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Warpage measurement system and methods

  • US 6,711,828 B2
  • Filed: 12/05/2001
  • Issued: 03/30/2004
  • Est. Priority Date: 12/05/2001
  • Status: Expired due to Term
First Claim
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1. A method for determining warpage by measuring the height variability along a plurality of locations at the top surface of a stack of materials, the method comprising:

  • placing a stack of materials onto a holder that comprises a base and at least two sides extending from the base such that the stack of materials rests on the base and is generally flush with the sides;

    measuring a distance of the top surface of the stack of materials relative to a fixed plane, separately at each of the locations along the top of the stack of materials; and

    determining the height variability of the stack based on the differences in the measurements at the plurality of locations.

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