Insulating and functionalizing fine metal-containing particles with conformal ultra-thin films
First Claim
Patent Images
1. A material in the form of non-agglomerated particles having an average diameter of less than about 500 microns, comprising substrate particles having an ultrathin film of an inorganic material deposited on the surface thereof.
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Abstract
Particles have an ultrathin, conformal coating are made using atomic layer deposition methods. The base particles include ceramic and metallic materials. The coatings can also be ceramic or metal materials that can be deposited in a binary reaction sequence. The coated particles are useful as fillers for electronic packaging applications, for making ceramic or cermet parts, as supported catalysts, as well as other applications.
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Citations
83 Claims
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1. A material in the form of non-agglomerated particles having an average diameter of less than about 500 microns, comprising substrate particles having an ultrathin film of an inorganic material deposited on the surface thereof.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 53, 54)
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2. The material of claim 1 wherein the inorganic material has a thickness of from about 0.5 to about 35 nanometers.
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3. The material of claim 1 wherein the inorganic material is a metal or an inorganic oxide, nitride, sulfide or phosphide.
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4. The material of claim 3 wherein the substrate particles are of a Group 3, 13 or 14 nitride or a Group 4, 6, 13 or 14 carbide, and the ultrathin inorganic material is an inorganic oxide or a metal.
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5. The material of claim 4 wherein the substrate particles are of a sinterable material and the inorganic material is a metal.
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6. The material of claim 5 wherein the ultrathin inorganic material is a sintering aid.
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7. The material of claim 2 wherein the substrate particles are metal particles and the ultrathin inorganic material is an inorganic oxide, nitride, sulfide or phosphide.
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8. The material of claim 7 wherein the metal is iron and the ultrathin inorganic material is transparent to IR radiation.
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21. A resin matrix filled with particles of claim 1.
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22. An electronic component encapsulated with a resin matrix of claim 21.
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23. A method of making a cermet part, comprising forming a shaped mass of particles of claim 5, and then exposing said shaped mass to conditions sufficient to sinter the particles to form a part.
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24. The method of claim 23, wherein said ultrathin inorganic material is cobalt, aluminum, or nickel aluminide.
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25. A method of making a ceramic material, comprising forming a shaped mass of particles of claim 6 and then exposing said shaped mass to conditions sufficient to sinter the particles to form a shaped part.
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26. A method of catalyzing a chemical reaction, comprising conducting said chemical reaction in the presence of particles of claim 1, wherein the inorganic material is a metal that is a catalyst for said chemical reaction.
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27. The resin matrix of claim 21, wherein the particles are BN particles coated with an ultrathin layer of alumina, which is in turn coated with an ultrathin layer of silica.
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28. The resin matrix of claim 21, wherein the substrate particle is a metal and the inorganic material is a conformal coating of a non-conductive inorganic material.
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29. The resin matrix of claim 21, wherein the substrate particle is a metal and the inorganic material is a conformal coating of an inorganic material having surface O—
- H, N—
H or S—
H groups.
- H, N—
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30. The material of claim 1 wherein the inorganic material forms a conformal coating.
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31. The material of claim 1 wherein the substrate particle is a metal fuel and the inorganic material is an oxidizer.
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32. The material of claim 31 wherein the metal fuel is aluminum and the oxidizer is NiO, WO3, Co3O4, MnO or SnO2.
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33. An explosive device comprising the material of claim 32.
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34. A thermite rod comprising the material of claim 32.
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35. The material of claim 1 wherein the substrate material is iron and the inorganic material is silica.
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36. The material of claim 1 wherein the substrate particle is magnetic or paramagnetic.
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37. A magnetically responsive composition comprising the material of claim 36, particles of activated carbon, the material and the activated carbon having a particle size of 1-1000 nm, and a therapeutic or diagnostic substance.
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38. A magnetically responsive composition comprising the material of claim 36 having a particle size of 1-1000 nm, a biologically inert polymer and a therapeutic or diagnostic substance, wherein the therapeutic or diagnostic substance is sorbed onto the biologically inert polymer, the biologically inert polymer is present on a surface of the material, and the biologically inert polymer is biologically benign.
