Web based tool control in a semiconductor fabrication facility

• US 6,711,731 B2
• Filed: 08/23/2001
• Issued: 03/23/2004
• Est. Priority Date: 08/23/2000
• Status: Expired due to Term

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: PRI Automation, Inc. (Azenta, Inc.)
• Inventors: Weiss, Mitchell
• Primary Examiner(s): THOMPSON, ANNETTE M
• Application Number:
  US09/935,919
• Publication Number:
  US 20020095644A1
• Time in Patent Office: 943 Days
• Field of Search: 716/19, 700/121, 700/117, 700/95
• US Class Current: 700/121
• CPC Class Codes: G05B 19/408 characterised by data handling or data format, e.g. reading, buffering or conversion of data
• CPC Class Codes: G05B 2219/32126 Hyperlink, access to program modules and to hardware modules in www, web server, browser
• CPC Class Codes: G05B 2219/33149 Publisher subscriber, publisher, master broadcasts data to slaves, subscriber
• CPC Class Codes: G05B 2219/35582 Control format in browser, use of xtml and xslt
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: H04L 43/00 Arrangements for monitoring or testing data switching networks
• CPC Class Codes: H04L 63/02 for separating internal from external traffic, e.g. firewalls
• CPC Class Codes: H04L 69/08 Protocols for interworking; Protocol conversion

Abstract

In brief, the present invention provides a system for the interconnection of semiconductor fabrication tools (“process tools”) in a semiconductor fabrication facility by use of a data network and microprocessor based interface (“browser”) associated with each process tool. The data network and microprocessor based interface provide communication in accordance with known standards via Intranet or Internet data transfer links to one or more remotely disposed browsers. Data is immediately available in real time on all aspects of the operation of the fabrication facility. Equipment engineers and process engineers can browse the various process tools from any location. Host communications to and from the tools can be monitored without affect on factory operation. The interface is compatible with standard process tools and factory automation or management software systems.

Claims

1. An apparatus for monitoring the communications between a fabrication host and a plurality of fabrication tools, in a semiconductor fabrication facility, wherein process data is obtained from each of the fabrication tools, the apparatus comprising:

a plurality of data capture modules, each of the plurality of data capture modules corresponding to one of the plurality of fabrication tools, each of the plurality of data capture modules coupled to the fabrication host and to the corresponding fabrication tool, wherein data transferred between the fabrication host and the corresponding fabrication tool, which is in a first data format and includes a plurality of current process data, is captured by the data capture module and passed onto the fabrication tool;

a plurality of data translation modules, each one of the plurality of data translation modules coupled to a corresponding one of the plurality of data capture modules, wherein the translation module receives the plurality of current process data, which is in a first data format, and is configured and arranged to translate this current process data into a second data format;

a plurality of servers, each of the plurality of servers coupled to a corresponding one of the plurality of translation modules and further coupled to at least one other server, wherein each of the plurality of servers receives the plurality of current process data, which is in the second data format;

a plurality of web interfaces, each of the plurality of web interfaces coupled to a corresponding one of the plurality of servers and further coupled to at least one other web interface, the web interface configured and arranged to convert the plurality of current process data into a displayable format;

at least one web-browser coupled to at least one of the plurality of web interfaces, wherein the at least one web browser displays at least a portion of the current data transferred between the fabrication host and the corresponding tool in the second data format.

2. The apparatus of claim 1 wherein at least one server includes at least one database server coupled to a database storage device.

3. The apparatus of claim 1 wherein each of the plurality of servers is coupled to at least one other server via a server application network.

4. The apparatus of claim 1 wherein each of the plurality of web interfaces is coupled to at least one other web interface via a data network connection.

5. The apparatus of claim 4 wherein the data network connection is an internet connection.

6. The apparatus of claim 1 wherein the second data format is XML.

7. The apparatus of claim 1 wherein the displayable format is an HTML page.

8. The apparatus of claim 1 further comprising a firewall in series between the web-based interface and the web-based browser.

9. The apparatus of claim 1 wherein the server further includes a hardware interface to interface with at least one other manufacturing tool.

10. The apparatus of claim 1 further comprising one or more predetermined subscription destinations that have subscribed to receive predetermined process data that is a part of the plurality of current process data transferred on a data network between a host manufacturing computer and a manufacturing tool, wherein the server further includes a publish/subscription module coupled to the web interface, wherein the publish/subscription module provides the process data to the web interface to be provided to the one or more predetermined subscription destinations via a data network.

