Measurements using tunnelling current between elongate conductors

• US 6,707,308 B1
• Filed: 04/16/2001
• Issued: 03/16/2004
• Est. Priority Date: 09/07/1998
• Status: Expired due to Term

• Current Assignee: Chemtron Research LLC (Intellectual Ventures LLC)
• Original Assignee: Quantum Precision Instruments Pty., Ltd.
• Inventors: Michalewicz, Marek Tadeusz
• Primary Examiner(s): Le, N.
• Assistant Examiner(s): Teresinski, John
• Application Number:
  US09/786,641
• Time in Patent Office: 1,065 Days
• Field of Search: 324/716, 324/76.12, 324/210, 324/211, 324/522, 324/713, 324/164
• US Class Current: 324/716
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: G01B 7/14 for measuring distance or clearance between spaced objects or spaced apertures G01B7/30 takes precedence

Abstract

Apparatus for use in measuring and/or monitoring the relative position or displacement of two elements, includes a pair of elongate electrical conductors (10, 11) adapted to be associated with the respective elements, and means (12, 13, 18) for disposing the conductors at a mutual separation such that a detectable quantum tunnelling current may be generated between them on application of an electrical potential difference between the conductors.

Claims

1. Apparatus for measuring and/or monitoring the relative position or displacement of two elements, comprising:

a pair of elongate electrical conductors adapted to be associated with the respective elements; and

wherein the conductors are arranged at a mutual separation with a variable relative angle between the conductors such that a detectable quantum tunneling current which is a function of said relative angle may be generated between the conductors on application of an electrical potential difference between said conductors.

2. Apparatus according to claim 1, further including means to adjust the relative positions of the conductors to determine that position at which maximum quantum tunneling current is detected.

3. Apparatus according to claim 2 wherein said adjustment means includes one or more piezoelectric positioners.

4. Apparatus according to claim 1 wherein said elongate electrical conductors are substantially aligned in mutually parallel relationship whereby said relative angle is a measure of misalignment between the conductors.

5. Apparatus according to claim 1, wherein said elongate electrical conductors are arranged in respective ordered grids or arrays of electrical conductor segments, which grids or arrays are complementary and overlaid to place the conductor segments in sufficient proximity to obtain detectable quantum tunneling currents.

6. Apparatus according to claim 5 wherein the conductor segments of each said grid or array or substantially parallel but aligned at said relative angle to the conductor segments of the other grid(s) or array(s).

7. Apparatus according to claim 5 wherein the conductor segments of each grid or array are wired electrically in parallel.

8. Apparatus according to claim 1 wherein said elongate electrical conductors are of the order of micron to nanometer dimensions.

9. Apparatus according to claim 8 wherein said elongate electrical conductors are carbon nanotubes or nanowires, or micron to sub-micron quasi one dimensional conductors.

10. Apparatus according to claim 9 where said conductors are flush with a surface of the respective substrates.

11. Apparatus according to claim 1 wherein said conductors are associated with the aforesaid elements by being mounted in or on respective insulating or semiconductive substrates.

12. Apparatus according to claim 1 wherein each said electrical conductor is disposed along a respective atomic step on a vicinal surface providing a substrate.

13. Apparatus according to claim 1 wherein said elongate electrical conductors comprise respective segments of an integral conductive layer on an insulating or semiconductive substrate.

14. Apparatus according to claim 13, wherein said segments are separated and/or overlaid by a membrane or film of insulating medium.

15. Apparatus according to claim 1 wherein said mutual separation of opposed surface segments of said electrical conductors is in the range 2-50 Angstroms.

16. Apparatus according to claim 1 wherein said mutual separation of opposed surface segments of said electrical conductors is in the range of 2-20 Angstroms.

17. Apparatus according to claim 1, wherein said conductors are in one or more conductor segments of length in the range 10⁻

6 to 10<sup>−

2</sup> m.

18. Apparatus according to claim 1, further comprising an intervening film for disposing said conductors at said mutual separation and means to confine said film.

19. Apparatus according to claim 18 where said intervening film is a film of an organic medium including an organic solvent.

20. Apparatus according to claim 1, further comprising nanotube or buckyball (C₆₀) bearings for disposing said conductors at said mutual separation.

21. Apparatus according to claim 1, wherein said position or displacement measured and/or monitored is one or more of a rotational or angular separational displacement, a vibration, a linear separation or translation, an alignment and a misalignment.

22. Apparatus according to claim 1, said elongate electrical conductors are arranged in respective ordered grids or arrays of electrical conductor segments, whereby the cross-over points of the respective arrays define a lattice of electrostatic scattering wells.

23. Apparatus according to claim 22, wherein said lattice further includes an array of magnetic elements forming the lattice and creating 1-dimensional domains at or between said cross-over points.

24. Apparatus according to claim 1 further including means to apply said electrical potential difference, and means to detect and/or measure said quantum tunneling current between said conductors.

25. A method of measuring and/or monitoring the relative position or displacement of two elements, comprising:

associating the elements with respective elongate electrical conductors;

disposing the conductors at a mutual separation with a variable relative angle between the conductors and applying to the conductors an electrical potential difference such that there is a detectable quantum tunneling current between the conductors that is a function of said relative angle; and

detecting and/or measuring said quantum tunneling current.

26. A method according to claim 25, further including adjusting the relative positions of the conductors to determine one or more positions at which maximum quantum tunneling current is detected.

27. Apparatus for measuring and/or monitoring a relative position or displacement of two elements, comprising:

respective ordered grids or arrays of elongate electrical conductor segments adapted to be associated with the respective elements; and

wherein the grids or arrays are arranged in a complementary and overlaid mutual separation to place the conductor segments in sufficient proximity for a detectable quantum tunneling current to be generated between the grids or arrays on application of an electrical potential difference between the grids or arrays.

28. Apparatus according to claim 27, further including means to adjust the relative positions of the grids or arrays to determine that position at which maximum quantum tunneling current is detected.

29. Apparatus according to claim 28 wherein said means to adjust is arranged to adjust said relative position laterally of the elongate electrical conductor segments without changing said mutual separation of the grids or arrays.

30. Apparatus according to claim 28 wherein said adjustment means includes one or more piezoelectric positioners.

31. Apparatus according to claim 27 wherein the conductor segments of each said grid or array are substantially parallel but aligned at an angle to the conductor segments of the other grid(s) or array(s).

32. Apparatus according to claim 27 wherein the conductor segments of each grid or array are wired electrically in parallel.

33. Apparatus according to claim 27 wherein said elongate electrical conductor segments are of the order of micron to nanometer dimensions.

34. Apparatus according to claim 33 wherein said elongate electrical conductor segments are carbon nanotubes or nanowires, or micron to sub-micron quasi one dimensional conductors.

35. Apparatus according to claim 27 further comprising an intervening film for disposing said grids or arrays at said mutual separation and means to confine said film.

36. Apparatus according to claim 35 where said intervening film is a film of an organic medium including an organic solvent.

37. Apparatus according to claim 27 further comprising nanotube or buckyball (C₆₀) bearings for disposing said grids or arrays at said mutual separation.

38. Apparatus according to claim 27 wherein said position or displacement measured and/or monitored is one or more of a rotational or angular separational displacement, a vibration, a linear separation or translation, an alignment and a misalignment.

39. Apparatus according to claim 27 arranged whereby the cross-over points of the respective arrays define a lattice of electrostatic scattering wells.

40. Apparatus according to claim 39, wherein said lattice further includes an array of magnetic elements forming the lattice and creating 1-dimensional domains at or between said cross-over points.

41. Apparatus according to claim 27 further including means to apply said electrical potential difference, and means to detect and/or measure said quantum tunneling current between said grids or arrays.

42. Apparatus according to claim 27 further comprising a first device which is adapted to measure or monitor the relative position or displacement of the two elements based on a detected quantum tunneling current.

43. Apparatus according to claim 42 further comprising:

a first substrate supporting a first grid or array of elongate electrical conductor segments; and

a second substrate supporting a second grid or array of elongate electrical conductor segments, such that the first grid or array is separated by a gap from the second grid or array to allow the tunneling current to be generated between the first grid or array and the second grid or array.

44. Apparatus according to claim 43 wherein the magnitude of said gap does not change with said relative displacement of the two elements.

45. Apparatus according to claim 43 wherein the first device is adapted to measure or monitor one or more of a rotational or angular separational displacement, a vibration, a linear separation or translation, an alignment and a misalignment between the two elements.

