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RF loaded line type capacitive plasma source for broad range of operating gas pressure

  • US 6,707,051 B2
  • Filed: 07/10/2002
  • Issued: 03/16/2004
  • Est. Priority Date: 07/10/2002
  • Status: Expired due to Fees
First Claim
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1. A radio frequency capacitive coupled plasma source comprising:

  • a high voltage collar type electrode connected to a core of a feeding coaxial cable leading to a power supply;

    a grounded collar type electrode spaced from said high voltage collar type electrode and connected to a shield of said coaxial cable;

    an operating tube passing through both said collar type electrodes for containing a plasma beam excited by an electric field acting between said collar type electrodes when fed from said power supply;

    said grounded collar type electrode extended to provide an outer shield formed to symmetrically envelope said operating tube with said high voltage collar type electrode and arranged to provide a termination for a loaded radio frequency line wherein said high voltage collar type electrode with said plasma beam excited inside said operating tube forms a core of said radio frequency line;

    said outer shield forming a housing with an interior cavity between its inner surface and outer surfaces of said high voltage electrode and said operating tube; and

    means for supplying a gaseous working medium into said operating tube at an end thereof adjacent the high voltage electrode to provide a plasma beam discharge from an opposite end of said operating tube.

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