RF loaded line type capacitive plasma source for broad range of operating gas pressure
First Claim
1. A radio frequency capacitive coupled plasma source comprising:
- a high voltage collar type electrode connected to a core of a feeding coaxial cable leading to a power supply;
a grounded collar type electrode spaced from said high voltage collar type electrode and connected to a shield of said coaxial cable;
an operating tube passing through both said collar type electrodes for containing a plasma beam excited by an electric field acting between said collar type electrodes when fed from said power supply;
said grounded collar type electrode extended to provide an outer shield formed to symmetrically envelope said operating tube with said high voltage collar type electrode and arranged to provide a termination for a loaded radio frequency line wherein said high voltage collar type electrode with said plasma beam excited inside said operating tube forms a core of said radio frequency line;
said outer shield forming a housing with an interior cavity between its inner surface and outer surfaces of said high voltage electrode and said operating tube; and
means for supplying a gaseous working medium into said operating tube at an end thereof adjacent the high voltage electrode to provide a plasma beam discharge from an opposite end of said operating tube.
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Accused Products
Abstract
An RF loaded line type CCP source-having two collar type electrodes with an operating tube passing through these electrodes. One of the electrodes (high voltage electrode) is connected with the core of a feeding coaxial cable leading to a power supply, and another one is grounded by connection to a braid of the feeding coaxial cable, and the grounded electrode is further extended to form an outer cylindrical shield enveloping the operating tube with the high voltage electrode to provide a termination of an RF loaded line wherein the high voltage electrode with a plasma beam excited within the operating tube by action of an electric field between the electrodes form a core of this RF line. To provide effective contribution of RF energy in the plasma beam, the impedance of this line can be matched to the impedance of the plasma beam and matched also to the impedance of the feeding cable.
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Citations
14 Claims
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1. A radio frequency capacitive coupled plasma source comprising:
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a high voltage collar type electrode connected to a core of a feeding coaxial cable leading to a power supply;
a grounded collar type electrode spaced from said high voltage collar type electrode and connected to a shield of said coaxial cable;
an operating tube passing through both said collar type electrodes for containing a plasma beam excited by an electric field acting between said collar type electrodes when fed from said power supply;
said grounded collar type electrode extended to provide an outer shield formed to symmetrically envelope said operating tube with said high voltage collar type electrode and arranged to provide a termination for a loaded radio frequency line wherein said high voltage collar type electrode with said plasma beam excited inside said operating tube forms a core of said radio frequency line;
said outer shield forming a housing with an interior cavity between its inner surface and outer surfaces of said high voltage electrode and said operating tube; and
means for supplying a gaseous working medium into said operating tube at an end thereof adjacent the high voltage electrode to provide a plasma beam discharge from an opposite end of said operating tube. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification