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Active matrix substrate and manufacturing method thereof

  • US 6,707,513 B2
  • Filed: 07/06/2001
  • Issued: 03/16/2004
  • Est. Priority Date: 07/10/2000
  • Status: Active Grant
First Claim
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1. An active matrix substrate comprising:

  • a source electrode and a drain electrode which are provided on an insulating substrate and spaced apart from each other;

    a semiconductor layer deposited on said source electrode and said drain electrode;

    a gate insulating film deposited on said semiconductor layer;

    a gate electrode deposited on said gate insulating film; and

    a transparent conductive layer having first and second portions, the first portion being deposited on said gate electrode so as to be substantially the same pattern as that of said gate electrode, and the second portion including a portion deposited on a part of either said source electrode or said drain electrode.

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