46. Apparatus according to claim 45 wherein the magnitude of said gap does not change with said relative displacement of the two elements.

47. Apparatus of claim 27 wherein the elongate electrical conductors comprise nanotubes.

48. Apparatus of claim 27 further comprising a means for disposing the grids or arrays in a complementary and overlaid mutual separation to place the conductor segments in sufficient proximity for a detectable quantum tunneling current to be generated between the grids.

49. Apparatus of claim 48 further comprising a means for measuring or monitoring the relative position or displacement of the two elements based on a detected quantum tunneling current.

50. Apparatus according to claim 27 wherein the respective ordered grids or arrays of elongate electrical conductor segments comprise a first ordered grid or array of elongate electrical conductor segments associated with a first of said elements, and a second ordered grid or array of elongate electrical conductor segments associated with a second of said elements.

51. Apparatus for measuring and/or monitoring a relative position or displacement of two elements, comprising:

respective ordered arrays of parallel elongate electrical conductors adapted to be associated with the respective elements; and

wherein the arrays are arranged at a mutual separation in which the electrical conductors of the arrays are substantially aligned in mutually parallel relationship, such that when said elements change their relative position laterally of said conductors, a detectable quantum tunneling current generated between the conductors on application of an electrical potential difference between the conductors exhibits a series of peaks that provide a measure of said relative position or displacement.

52. Apparatus according to claim 51, further including means to adjust the relative positions of the conductors to determine that position at which maximum quantum tunneling current is detected.

53. Apparatus according to claim 52 wherein said adjustment means includes one or more piezoelectric positioners.

54. Apparatus according to claim 51 wherein said elongate electrical conductors are of the order of micron to nanometer dimensions.

55. Apparatus according to claim 54 wherein said elongate electrical conductors are carbon nanotubes or nanowires, or micron to sub-micron quasi one dimensional conductors.

56. Apparatus according to claim 51 wherein said conductors are associated with the aforesaid elements by being mounted in or on respective insulating or semiconductive substrates.

57. Apparatus according to claim 56 where said conductors are flush with a surface of the respective substrates.

58. Apparatus according to claim 51 wherein each said electrical conductor is disposed along a respective atomic step on a vicinal surface providing a substrate.

59. Apparatus according to claim 51 wherein said elongate electrical conductors comprise respective segments of an integral conductive layer on an insulating or semiconductive substrate.

60. Apparatus according to claim 59, wherein said segments are separated and/or overlaid by a membrane or film of insulating medium.

61. Apparatus according to claim 51 wherein said mutual separation of opposed surface segments of said electrical conductors is in the range 2-50 Angstroms.

62. Apparatus according to claim 51 wherein said mutual separation of opposed surface segments of said electrical conductors is in the range of 2-20 Angstroms.

63. Apparatus according to claim 51, wherein said conductors are in one or more conductor segments of length in the range 10⁻

6 to 10<sup>−

2</sup> m.

64. Apparatus according to claim 51, further comprising an intervening film for disposing said conductors at said mutual separation and means to confine said film.

65. Apparatus according to claim 64 where said intervening film is a film of an organic medium including an organic solvent.

66. Apparatus according to claim 51, further comprising nanotube or buckyball (C₆₀) bearings for disposing said conductors at said mutual separation.

67. Apparatus according to claim 51, wherein said position or displacement measured and/or monitored is one or more of a rotational or angular separational displacement, a vibration, a linear separation or translation, an alignment and a misalignment.

68. Apparatus according to claim 51 further including means to apply said electrical potential difference, and means to detect and/or measure said quantum tunneling current between said conductors.

69. Apparatus according to claim 51 further comprising a first device which is adapted to measure or monitor the relative position or displacement of the two elements based on a detected quantum tunneling current.

70. Apparatus according to claim 69 further comprising:

a first substrate supporting a first array of elongate electrical conductor segments; and

a second substrate supporting a second array of elongate electrical conductor segments, such that the first array is separated by a gap from the second array to allow the tunneling current to be generated between the first array and the second array.

71. Apparatus according to claim 70 wherein the magnitude of said gap does not change when said elements change their position laterally of said elongate electrical conductors.

