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Controlled curvature of stressed micro-structures

  • US 6,712,480 B1
  • Filed: 09/27/2002
  • Issued: 03/30/2004
  • Est. Priority Date: 09/27/2002
  • Status: Active Grant
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1. A micro-device comprising at least one suspended ribbon structure comprising a silicon-based under-layer, a metal top-layer and a ceramic compensating layer positioned between the silicon-based support layer and the metal top-layer.

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