Thin film bulk acoustic resonator (FBAR) and inductor on a monolithic substrate and method of fabricating the same
First Claim
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1. An apparatus comprising:
- a resonator fabricated on a substrate, said resonator bridging a first cavity the first cavity substantially enclosed by the substrate and said resonator; and
an inductor connected to said resonator, said inductor fabricated on the substrate bridging a second cavity, the second cavity substantially enclosed by the substrate and said inductor.
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Abstract
An apparatus having both a resonator and an inductor fabricated on a single substrate and a method of fabricating the apparatus are disclosed. The apparatus includes a resonator and an inductor that is connected to the resonator. Both the resonator and the inductor are fabricated over their respective cavities to produce a high Q-factor filter circuit.
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13 Claims
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1. An apparatus comprising:
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a resonator fabricated on a substrate, said resonator bridging a first cavity the first cavity substantially enclosed by the substrate and said resonator; and
an inductor connected to said resonator, said inductor fabricated on the substrate bridging a second cavity, the second cavity substantially enclosed by the substrate and said inductor. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An electronic filter comprising:
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a resonator fabricated on a substrate, said resonator bridging a first cavity, the firsts cavity substantially enclosed by the substrate and said resonator; and
an inductor connected to said resonator, said inductor fabricated on the substrate bridging a second cavity, the second cavity substantially enclosed by the substrate and said inductor. - View Dependent Claims (9, 10, 11, 12, 13)
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Specification