Inductive fuse for semiconductor device

• US 6,713,838 B2
• Filed: 10/29/2001
• Issued: 03/30/2004
• Est. Priority Date: 10/13/1999
• Status: Expired due to Fees

• Current Assignee: Google LLC (Alphabet Inc.)
• Original Assignee: International Business Machines Corporation
• Inventors: Previti-Kelly, Rosemary A., Motsiff, William T., Pricer, Wilbur D.
• Primary Examiner(s): Wille, Douglas A.
• Application Number:
  US10/003,587
• Publication Number:
  US 20020037606A1
• Time in Patent Office: 883 Days
• Field of Search: 257/529
• US Class Current: 257/529
• CPC Class Codes: H01L 23/5227 Inductive arrangements or effects of, or between, wiring layers other inductive arrangements H01L23/645
• CPC Class Codes: H01L 23/5256 comprising fuses, i.e. connections having their state changed from conductive to non-conductive
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A method and structure for blowing a fuse including removing an insulator above a fuse link and etching the fuse link.

Claims

1. A programming device comprising:

an inductive circuit in which an inductance is alterable,

wherein said inductive circuit includes a primary turn, a secondary turn, and

wherein said programming device comprises a fuse and said shorted turn comprises a fuse link.

2. The programming device in claim 1, wherein removing a portion of said shorted turn changes said inductance.

3. The programming device in claim 1, wherein said secondary turn is positioned between said primary turn and said shorted turn.

4. The programming device in claim 1, wherein a current in said shorted turn prevents coupling between said primary turn and said secondary turn.

5. The programming device in claim 1, wherein said primary turn and said secondary turn include aligned openings and said shorted turn includes a portion extending over said aligned openings.

6. The programming device in claim 1, wherein said shorted turn is isolated from other circuitry.

7. The programming device in claim 1, wherein said shorted turn is insensitive to corrosion.

8. A fuse comprising:

a primary turn;

a secondary turn above said primary turn; and

a shorted turn above said secondary turn,

wherein removing a portion of said shorted turn changes an inductance of said fuse.

9. The fuse in claim 8, wherein said primary turn comprises a first wire positioned in a first plane, said first wire having two ends and an inner and an outer periphery, said wire having a loop shape such that said two ends are in close proximity to one another.

10. The fuse in claim 9, wherein said secondary turn comprises a second wire position in a second plane, said second wire having two ends and an inner and an outer periphery, said second wire having a loop shape such that said ends are in close proximity to one another, said inner periphery of said second wire aligning substantially over said inner periphery of said first wire and said outer periphery of said second wire aligning substantially over said outer periphery of said first wire.

11. The fuse in claim 10, wherein said shorted turn comprises a third wire contained in a plane having an inner and an outer periphery, and comprising a closed loop, said inner periphery of said third wire aligning substantially over said inner periphery of said second wire and said outer periphery of said third wire aligning substantially over said outer periphery of said second wire.

12. The fuse in claim 11, further comprising a first insulator between said first wire and said second wire and a second insulator on between said second wire and said third wire.

13. The fuse in claim 8, wherein said shorted turn is isolated from other circuitry.

14. The fuse in claim 8, wherein said shorted turn is insensitive to corrosion.

15. A programming device comprising:

an inductive circuit,

wherein said inductive circuit includes a primary turn, a secondary turn and a shorted turn, and

wherein said shorted turn comprises a fuse link adapted to alter an inductance of said inductive circuit.

17. The programming device in claim 15, wherein said secondary turn is positioned between said primary turn and said shorted turn.

18. The programming device in claim 15, wherein a current in said shorted turn prevents coupling between said primary turn and said secondary turn.

19. The programming device in claim 15, wherein said primary turn and said secondary turn include aligned openings and said shorted turn includes a portion extending over said aligned openings.

16. The programming device in cliam 15, wherein removing a portion of said shorted turn changes said inductance.

20. The programming device in clain 15, wherein said shorted turn is isolated from other circuitry.