Methods of fabricating silicon carbide crystals

• US 6,706,114 B2
• Filed: 05/21/2001
• Issued: 03/16/2004
• Est. Priority Date: 05/21/2001
• Status: Expired due to Term

• Current Assignee: CREE Incorporated (Wolfspeed, Inc.)
• Original Assignee: CREE Incorporated (Wolfspeed, Inc.)
• Inventors: Mueller, Stephan
• Primary Examiner(s): Norton, Nadine G.
• Assistant Examiner(s): Song, Matthew J
• Application Number:
  US09/862,108
• Publication Number:
  US 20020170491A1
• Time in Patent Office: 1,030 Days
• Field of Search: 117/84, 117/88, 117/94, 117/97, 117/911, 117/951
• US Class Current: 117/84
• CPC Class Codes: C30B 23/00 Single-crystal growth by condensing evaporated or sublimed materials
• CPC Class Codes: C30B 23/025 characterised by the substrate
• CPC Class Codes: C30B 29/36 Carbides
• CPC Class Codes: Y10S 117/911 Seed or rod holders

Abstract

Methods for producing silicon carbide crystals, seed crystal holders and seed crystal for use in producing silicon carbide crystals and silicon carbide crystals are provided. Silicon carbide crystals are produced by forcing nucleation sites of a silicon carbide seed crystal to a predefined pattern and growing silicon carbide utilizing physical vapor transport (PVT) so as to provide selective preferential growth of silicon carbide corresponding to the predefined pattern. Seed holders and seed crystals are provided for such methods. Silicon carbide crystals having regions of higher and lower defect density are also provided.

Claims

1. A method of producing silicon carbide crystals, comprising:

forcing nucleation sites of a silicon carbide seed crystal to a predefined pattern by;

providing regions of higher thermal conductivity in a seed crystal holder, the regions of higher thermal conductivity corresponding to the predefined pattern;

mounting the seed crystal on the seed crystal holder; and

growing silicon carbide utilizing physical vapor transport (PVT) so as to provide selective preferential growth of silicon carbide corresponding to the predefined pattern.

2. The method of claim 1, wherein the providing regions of higher thermal conductivity comprises removing portions of the seed crystal holder so that the seed crystal selectively contacts the seed crystal holder, the regions of higher thermal conductivity corresponding to regions where the seed crystal contacts the seed crystal when the seed crystal is mounted on the seed crystal holder.

3. The method of claim 1, wherein the predefined pattern comprises stripes in the seed crystal holder.

4. The method of claim 1, wherein the predefined pattern comprises a pattern of posts in the seed crystal holder.

5. The method of claim 4, wherein the posts are substantially circular.

6. The method of claim 1, wherein the regions of higher thermal conductivity are configured so as to modulate a thermal profile of the seed crystal.

7. The method of claim 1, wherein the providing regions of higher thermal conductivity comprises:

removing protions of the seed crystal holder so as to provide cavities in the seed crystal holder; and

placing a material having a higher thermal conductivity than a material of the seed crystal holder in the cavities in the seed crystal holder.

8. A method of producing silicon carbide crystals, comprising:

forcing nucleation sites of a silicon carbide seed crystal to a predefined pattern by;

providing regions of higher thermal conductivity in a seed crystal holder, the regions of higher thermal conductivity corresponding to the predefined pattern;

mounting the seed crystal on the seed crystal holder; and

growing silicon carbide utilizing physical vapor transport (PVT) so as to provide selective preferential growth of silicon carbide corresponding to the predefined pattern;

wherein the providing regions of higher thermal conductivity comprises;

removing portions of the seed crystal holder so as to provide cavities in the seed crystal holder; and

filling the cavities in the seed crystal holder with a material having a higher thermal conductivity than a material of the seed crystal holder.

9. The method of claim 8, wherein filling the cavities comprises:

covering the seed crystal holder with a layer of the material having a higher thermal conductivity; and

removing a sufficient amount of the layer of the material of higher thermal conductivity so as to expose portions of the seed crystal holder.

10. The method of claim 9, wherein the material of the seed crystal holder comprises graphite and wherein the material of higher thermal conductivity comprises silicon carbide.