Generic interface builder

• US 6,708,074 B1
• Filed: 08/11/2000
• Issued: 03/16/2004
• Est. Priority Date: 08/11/2000
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Hawkins, Parris C. M., Jin, Qiaolin, Chi, Yuehshian T.
• Primary Examiner(s): Picard, Leo
• Assistant Examiner(s): KOSOWSKI, ALEXANDER J
• Application Number:
  US09/637,620
• Time in Patent Office: 1,313 Days
• Field of Search: 700/19, 700/28, 700/121, 700/96, 700/95, 710/64
• US Class Current: 700/121
• CPC Class Codes: G05B 19/408 characterised by data handling or data format, e.g. reading, buffering or conversion of data
• CPC Class Codes: G05B 2219/31369 Translation, conversion of protocol between two layers, networks
• CPC Class Codes: G05B 2219/31372 Mes manufacturing execution system
• CPC Class Codes: G05B 2219/32128 Gui graphical user interface
• CPC Class Codes: G05B 2219/34262 DDE direct data exchange, DLL dynamic library linking
• CPC Class Codes: G05B 2219/35488 Graphical user interface, labview
• CPC Class Codes: G06F 9/451 Execution arrangements for user interfaces
• CPC Class Codes: G06F 9/541 via adapters, e.g. between incompatible applications
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

Generic interface adapter builder software generates an interface adapter to tie tools into a centralized manufacturing execution system. As contemplated by embodiments of the present invention, the interface adapter allows a tool in a semiconductor manufacturing assembly to communicate with other hardware and software in the centralized manufacturing execution system in accordance with a standard protocol and be operable from a common view graphical user interface. The generic interface builder software uses a classification of the type library and desired parameters for a particular tool to generate the interface adapter that maps the interface methods of the tool to the interface of the manufacturing execution system and handles long running service request support. In one aspect of the invention, the tool to be integrated into the manufacturing assembly may be a material control system. As contemplated by embodiments of the present invention, the material control system uses COM-based interface methods, and may optionally include a COM-based protocol converter, and may expose its interface methods via a type library.

Claims

1. A computer-based method for generating a generic interface adapter to facilitate communication between a manufacturing execution system and a tool in a manufacturing facility, comprising the steps of:

(1) reading a method type library from the tool, wherein said method-type library contains one or more methods relating to the tool;

(2) selecting a protocol to be associated with at least one of said one or more methods, wherein at least one protocol is a long-running service protocol for supporting long-running service protocol requests;

(3) generating an interface adapter for managing communication between the manufacturing execution system and the tool, including the managing of long-running service protocol requests; and

(4) associating one or more identifiers with said at least one method, said at least one method being associated with a long-running service protocol, wherein said one or more identifiers are for use by the interface adapter in managing communication between the manufacturing execution system and the tool.

2. The method of claim 1, wherein said step of associating one or more identifiers includes defining a transaction identification number for said at least one method.

3. The method of claim 1, wherein said at least one method is associated with one or more parameters, said step of associating one or more identifiers including selecting at least one of said one or more parameters as a key for said at least one method.

4. The method of claim 1, wherein said step of generating an interface adapter includes the step of defining an adapter method by modifying at least one of said one or more methods to wrap the method with information relating to the selected protocol and the associated one or more identifiers.

5. The method of claim 1, further including the step of providing a graphical user interface to allow a user to perform said step of selecting a protocol.

6. The method of claim 5, wherein said graphical user interface is provided through a graphical user interface of the manufacturing execution system.

7. The method of claim 1, further including the step of providing a protocol converter for the tool, wherein said protocol converter facilitates said step of reading a method type library by translating said method type library into a desired format.

8. The method of claim 1, wherein the generated interface adapter has one or more interface methods for communicating with the manufacturing execution system and the tool, further including the step of registering at least one of said one or more interface methods for use by the manufacturing execution system.

9. The method of claim 1, wherein said step of generating an interface adapter includes generating a long-running service protocol support function.

10. The method of claim 1, wherein at least one protocol is a synchronous protocol.

11. The method of claim 1, wherein the method type library is a Distributed Common Object Model type library.

12. The method of claim 1, wherein the tool is an event-based tool.

13. The method of claim 1, wherein the tool is a material control system.

14. A generic interface adapter builder program on a computer-readable medium for generating a generic interface adapter to facilitate communication between a manufacturing execution system and a tool in a manufacturing facility, the program comprising:

a module for reading a method type library from the tool, wherein said method type library contains one or more methods relating to the tool;

a module for selection of a protocol to be associated with at least one of said one or more methods, wherein at least one protocol is a long-running service protocol for supporting long-running service protocol requests; and

a module for generating code for an interface adapter for managing communication between the manufacturing execution system and the tool, including the managing of long-running service protocol requests,

wherein said module for selection of a protocol further allows for association of one or more identifiers with at least one of said one or more methods, wherein said one or more identifiers is for use by the interface adapter in managing communication between the manufacturing execution system and the tool.