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39. A method for delivering a pharmaceutical to a specific site in a patient, comprising:
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(a) delivering the material of claim 37 into a blood vessel of the patient; and
(b) establishing a magnetic field exterior to the patient and adjacent to the specific site of sufficient field strength to guide a portion of said material through the blood vessel to a point at or near the site so that a therapeutic amount of the therapeutic or diagnostic substance concentrates at the specific site.
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40. A method for delivering a pharmaceutical to a specific site in a patient, comprising:
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(a) delivering the material of claim 38 into a blood vessel of the patient; and
(b) establishing a magnetic field exterior to the patient and adjacent to the specific site of sufficient field strength to guide a portion of said material through the blood vessel to a point at or near the site so that a therapeutic amount of the therapeutic or diagnostic substance concentrates at the specific site.
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41. The method of claim 39 wherein the specific site is a disease site.
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42. The method of claim 40 wherein the specific site is a disease site.
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43. The material of claim 3 wherein the inorganic material is alumina and the substrate particles are Fe, Co, Ni, Zn, Mn, Mg, Ca, Ba, Sr, Cd, Hg, Al, B, Sc, Ga, V, Ti, or In.
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44. The material of claim 3 wherein the inorganic material is alumina and wherein the substrate particles are Nd—
- Fe—
B.
- Fe—
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45. The material of claim 3 wherein the inorganic material is alumina and wherein the substrate particles are Fe3O4, Fe2O3, TiO2, ZnO, or FeO.
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46. The material of claim 3 wherein the inorganic material is alumina and the substrate material is nickel (Ni) and has a particle size of between 50 and 150 microns.
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53. The material of claim 1 wherein the non-agglomerated particles have an average particle size not more than 5% greater than the substrate particles, apart from particle size increases attributable to the thickness of the coating.
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54. The material of claim 1 wherein no more than 2 weight percent of the particles become agglomerated during the deposition of the ultrathin inorganic material.
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2. The material of claim 1 wherein the inorganic material has a thickness of from about 0.5 to about 35 nanometers.
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9. A method for depositing an ultrathin inorganic material on substrate particles comprising conducting a sequence of two or more self-limiting reactions at the surface of said substrate particles to form coated particles having an ultrathin layer of an inorganic material bonded to the surface of said substrate particles.
- View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 47, 48, 49, 50, 51, 52)
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10. The method of claim 9, wherein the sequence is a binary sequence of reactions represented as
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11. The method of claim 10 wherein M1 is silicon, titanium or aluminum.
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12. The method of claim 9 wherein the sequence is a binary sequence of reactions represented as
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13. The method of claim 9 wherein the sequence is a binary sequence of reactions represented as
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14. The method of claim 9 wherein the substrate particles are an inorganic nitride or carbide.
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15. The method of claim 9 wherein the sequence of reactions is continued until a coating of desired thickness is obtained.
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16. The method of claim 15 wherein the ultrathin inorganic material has a thickness of about 0.5 to about 35 nanometers.
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17. The method of claim 9 wherein a precursor reaction is conducted to impart functional groups on the surface of the substrate particle before conducting said sequence of reactions.
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18. The method of claim 9 wherein said sequence of reactions is a sequence of catalyzed reactions.
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19. The method of claim 9 wherein said sequence of reactions is a binary sequence of reactions comprising contacting said substrate particle alternately with a metal halide and a metal halide reducing agent.
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20. The method of claim 19 wherein said metal halide is a fluoride or chloride of tungsten, rhenium, molybdenum, antimony, selenium, thallium, chromium, platinum, ruthenium, iridium, or germanium.
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47. A non-agglomerated product made by the process of claim 9.
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48. A non-agglomerated product made by the process of claim 13.
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49. A non-agglomerated product made by the process of claim 16.
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50. A non-agglomerated product made by the process of claim 18.
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51. The process of claim 9 wherein the coated particles have an average particle size not more than 5% more than the substrate particles, apart froms particle size increases attributable to the thickness of the coating.
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52. The process of claim 9 wherein no more than 2 weight percent of the particles become agglomerated during the deposition of the ultrathin inorganic material.
