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Gas sensor test chip

  • US 6,709,635 B1
  • Filed: 02/01/2000
  • Issued: 03/23/2004
  • Est. Priority Date: 03/21/1996
  • Status: Expired due to Term
First Claim
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1. A gas sensor test chip, comprising:

  • a single substrate having a plurality of gas sensor resistor elements thereon, each said gas sensor resistor elements having a first gas sensor electrode having a different geometric configuration from one or more other first gas sensor electrodes in the test chip.

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