Optical switch based on rotating vertical micro-mirror

• US 6,711,318 B2
• Filed: 01/29/2001
• Issued: 03/23/2004
• Est. Priority Date: 01/29/2001
• Status: Expired due to Fees

• Current Assignee: 3M Innovative Properties Company (3M Company)
• Original Assignee: 3M Innovative Properties Company (3M Company)
• Inventors: Weaver, Billy L., Theiss, Silva K., Smith, Robert G., Hamerly, Mike E.
• Primary Examiner(s): Healy, Brian
• Application Number:
  US09/771,757
• Publication Number:
  US 20030012487A1
• Time in Patent Office: 1,149 Days
• Field of Search: 385/15, 385/16, 385/17, 385/18, 385/24
• US Class Current: 385/18
• CPC Class Codes: G02B 26/0866 the reflecting means being moved or deformed by thermal means
• CPC Class Codes: G02B 6/32 having lens focusing means positioned between opposed fibre ends with lens being an integral part of the single fibre end G02B6/262
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3548 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/3564 Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
• CPC Class Codes: G02B 6/3576 Temperature or heat actuation thermal forces controlling reflecting elements in general G02B26/0866; thermo-optic devices G02F1/0147
• CPC Class Codes: G02B 6/358 Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system

Abstract

A MEMS-based device to steer and manipulate beams of light traveling in free-space in an optical switch. The optical switch is based on a rotating vertical micro-mirror constructed on a surface of a substrate. At least one input optical fiber is arranged to direct at least one optical signal through free-space along a first optical path parallel to the surface of the substrate. A plurality of output optical fibers are arranged to receive the optical signal traveling through free-space along other optical paths not co-linear with the first optical path. At least one substantially vertical, rotating micro-mirror assembly is constructed on the substrate. The assembly includes a rotating micro-mirror with a vertical centerline and an axis of rotation both perpendicular to the surface, but not co-linear. The rotating micro-mirror is rotatable between a first position not in the first optical path and at least a second position redirecting the optical signal to one of the output optical fibers.

Claims

1. An optical switch based on a rotating vertical micro-mirror constructed on a surface of a substrate, comprising:

at least one input optical fiber arranged to direct at least one optical signal through a free-space along a first optical path parallel to the surface of the substrate;

a plurality of output optical fibers arranged to receive the optical signal traveling through the free-space, at least one of the output optical fibers comprising an optical path not co-linear with the first optical path; and

at least one substantially vertical, rotating micro-mirror assembly located in the free-space comprising a rotating micro-mirror with a vertical centerline and an axis of rotation both perpendicular to the surface, but not co-linear, the rotating micro-mirror being rotatable between at least one first position not in the first optical path and at least one second position in the first optical path to redirect the optical signal to one of the output optical fibers, wherein the rotating micro-mirror assembly comprises a linkage mechanism mechanically coupled to a plurality of thermal actuators.

2. The optical switch of claim 1 comprising a plurality of input optical fibers.

3. The optical switch of claim 1 wherein the plurality of output optical fibers are generally arranged around the rotating micro-mirror assembly wherein the second position comprises a plurality of positions each adapted to direct the optical signal to one of the output optical fibers.

4. The optical switch of claim 1 wherein the plurality of output optical fibers are generally arranged perpendicular to the first optical path comprising a rotating micro-mirror assembly adjacent to the first optical path, but opposite each of the output optical fibers to selectively redirect the optical signal to any of the output optical fibers.

5. The optical switch of claim 1 comprising:

a plurality of input optical fibers each arranged to direct an optical signal through the free-space; and

an array of rotating micro-mirror assemblies constructed on the substrate arranged to direct the discrete optical signals from any of the plurality of input optical fibers to any of the output optical fibers.

6. The optical switch of claim 5 comprising a secondary array of output optical fibers arranged to receive the optical signals from one or more of the input optical fibers when the rotating micro-mirrors are in the first position.

7. The optical switch of claim 6 wherein one of the optical fibers in the secondary array are co-linear with each of the input optical fibers.

8. The optical switch of claim 1 wherein the input optical fiber is arranged generally perpendicular to each of the output optical fibers.

9. The optical switch of claim 1 wherein the rotating micro-mirror rotates about 45 degrees between the first position and the second position.

10. The optical switch of claim 1 wherein the rotating micro-mirror rotates about 135 degrees between the first position and the second position.

11. The optical switch of claim 1 comprising a gap between the axis of rotation and the rotating micro-mirror.

12. The optical switch of claim 1 comprising a gap between the axis of rotation and the rotating micro-mirror through which the optical signal can pass without engaging the micro-mirror.

13. The optical switch of claim 1 comprising a gap between the axis of rotation and the rotating micro-mirror through which the optical signal can pass when the micro-mirror is in the first position.

14. An optical communication system including at least one optical switch in accordance with claim 1.

15. An optical switch comprising:

a plurality of input optical fibers each arranged to direct optical signals through a free-space along a plurality of input optical paths parallel to the surface of the substrate;

a plurality of output optical fibers not co-linear with the input optical paths and arranged to receive one of the optical signals traveling through free-space; and

a plurality of substantially vertical, rotating micro-mirror assemblies constructed on a surface of a substrate each comprising a rotating micro-mirror with a vertical centerline and an axis of rotation both perpendicular to the surface, but not co-linear, the rotating micro-mirrors being rotatable between a first position not in the input optical paths and at least a second position in one of the optical paths to redirect one of the optical signals to one of the output optical fibers, wherein the rotating micro-mirror assemblies comprise a linkage mechanism mechanically coupled to a plurality of thermal actuators.