15. The program of claim 14, wherein said module for generating code includes one or more routines for generating a method type library for the interface adapter.

16. A method according to claim 14, wherein said association of one or more identifiers includes a definition of a transaction identification number for at least one of said one or more methods.

17. A method according to claim 14, wherein at least one of said one or more methods is associated with one or more parameters, wherein said association of one or more identifiers includes a selection of at least one of said one or more parameters as a key for at least one of said one or more methods.

18. The program of claim 14, further including a graphical user interface, wherein the graphical user interface allows a user to access said module for selection of a protocol.

19. The program of claim 14, wherein said module for generating code includes one or more routines for modifying at least one of said one or more methods to wrap the method with information relating to the selected protocol and associated one or more identifiers.

20. The program of claim 14, further including a protocol converter for the tool, wherein said protocol converter enables said module for reading a method type library by translating said method type library into a desired format.

21. The program of claim 14, wherein the module for generating code includes information relating to one or more communication methods of the manufacturing execution system.

22. The program of claim 14, wherein the program is a Distributed Common Object Model component.

23. A manufacturing execution system for running a manufacturing facility, the manufacturing facility including one or more tools, comprising:

a client component of the manufacturing execution system for managing the use of at least one of said one or more tools, the client component having communication with the tool, the communication including requesting services from the tool and receiving notifications regarding the tool, the communication including long-running service requests from the client component;

a generic interface adapter builder for generating an adapter interface for managing communication between the client component and the tool, the generic interface adapter builder incorporating support for long-running service protocol requests into said interface adapter; and

a module, in data communication with the generic interface adapter builder, for associating one or more identifiers with at least one method of at least one of said long-running service protocol requests, wherein said one or more identifiers are for use by said interface adapter in managing communication between the client component of the manufacturing execution system and the at least one of said one or more tools.

24. The system of claim 23, further comprising a graphical user interface for managing the manufacturing execution system, the graphical user interface providing access to the generic interface adapter builder.

25. The system of claim 23, the communication further including synchronous requests from the client component, the interface adapter supporting synchronous requests.

26. The system of claim 23, the communication further including register for notification requests from the client component, the interface adapter supporting register for notification requests.

27. The system of claim 23, wherein the generic interface adapter builder is a Distributed Common Object Model component.

28. A computer-based method for generating an interface adapter to facilitate communication between a manufacturing execution system and a tool in a manufacturing facility, comprising the steps of:

reading a method type library from the tool, wherein said method-type library contains one or more methods relating to the tool;

selecting a protocol to be associated with at least one method of said one or more methods, wherein at lest one protocol is a long-running service protocol for supporting long-running service protocol requests; and

associating one or more identifiers with said at least one method, said at least one method being associated with a long-running service protocol, wherein said one or more identifiers are for use by an interface adapter in managing communication between the manufacturing execution system and the tool.

29. The method of claim 28, wherein said step of associating one or more identifiers includes defining a transaction identification number for said at least one method.

30. The method of claim 28, wherein said at least one method is associated with one or more parameters, said step of associating one or more identifiers including selecting at lest one of said one or more parameters as a key for said at least one method.

31. A generic interface adapter builder program on a computer-readable medium for generating a generic adapter to facilitate communication between a manufacturing execution system and a tool in a manufacturing facility, the program comprising:

a module for reading a method type library from the tool, wherein said method type library contains one or more methods relating to the tool; and

a module for selection of a protocol to be associated with at least one of said one or more method, wherein at least one protocol is a long-running service protocol for supporting long-running service protocol requests,

wherein said module for selection of a protocol further allows for association of one or more identifiers with at least one method of said one or more methods, and wherein said at least one method is associated with a long-running service protocol, wherein said one or more identifiers is for use by an interface adapter in managing communication between the manufacturing execution system and the tool.

32. The program according to claim 31, wherein said association of one or more identifiers includes a definition of a transaction identification number for said at least one method.

33. The program according to claim 31, wherein said at least one method is associated with one or more parameters, wherein said association of one or more identifiers includes a selection of at least one of said one or more parameters as a key for said at least one method.