Warpage measurement system and methods
First Claim
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1. A method for determining warpage by measuring the height variability along a plurality of locations at the top surface of a stack of materials, the method comprising:
- placing a stack of materials onto a holder that comprises a base and at least two sides extending from the base such that the stack of materials rests on the base and is generally flush with the sides;
measuring a distance of the top surface of the stack of materials relative to a fixed plane, separately at each of the locations along the top of the stack of materials; and
determining the height variability of the stack based on the differences in the measurements at the plurality of locations.
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Abstract
A method for measuring the height variability of a stack of materials comprises placing a stack of materials onto a holder that comprises a base and at least two sides extending from the base such that the stack of materials rests on the base and is generally flush with the sides. A distance of a top of the stack of materials relative to a fixed plane is measured at various locations along the top of the stack of materials. The height variability of the stack is determined based on the measurements.
26 Citations
17 Claims
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1. A method for determining warpage by measuring the height variability along a plurality of locations at the top surface of a stack of materials, the method comprising:
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placing a stack of materials onto a holder that comprises a base and at least two sides extending from the base such that the stack of materials rests on the base and is generally flush with the sides;
measuring a distance of the top surface of the stack of materials relative to a fixed plane, separately at each of the locations along the top of the stack of materials; and
determining the height variability of the stack based on the differences in the measurements at the plurality of locations. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A measuring system for determining warpage in a stack of material, comprising:
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a holder comprising a base and at least two sides extending from the base wherein the holder is adapted to hold the stack of materials such that the stack of materials is generally flush with the two sides;
a measuring device that is configured to measure the distance between each of a plurality of locations on a top of the stack of materials and a fixed plane, whereby the height variability of the stack of materials may be calculated from differences in the measurements; and
a positioning device that is configured to permit the measuring device to be positioned at each of the locations along the top surface of the stack of materials. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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Specification