Method and apparatus for determination and control of plasma state

• US 6,713,969 B2
• Filed: 01/31/2003
• Issued: 03/30/2004
• Est. Priority Date: 01/31/2002
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Sirkis, Murray, Mitrovic, Andrej, Strang, Eric J., Johnson, Wayne L.
• Primary Examiner(s): Philogene, Haissa
• Application Number:
  US10/355,173
• Publication Number:
  US 20030141822A1
• Time in Patent Office: 424 Days
• Field of Search: 315/111.21, 315/111.81, 315/39.61, 315/39.65, 315/501, 315/502, 118/723.R, 118/723.MW, 118/723.ER, 118/723.IR, 204/157.15, 204/555, 204/556, 313/231.31, 438/9, 438/16, 438/726, 438/728, 438/730, 356/482, 356/513
• US Class Current: 315/111.21
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32266 Means for controlling power transmitted to the plasma
• CPC Class Codes: H05H 1/0062 by using microwaves

Abstract

A plasma processing system that includes a plasma chamber, an open resonator movably mounted within the plasma chamber, and a detector. The open resonator produces a microwave signal, and the detector detects the microwave signal and measures a mean electron plasma density along a path of the signal within a plasma field. Alternatively, the plasma processing system includes a plasma chamber, a plurality of open resonators provided within the plasma chamber, a plurality of detectors, and a processor. The processor is configured to receive a plurality of mean electron plasma density measurements from the detectors that correspond to locations of the plurality of open resonators.

Claims

1. A plasma processing system comprising:

a plasma chamber;

an open resonator movably mounted within said plasma chamber, said open resonator being configured to produce a microwave signal; and

a detector configured to detect the microwave signal and measure a mean electron plasma density along a path of the microwave signal within a plasma field of said plasma chamber.

2. The plasma processing system according to claim 1, further comprising a processor configured to receive a plurality of mean electron plasma density measurements from said detector that correspond to a location of said open resonator.

3. The plasma processing system according to claim 2, wherein said processor is configured to calculate plasma density within the plasma field as a function of position using the plurality of mean electron plasma density measurements.

4. The plasma processing system according to claim 2, wherein said processor is configured to utilize tomographic inversion to calculate plasma density as a function of position using the plurality of mean electron plasma density measurements.

5. The plasma processing system according to claim 2, wherein said processor is configured to calculate plasma density as a function of position and determine whether a plasma density at a given location is within a predetermined range.

6. The plasma processing system according to claim 5, wherein said processor is configured to control the system to maintain the plasma density at the given location within the predetermined range.

7. The plasma processing system according to claim 2, wherein said processor is configured to control at least one plasma property by at least one of adjusting RF power, adjusting pressure within said plasma chamber, and adjusting gas composition within said plasma chamber.

8. The plasma processing system according to claim 1, wherein said open resonator comprises a first microwave mirror and a second microwave mirror oriented opposite said first microwave mirror.

9. The plasma processing system according to claim 1, wherein said plasma chamber is cylindrical in shape and has a cylindrical axis that extends perpendicular to an upper surface of a wafer receiving chuck provided within said plasma chamber, said open resonator being configured to produce the microwave signal generally along an axis that is perpendicular to said cylindrical axis.

10. The plasma processing system according to claim 9, wherein the axis of the microwave signal does not pass through the cylindrical axis of said plasma chamber.

11. A plasma processing system comprising:

a plasma chamber;

a plurality of open resonators provided within said plasma chamber, said plurality of open resonators being configured to produce microwave signals;

a plurality of detectors configured to detect the microwave signals and measure a mean electron plasma density along paths of the microwave signals within a plasma field of said plasma chamber; and

a processor configured to receive a plurality of mean electron plasma density measurements from said detectors that correspond to locations of said plurality of open resonators.

12. The plasma processing system according to claim 11, wherein said processor is configured to calculate plasma density within the plasma field as a function of position using the plurality of mean electron plasma density measurements.

13. The plasma processing system according to claim 12, wherein said processor is configured to utilize tomographic inversion to calculate plasma density as a function of position using the plurality of mean electron plasma density measurements.

14. The plasma processing system according to claim 12, wherein said processor is configured to calculate plasma density as a function of position and determine whether a plasma density at a given location is within a predetermined range.

15. The plasma processing system according to claim 14, wherein said processor is configured to control the system to maintain the plasma density at the given location within the predetermined range.

16. The plasma processing system according to claim 11, wherein said processor is configured to control plasma properties by at least one of adjusting RF power, adjusting pressure within said plasma chamber, and adjusting gas composition within said plasma chamber.

17. The plasma processing system according to claim 11, wherein said plurality of open resonators each comprise a first microwave mirror and a second microwave mirror oriented opposite said first microwave mirror.

18. The plasma processing system according to claim 11, wherein:

said plasma chamber is cylindrical in shape and has a cylindrical axis that extends perpendicular to an upper surface of a wafer receiving chuck provided within said plasma chamber; and

said plurality of open resonators are configured to produce microwave signals generally along axes that are perpendicular to said cylindrical axis.

