Integration of business rule parameters in priority setting of wafer processing

• US 6,711,450 B1
• Filed: 02/02/2000
• Issued: 03/23/2004
• Est. Priority Date: 02/02/2000
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Grover, Jason, Coss, Elfido Jr., Conboy, Michael R.
• Primary Examiner(s): Picard, Leo
• Assistant Examiner(s): Rapp, Chad
• Application Number:
  US09/496,205
• Time in Patent Office: 1,511 Days
• Field of Search: 700/100, 700/104, 700/108, 700/109, 700/112, 700/115, 700/116, 700/121, 700/214, 700/215
• US Class Current: 700/115
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418

Abstract

A method and a system for managing the movement of material lots through a semiconductor fabrication facility. In an example embodiment of the method, the movement of the material lots is tracked and a business rules module is accessed that generates material movement directives as a function of event changes on the line and externally provided directives that change the material lot movement sequence. Material lots are then rearranged in the material handling system as a function of a carrier code and the directive indicating a change. The result is a fabrication process that is more responsive and flexible with respect to internal or external changing conditions.

Claims

1. A method of managing the movement of material lots through a processing facility, the method comprising:

tracking the movement of the material lots in the facility; and

rearranging the material lots in a material handling system as a function of a carrier code, data fed back from the material handling system, and an externally provided directive indicating a material lot movement sequence change.

2. The method of claim 1, further including the steps of:

identifying the material lots affected by the directive; and

communicating instructions, pursuant to a directive, to the material handling system that there is a change to the material lot movement sequence before the step of rearranging the material lots.

3. The method of claim 1, after the step of tracking the material lot movement further including the step of accessing a business rules module arrangement that generates material movement instructions associated with a group consisting of:

a defined set of products, a defined operational process and an event that occurs a material lot movement path.

4. The method of claim 3, wherein accessing the business rules module includes the step of accessing a management input module arrangement and reviewing any directives therein that change the movement of material lots.

6. The method of claim 1, further including the step of using a computer arrangement for tracking the material lot movement and controlling the rearrangement of material lots in the material handling system.

5. A method of managing the movement of material lots through a processing facility, the method comprising:

tracking the movement of the material lots in the facility;

accessing a business rules module arrangement that generates material movement instructions associated with a group consisting of;

a defined set of products, a defined operational process and an event that occurs in a material lot movement path, including accessing a management input module arrangement and reviewing any directives therein that change the movement of material lots;

rearranging the material lots in a material handling system as a function of a carrier code and an externally provided directive indicating a material lot movement sequence change; and

polling the material handling system at defined time intervals to reduce cycle time process steps in moving material lots into or out of a manufacturing process.

7. A method of managing the movement of material lots through a semiconductor fabrication facility, comprising:

tracking the movement of the material lots in the facility;

accessing a business rules module arrangement that generates material movement directives as a function of event changes and reviewing any externally provided directives therein that change the movement of material lots in a material handling system; and

rearranging the material lots in the material handling system as a function of a carrier code, data feel back from the material handling system, and the directive indicating a material lot movement sequence change.

8. The method of claim 7, before the step of rearranging the material lots, further including the steps of:

accessing a management input module that generates directives on material lot movements in connection with management input;

identifying material lots affected by instructions in the business rule module; and

communicating instructions to the material handling system that there is a change to the material lot movement sequence.

9. The method of claim 8, wherein the step of communicating instructions to the material handling system includes sending instructions to equipment interfaces that communicate with material stocking locations.

10. The method of claim 7, wherein the material lots include items selected from a group consisting of:

production wafers, test wafers and empty cassettes.

11. The method of claim 10, wherein the business rule module generates manufacturing instructions for certain operational steps in a manufacturing process.

13. The method of claim 7, further including the step of using a computer arrangement for tracking the material lot movement and controlling the rearrangement of material lots in the material handling system.

12. A method of managing the movement of material lots through a semiconductor fabrication facility, comprising:

tracking the movement of the material lots in the facility;

accessing a business rules module arrangement that generates material movement directive as a function of event changes and reviewing any externally provided directives therein that change the movement of material lots in a material handling system;

rearranging the material lots in the material handling system as a function of a carrier code and the directive indicating a material lot movement sequence change; and

polling the material handling system at defined time intervals to reduce cycle time process steps in moving material lots into or out of a manufacturing process.

14. A system for managing the movement of material lots through a processing facility, the method comprising:

means for tracking the movement of the material lots in the facility; and

means for rearranging the material lots in a material handling system as a function of a carrier code, data fed back from the material handling system, arid an externally provided directive indicating a material lot movement sequence change.

15. A system for managing the movement of material lots through a semiconductor fabrication, comprising:

a material handling system adapted to move and track the movement of material lots in a facility; and

a business rule module coupled to the material handling system that is adapted to rearrange the material lots as a function of a carrier code, data fed back from the material handling system, and an externally provided directive indicating a material lot movement sequence change.

16. The system of claim 15, further including a computer arrangement that integrates a management input module into the business rule module, the computer arrangement coupled to the business module.

17. The system of claim 15, wherein the material lots include products that are selected from a group consisting of:

production wafers, test wafers and empty cassettes.

18. The system of claim 15, wherein the business rule module generates material lot movement instructions associated with a defined set of products.

20. The system of claim 16, wherein the computer arrangement tracks the material lot movement and controls the rearrangement of material lots in the material handling system.

19. A system for managing the movement of material lots through a semiconductor fabrication, comprising:

a material handling system adapted to move and track the movement of material lots in a facility;

business rule module coupled to the material handling system that is adapted to rearrange the material lots as a function of a carrier code and an externally provided directive indicating a material lot movement sequence change; and

a computer arrangement that integrates a management input module into the business rule module, the computer arrangement coupled to the business module; and

means for polling the material handling system at defined time intervals to reduce cycle time by reducing process steps in moving material lots into or out of a manufacturing process.