casing separated from the mass by a gap, wherein a fluid or gas is located in the gap between the upper casing and the mass to provide mechanical damping, wherein the mechanical damping is controlled by forming a recess in the upper casing.

7. An accelerometer comprising:

a housing including a mass-supporting frame; and

a mass supported on the frame, wherein the mass is supported on the frame by a pair of outer spring members aligned along a first support axis, the mass comprising an outer mass connected to the pair of outer spring members and an inner mass connected to the outer mass by a number of inner spring members, the inner spring members aligned along one or more axes which form a plane with which the first support axis is aligned;

means for detecting rotation of the mass with respect to the support means about the first support axis; and

means for detecting translation of the mass with respect to the support means in the direction of the second axis.

8. An accelerometer according to claim 7, wherein the means for detecting rotation of the mass comprises means for detecting stress induced by torsion in the outer spring members during acceleration of the accelerometer in a direction in the plane of the inner spring members;

and

wherein the means for detecting translation of the mass comprises means for detecting bending stress in the inner spring members during acceleration of the accelerometer in a direction perpendicular to the plane of the inner spring members.

9. An accelerometer according to claim 8, wherein the means for determining bending stress on the inner spring members comprises two piezoresistors on each of the inner spring members, one at each end of each spring member.

10. An accelerometer according to claim 7, wherein the inner spring members and the outer spring members are oriented at substantially 45°

to one another.

11. An accelerometer according to claim 7, wherein the inner mass is supported by two pairs of inner spring members, arranged such that each pair is perpendicular to the other, and both pairs of inner spring members and the axis of the outer spring members are coplanar.

12. An accelerometer according to claim 8, wherein the means for determining bending stress on the inner spring members comprises a piezoresistor at one end of each inner spring member.

13. An accelerometer according to claim 8, wherein the means for determining the bending stress on the inner spring members is positioned either on one or both of the pairs of inner spring members adjacent to the inner mass or outer mass.

14. An accelerometer according to claim 8, wherein the means for determining the torsion stress comprises a Wheatstone bridge formed from four piezoresistors, each of the piezoresistors arranged on the outer spring member or members substantially along a single direction.

15. An accelerometer according to claim 7, wherein one of the outer spring members is longer than the other.

16. An accelerometer according to claim 8, wherein the means of detecting bending and torsional stress is piezoelectric.

18. An accelerometer comprising:

a housing including a mass-supporting frame;

a mass supported on the frame;

support means for supporting the mass on the frame;

means for detecting rotation of the mass with respect to the support means;

means for detecting translation of the mass with respect to the support means; and

an upper casing separated from the mass by a gap, wherein a fluid or gas is located in the gap between the casing and the upper mass to provide mechanical damping, wherein the mechanical damping is controlled by forming a recess in the upper surface of the mass.

19. An accelerometer comprising:

a housing including a frame;

a mass supported on the frame, wherein the mass includes a first section supported on the frame for rotational movement about a first axis, and a second section supported on the first section for movement along a second axis, the second axis being substantially perdendicular to the first axis;

means for detecting rotation of the mass about the first axis; and

means for detecting movement of the mass along the second axis.

20. The accelerometer of claim 19, wherein the first section of the mass is supported on the frame by a pair of first support members that extend between the frame and the first section of the mass along the first axis.

21. The accelerometer of claim 20, wherein the second section of the mass is supported on the first section via second support members arranged in a plane that includes the first axis, wherein each second support member extends between the first and second sections of the mass.

22. The accelerometer of claim 19, wherein the first section of the mass defines an open area within which the second section of the mass is located.

23. The accelerometer of claim 20, wherein the mass defines a center of gravity that is offset from the first axis in the direction of the second axis, such that a force applied to the accelerometer along a third axis perpendicular to the first and second axes causes the mass to rotate about the first axis.