Single unit position sensor

• US 6,713,829 B1
• Filed: 03/12/2003
• Issued: 03/30/2004
• Est. Priority Date: 03/12/2003
• Status: Active Grant

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Karpman, Maurice S.
• Primary Examiner(s): Ngô , Ngân V.
• Application Number:
  US10/386,579
• Time in Patent Office: 384 Days
• Field of Search: 257/414, 257/415, 257/417
• US Class Current: 257/415
• CPC Class Codes: G01C 21/165 combined with non-inertial navigation instruments

Abstract

A position sensor includes a receiver capable of receiving a position signal from an external source, and an inertial motion unit capable of sensing movement and producing a movement signal based upon the sensed movement. The position sensor also includes a processor operatively coupled with the receiver and the inertial motion unit. The processor is capable of calculating position information based on at least one of the position signal and the movement signal. Moreover, the receiver, inertial motion unit and processor are formed on a single chip.

Claims

1. A single unit MEMS device comprising:

a movable structure capable of moving relative to other portions of the MEMS device; and

high performance circuitry capable of processing a position signal received from an external source,

position information being calculable based upon at least one of the movement of the movable structure and the processed position signal from the circuitry.

2. The MEMS device as defined by claim 1 wherein the circuitry includes a set of transistors capable of processing a signal having a frequency that is substantially equal to or greater than about 200 megahertz.

3. The MEMS device as defined by claim 1 wherein the movable structure is a part of at least one of an angular rate sensor and an accelerometer.

4. The MEMS device as defined by claim 1 wherein the circuitry includes radio frequency circuitry for processing the position signal.

5. The MEMS device as defined by claim 4 further including processor circuitry operatively coupled with the radio frequency circuitry, the processor circuitry being capable of determining position based on at least one of the movement of the movable structure and the processed position signal from the radio frequency circuitry.

6. The MEMS device as defined by claim 1 wherein the circuitry is formed at least in part from a material having a higher electron mobility than that of single crystal silicon.

7. The MEMS device as defined by claim 1 wherein the movable structure is formed from a material comprising geranium.

8. A MEMS device comprising:

a movable structure capable of moving relative to other portions of the MEMS device; and

circuitry capable of processing a signal having a frequency that is substantially equal to or greater than about 200 megahertz,

the movable structure and circuitry cooperating to deliver an output signal.

9. The MEMS device as defined by claim 8 wherein the movable structure is a portion of at least one of an accelerometer and a gyroscope.

10. The MEMS device as defined by claim 8 wherein the circuitry includes radio frequency circuitry.

11. The MEMS device as defined by claim 8 further including a processor operatively coupled with both the structure and the circuitry, the processor processing movement of the structure and signals produced by the circuitry to produce the output signal.

12. The MEMS device as defined by claim 8 wherein the circuitry is formed at least in part from a material having a higher electron mobility than that of single crystal silicon.

13. The MEMS device as defined by claim 8 wherein the output signal includes position information.

14. The MEMS device as defined by claim 8 wherein the circuitry is capable of processing a signal having a frequency that is substantially equal to or greater than about 1.5 gigahertz.

15. A position sensor comprising:

a receiver capable of receiving a position signal from an external source;

an inertial motion unit capable of sensing movement and producing a movement signal based upon the sensed movement; and

a processor operatively coupled with the receiver and the inertial motion unit, the processor being capable of calculating position information based on at least one of the position signal and the movement signal,

the receiver, inertial motion unit and processor being formed on a single chip.

16. The position sensor as defined by claim 15 wherein the chip is a MEMS device.

17. The position sensor as defined by claim 15 wherein the receiver includes radio frequency circuitry.

18. The position sensor as defined by claim 15 wherein the inertial motion unit includes at least one of a gyroscope and an accelerometer.

19. The position sensor as defined by claim 15 wherein the processor includes a microprocessor.

20. The position sensor as defined by claim 15 wherein the receiver is formed at least in part from a material having a higher electron mobility than that of single crystal silicon.

21. The position sensor as defined by claim 15 wherein the inertial motion unit includes first structure capable of moving relative to second structure, the first structure being formed by a material comprising geranium.