72. Apparatus according to claim 70 wherein the first device is adapted to measure or monitor one or more of a rotational or angular separational displacement, a vibration, a linear separation or translation, an alignment and a misalignment between the two elements.

73. Apparatus according to claim 51, wherein the elongate electrical conductors comprise nanotubes.

74. Apparatus according to claim 51 wherein when said elements change their position laterally of said elongate electrical conductors, a gap between said arrays at said mutual separation of the arrays does not change in magnitude.

75. Apparatus according to claim 51 wherein the arrays are arranged at a mutual separation in which the electrical conductors of the arrays are substantially aligned in mutually parallel relationship, such that when said elements change their relative position laterally of a direction of the parallel elongate electrical conductors, a detectable quantum tunneling current generated between the conductors on application of an electrical potential difference between the conductors exhibits a series of peaks that provide a measure of said relative position or displacement.

76. Apparatus according to claim 51 further comprising a means for disposing the arrays at a mutual separation in which the electrical conductors of the arrays are substantially aligned in mutually parallel relationship, such that when said elements change their relative position laterally of said conductors, a detectable quantum tunneling current generated between the conductors on application of an electrical potential difference between the conductors exhibits a series of peaks that provide a measure of said relative position or displacement.

77. Apparatus according to claim 51 wherein the respective ordered arrays of parallel elongate electrical conductors comprise a first ordered array of parallel elongate electrical conductors associated with a first of said elements, and a second ordered array of parallel elongate electrical conductors associated with a second of said elements.

78. A method of measuring and/or monitoring the relative position or displacement of two elements, comprising:

associating the elements with respective ordered grids or arrays of elongate electrical conductor segments;

disposing the grids or arrays in a complementary and overlaid mutual separation to place the conductor segments in sufficient proximity that, on applying to the conductors an electrical potential difference there is generated a detectable quantum tunneling current between the grids or arrays; and

detecting and/or measuring said quantum tunneling current.

79. A method according to claim 78, further comprising adjusting the relative positions of the grids or arrays to determine one or more positions at which maximum quantum tunneling current is detected.

80. Method according to claim 78 further comprising measuring or monitoring the relative position or displacement of the two elements based on the detected or measured quantum tunneling current.

81. Method according to claim 80 wherein:

a first substrate supports a first grid or array of elongate electrical conductor segments;

a second substrate supports a second grid or array of elongate electrical conductor segments; and

applying to the conductors the electrical potential difference generates the detectable quantum tunneling current across a gap between the first grid or array and the second grid or array.

82. Method according to claim 80 wherein the magnitude of said gap does not change with said relative displacement of the two elements.

83. Method according to claim 80 wherein the step of measuring or monitoring the relative position or displacement comprises measuring or monitoring the relative displacement.

84. Method according to claim 80 wherein the step of measuring or monitoring the relative position or displacement comprises measuring or monitoring the relative position.

85. Method according to claim 80 wherein the step of measuring or monitoring the relative position or displacement comprises measuring or monitoring one or more of a rotational or angular separational displacement, a vibration, a linear separation or translation, an alignment and a misalignment between the two elements.

86. Method according to claim 78 wherein the respective ordered grids or arrays of elongate electrical conductor segments comprises a first ordered grid or array of elongate electrical conductor segments associated with a first of said elements, and a second ordered grid or array of elongate electrical conductor segments associated with a second of said elements.

87. A method of measuring and/or monitoring the relative position or displacement of two elements, comprising:

associating the elements with respective ordered arrays of parallel elongate electrical conductors;

disposing the arrays at a mutual separation in which the electrical conductors of the arrays are substantially aligned in mutual parallel relationship, and applying to the conductors an electrical potential difference such that there is a detectable quantum tunneling current generated between the conductors that exhibits a series of peaks that provide a measure of said relative position or displacement; and

detecting and/or measuring said quantum tunneling current.

88. A method according to claim 87, further comprising adjusting the relative positions of the arrays to determine one or more positions at which maximum quantum tunneling current is detected.

89. Method according to claim 87 wherein the respective ordered arrays of parallel elongate electrical conductors comprise a first ordered array of parallel elongate electrical conductors associated with a first of said elements, and a second ordered array of parallel elongate electrical conductors associated with a second of said elements.