Controlled curvature of stressed micro-structures
First Claim
1. A micro-device comprising at least one suspended ribbon structure comprising a silicon-based under-layer, a metal top-layer and a ceramic compensating layer positioned between the silicon-based support layer and the metal top-layer.
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Abstract
The current invention is directed to optical MEM devices and methods for making the same. MEM devices, in accordance with the current invention, have one or more movable micro-structures which are preferably ribbon structures or cantilever structures configured for modulating light. The movable micro-structures are patterned from a device layer comprising a silicon nitride under-layer, a reflective metal top-layer and a ceramic compensating layer. The ceramic compensating layer is provided. to reduce stress in the micro-structures which can lead to curvature. In accordance with the embodiments of the invention, the device layer is formed on a silicon substrate that is preferably etched with trenches before forming the device layer. The device layer is then patterned using lithographic masking and etching techniques to release the patterned device layer and form the movable micro-structures. Portions of the device layer which are formed over the trenches provide support for the released patterned device layer.
759 Citations
15 Claims
- 1. A micro-device comprising at least one suspended ribbon structure comprising a silicon-based under-layer, a metal top-layer and a ceramic compensating layer positioned between the silicon-based support layer and the metal top-layer.
- 10. A MEMS comprising a release structure comprising a plurality of movable ribbons each comprising a bottom layer of silicon-nitride, a top-layer of reflective metal and a middle layer of ceramic material.
Specification