11. The apparatus of claim 3 further comprising at least one database coupled to each of the plurality of translation modules, wherein the plurality of current process data in the second data format is stored in the database.

12. The apparatus of claim 11 wherein the plurality of data translation modules is coupled to the at least one database server via a database data network.

13. The apparatus of claim 1 wherein the server further includes a publish/subscription module coupled to the web interface, wherein the publish/subscription module includes one or more subscription destinations having subscribed to receive predetermined process data and wherein the predetermined process data is provided to the web interface to be provided to the one or more subscription destinations via a data network;

and

further comprising at least one database coupled to each of the plurality of translation modules, wherein the plurality of current process data in the second data format are stored in the database.

14. The apparatus of claim 13 wherein the plurality of data translation modules is coupled to the at least one database server via a database data network.

15. The apparatus of claim 14 wherein the at least one wireless web-browser is coupled to the wireless web interface via an infrared signal.

16. The apparatus of claim 1 wherein at least one of the plurality of web interfaces is a wireless web interface and at least one web-browser is a wireless web-browser coupled to wireless web interface.

17. The apparatus of claim 16 wherein the at least one wireless web-browser is a personal digital assistant.

18. The apparatus of claim 16 wherein the at least one wireless web-browser is a lap-top computer.

19. The apparatus of claim 16 wherein the at least one wireless web-browser is a cellular telephone.

20. The apparatus of claim 16 wherein the at least one wireless web-browser is coupled to the wireless web interface via a radio-frequency signal.

21. An apparatus for providing data transferred on a data network between a host manufacturing computer and a manufacturing tool, and to provide one or more predetermined destinations which have subscribed to receive predetermined process data that is a part of the plurality of current data transferred on a data network between a host manufacturing computer and a manufacturing tool, the apparatus comprising:

a data capture module coupled to the data network, the data capture module configured and arranged to capture the current host or tool data in a first data format;

a translator module coupled to the data capture module and configured and arranged to receive the current host or tool data and to convert the host or tool data from the first data format into a second data format;

a server coupled to the translator module, the server configured and arranged to receive current host or tool data in the second data format from the translator module;

a web interface coupled to the server, the web interface configured and arranged to provide the current or tool data in the second data format in a display format compatible to display the host or tool data on a web-based browser.

22. The apparatus of claim 21 wherein the second data format is XML.

23. The apparatus of claim 21 wherein the display format is an HTML page.

24. The apparatus of claim 21 further comprising a firewall in series between the web interface and the web-based browser.

25. The apparatus of claim 21 further including at least one other manufacturing tool and wherein the server further includes a hardware interface to interface with at least one other manufacturing tool.

26. The apparatus of claim 21 further comprising at least one database coupled to each of the plurality of translation modules, wherein the plurality of current process data in the second data format is stored in the database.

27. The apparatus of claim 26 wherein the plurality of data translation modules is coupled to the at least one database server via a database data network.

28. The apparatus of claim 21 further comprising one or more predetermined subscription destinations that have subscribed to receive predetermined process data that is a part of the plurality of current data transferred on a data network between a host manufacturing computer and a manufacturing tool, wherein the server further includes a publish/subscription module coupled to the web interface, wherein the publish/subscription module provides the predetermined process data to the web interface to be provided to the one or more predetermined subscription destinations via a data network.

29. The apparatus of claim 21 further comprising at least one database coupled to each of the plurality of translation modules, wherein the plurality of current process data in the second data format is stored in the database.

30. The apparatus of claim 29 wherein the plurality of data translation modules is coupled to the at least one database server via a database data network.

31. A method for providing current process data, transferred on a data network between a host manufacturing computer and a manufacturing tool, to a predetermined destination that has subscribed to receive predetermined process data that is portion of the current process data the method comprising:

receiving a current host or tool process data in a first data format;

translating the received current host or tool process data from the first data format to a second data format;

preparing the current host or tool process data to be displayed on a web-based browser;

selecting the portion of the predetermined current host or tool process data corresponding to the subscription destination; and

distributing the selected portion of the predetermined process data to the subscription destination.

32. The method of claim 31 further comprising the steps of storing the received current host or tool communication in the second data format in a database.