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10. The method of claim 9, wherein the sequence is a binary sequence of reactions represented as
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55. A material in the form of particles having an average diameter of less than about 500 microns, comprising substrate particles having an ultrathin, conformal continuous or semicontinuous film of an inorganic material deposited on the surface thereof.
- View Dependent Claims (56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 83)
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56. The material of claim 55 wherein the film has thickest regions that are no greater than 3 times the thickness of thinnest regions of the film, as determined by a method that has a resolution of 10 nm or below.
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57. The material of claim 56 wherein the inorganic material has a thickness of from about 0.5 to about 35 nanometers.
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58. The material of claim 57 wherein the inorganic material is a metal or an inorganic oxide, nitride, sulfide or phosphide.
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59. The material of claim 58 wherein the substrate particles are of a Group 3, 13 or 14 nitride or a Group 4, 6, 13 or 14 carbide, and the ultrathin inorganic material is an inorganic oxide or a metal.
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60. The material of claim 59 wherein the substrate particles are of a sinterable material and the inorganic material is a metal.
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61. The material of claim 60 wherein the ultrathin inorganic material is a sintering aid.
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62. The material of claim 57 wherein the substrate particles are metal particles and the ultrathin inorganic material is an inorganic oxide, nitride, sulfide or phosphide.
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63. The material of claim 62 wherein the metal is iron and the ultrathin inorganic material is transparent to IR radiation.
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64. The material of claim 55 wherein the substrate particle is a metal fuel and the inorganic material is an oxidizer.
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65. The material of claim 64 wherein the metal fuel is aluminum and the oxidizer is NiO, WO3, Co3O4, MnO or SnO2 .
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66. The material of claim 55 wherein the substrate material is iron and the inorganic material is silica.
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67. The material of claim 55 wherein the substrate particle is magnetic or paramagnetic.
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68. The material of claim 55 wherein the film is substantially free of pinholes and defects.
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69. A resin matrix filled with particles of claim 55.
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70. The resin matrix of claim 69, wherein the particles are BN particles coated with an ultrathin layer of alumina, which is in turn coated with an ultrathin layer of silica.
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71. The resin matrix of claim 69, wherein the substrate particle is a metal and the inorganic material is a conformal coating of a non-conductive inorganic material.
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72. A method of making a cermet part, comprising forming a shaped mass of particles of claim 60, and then exposing said shaped mass to conditions sufficient to sinter the particles to form a part.
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73. The method of claim 72, wherein said ultrathin inorganic material is cobalt, aluminum, or nickel aluminide.
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74. A method of making a ceramic material, comprising forming a shaped mass of particles of claim 61 and then exposing said shaped mass to conditions sufficient to sinter the particles to form a shaped part.
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75. A method of catalyzing a chemical reaction, comprising conducting said chemical reaction in the presence of particles of claim 55, wherein the inorganic material is a metal that is a catalyst for said chemical reaction.
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76. An explosive device comprising the material of claim 64.
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77. A thermite rod comprising the material of claim 64.
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78. A magnetically responsive composition comprising the material of claim 67, having particles of activated carbon, the material and the activated carbon each having a particle size of 1-1000 nm, and a therapeutic or diagnostic substance.
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79. A magnetically responsive composition comprising the material of claim 67 having a particle size of 1-1000 nm, a biologically inert polymer and a therapeutic or diagnostic substance, wherein the therapeutic or diagnostic substance is sorbed onto the biologically inert polymer, the biologically inert polymer is present on a surface of the material and the biologically inert polymer is in biologically benign.
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80. A method for delivering a pharmaceutical to a specific site in a patient, comprising:
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(a) delivering the material of claim 78 into a blood vessel of the patient; and
(b) establishing a magnetic field exterior to the patient and adjacent to the specific site of sufficient field strength to guide a portion of said material through the blood vessel to a point at or near the site so that a therapeutic amount of the therapeutic or diagnostic substance concentrates at the specific site.
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81. A method for delivering a pharmaceutical to a specific site in a patient, comprising:
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(a) delivering the material of claim 79, into a blood vessel of the patient; and
(b) establishing a magnetic field exterior to the patient and adjacent to the specific site of sufficient field strength to guide a portion of said material through the blood vessel to a point at or near the site so that a therapeutic amount of the therapeutic or diagnostic substance concentrates at the specific site.