19. The plasma processing system according to claim 11, wherein said plurality of open resonators are simultaneously excited.

20. The plasma processing system according to claim 11, wherein said plurality of open resonators are sequentially excited.

21. A plasma processing system comprising:

a plasma chamber;

means for measuring mean electron plasma density along a path at a plurality of locations within a plasma field in said plasma chamber; and

means for calculating plasma density within the plasma field as a function of position using the measured mean electron plasma density.

22. The plasma processing system according to claim 21, wherein said means for measuring comprises:

an open resonator movably mounted within said plasma chamber, said open resonator being configured to produce a microwave signal; and

a detector configured to detect the microwave signal and measure the mean electron plasma density.

23. The plasma processing system according to claim 22, wherein said open resonator comprises a first microwave mirror and a second microwave mirror oriented opposite said first microwave mirror.

24. The plasma processing system according to claim 22, wherein said plasma chamber is cylindrical in shape and has a cylindrical axis that extends perpendicular to an upper surface of a wafer receiving chuck provided within said plasma chamber, said open resonator being configured to produce the microwave signal generally along an axis that is perpendicular to said cylindrical axis.

25. The plasma processing system according to claim 21, wherein said means for calculating comprises a processor configured to receive a plurality of mean electron plasma density measurements from said means for measuring that correspond to a location of said open resonator.

26. The plasma processing system according to claim 25, wherein said processor is configured to utilize tomographic inversion to calculate plasma density as a function of position using the plurality of mean electron plasma density measurements.

27. The plasma processing system according to claim 25, wherein said processor is configured to calculate plasma density as a function of position and determine whether a plasma density at a given location is within a predetermined range.

28. The plasma processing system according to claim 27, wherein said processor is configured to control the system to maintain the plasma density at the given location within the predetermined range.

29. The plasma processing system according to claim 25, wherein said processor is configured to control plasma properties by at least one of adjusting RF power, adjusting pressure within said plasma chamber, and adjusting gas composition within said plasma chamber.

30. The plasma processing system according to claim 21, wherein said means for measuring comprises:

a plurality of open resonators provided within said plasma chamber, said plurality of open resonators being configured to produce microwave signals; and

a plurality of detectors configured to detect the microwave signals and measure a mean electron plasma density along paths of the microwave signals within a plasma field of said plasma chamber.

31. The plasma processing system according to claim 30, wherein:

said plasma chamber is cylindrical in shape and has a cylindrical axis that extends perpendicular to an upper surface of a wafer receiving chuck provided within said plasma chamber; and

said plurality of open resonators are configured to produce microwave signals generally along axes that are perpendicular to said cylindrical axis.

32. The plasma processing system according to claim 30, wherein said plurality of open resonators are simultaneously excited.

33. The plasma processing system according to claim 30, wherein said plurality of open resonators are sequentially excited.

34. A method for controlling a plasma state within a plasma chamber, said method comprising the steps of:

measuring mean electron plasma density along a path at a plurality of locations within a plasma field in the plasma chamber; and

calculating plasma density within the plasma field as a function of position using the measured mean electron plasma density.

35. The method according to claim 34, wherein the step of measuring mean electron plasma density comprises the steps of:

providing an open resonator that is movably mounted within the plasma chamber, the open resonator being configured to produce a microwave signal; and

detecting the microwave signal to measure the mean electron plasma density.

36. The method according to claim 35, wherein the plasma chamber is cylindrical in shape and has a cylindrical axis that extends perpendicular to an upper surface of a wafer receiving chuck provided within the plasma chamber, and wherein the microwave signal is produced by the open resonator generally along an axis that is perpendicular to the cylindrical axis.

37. The method according to claim 35, wherein the step of calculating plasma density comprises receiving a plurality of mean electron plasma density measurements that correspond to a location of the open resonator.

38. The method according to claim 37, wherein the step of calculating plasma density comprises utilizing tomographic inversion to calculate plasma density as a function of position using the plurality of mean electron plasma density measurements.

39. The method according to claim 37, further comprising the step of determining whether a plasma density at a given location is within a predetermined range.

40. The method according to claim 39, further comprising the step of maintaining the plasma density at the given location within the predetermined range.

41. The method according to claim 40, further comprising the step of controlling plasma properties by at least one of adjusting RF power, adjusting pressure within the plasma chamber, and adjusting gas composition within the plasma chamber.

42. The method according to claim 34, wherein the step of measuring mean electron plasma density comprises the steps of:

providing a plurality of open resonators within the plasma chamber, the plurality of open resonators being configured to produce microwave signals; and

detecting the microwave signals to measure a mean electron plasma density along paths of the microwave signals within a plasma field of the plasma chamber.

43. The method according to claim 42, wherein the plasma chamber is cylindrical in shape and has a cylindrical axis that extends perpendicular to an upper surface of a wafer receiving chuck provided within the plasma chamber, and wherein the microwave signals are produced by the plurality of open resonators generally along axes that are perpendicular to and extend through the cylindrical axis.

44. The method according to claim 42, wherein the plurality of open resonators are simultaneously excited.

45. The method according to claim 42, wherein the plurality of open resonators are sequentially excited.