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82. The method of claim 80 wherein the specific site is a disease site.
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83. The method of claim 81 wherein the specific site is a disease site.
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56. The material of claim 55 wherein the film has thickest regions that are no greater than 3 times the thickness of thinnest regions of the film, as determined by a method that has a resolution of 10 nm or below.
Specification
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Current AssigneeThe Board of Regents of the University of Colorado (University of Colorado System)
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Original AssigneeThe Board of Regents of the University of Colorado (University of Colorado System)
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InventorsGeorge, Steven M., Wank, Jeffrey R., Ferguson, John D., Weimer, Alan W.
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Primary Examiner(s)KILIMAN, LESZEK B
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Application NumberUS10/196,934Publication NumberTime in Patent Office623 DaysField of Search428/402, 428/403, 428/404, 427/128, 427/215, 427/561, 427/255, 427/255.3, 427/126.1, 427/212, 427/214, 427/249.1, 427/249.5US Class Current428/402CPC Class CodesB01J 2/006 Coating of the granules wit...B01J 21/04 AluminaB01J 23/755 NickelB01J 27/24 Nitrogen compoundsB01J 37/0207 Pretreatment of the supportB01J 37/0238 via the gaseous phase-subli...B01J 37/024 Multiple impregnation or co...B01J 37/086 Decomposition of an organom...B22F 1/16 Metallic particles coated w...B22F 1/17 Metallic particles coated w...B22F 1/18 Non-metallic particles coat...C04B 14/322 CarbidesC04B 14/325 NitridesC04B 20/1066 Oxides, HydroxidesC04B 2235/3225 Yttrium oxide or oxide-form...C04B 2235/3244 Zirconium oxides, zirconate...C04B 2235/3821 Boron carbidesC04B 2235/3839 Refractory metal carbidesC04B 2235/3843 Titanium carbidesC04B 2235/3847 Tungsten carbidesC04B 2235/386 : Boron nitridesC04B 2235/3865 : Aluminium nitridesC04B 2235/3873 : Silicon nitrides, e.g. sili...C04B 2235/444 : Halide containing anions, e...C04B 2235/446 : Sulfides, tellurides or sel...C04B 35/581 : based on aluminium nitrideC04B 35/583 : based on boron nitrideC04B 35/584 : based on silicon nitrideC04B 35/628 : Coating the powders or the ...C04B 35/62807 : Silica or silicatesC04B 35/62813 : Alumina or aluminatesC04B 35/62815 : Rare earth metal oxidesC04B 35/62821 : Titanium oxideC04B 35/62828 : Non-oxide ceramicsC04B 35/62831 : CarbidesC04B 35/62836 : NitridesC04B 35/62842 : MetalsC04B 35/62884 : by gas phase techniquesC04B 35/62894 : with more than one coating ...C04B 35/62897 : Coatings characterised by t...C04B 41/009 : characterised by the materi...C04B 41/4531 : by C.V.D.C04B 41/4584 : Coating or impregnating of ...C04B 41/5027 : Oxide ceramics in general; ...C04B 41/5031 : AluminaC04B 41/5035 : SilicaC04B 41/52 : Multiple coating or impregn...C04B 41/81 : Coating or impregnationC04B 41/89 : for obtaining at least two ...C23C 10/06 : using gasesC23C 16/402 : Silicon dioxideC23C 16/403 : of aluminium, magnesium or ...C23C 16/4417 : Methods specially adapted f...C23C 16/442 : using fluidised bed processC23C 16/45525 : Atomic layer deposition [ALD]C23C 16/45555 : applied in non-semiconducto...C23C 30/00 : Coating with metallic mater...C23C 8/02 : Pretreatment of the materia...H01L 23/295 : containing a filler H01L23/...H01L 23/3737 : Organic materials with or w...H01L 2924/00 : Indexing scheme for arrange...H01L 2924/0002 : Not covered by any one of g...Y02T 50/60 : Efficient propulsion techno...Y10T 428/2982 : Particulate matter [e.g., s...Y10T 428/2991 : CoatedY10T 428/2993 : Silicic or refractory mater...Y10T 428/2998 : including synthetic resin o...