Lead iron tungstate capacitive transducer, relaxor material therefor and method of manufacture of said relaxor material

• US 6,715,358 B2
• Filed: 03/29/2002
• Issued: 04/06/2004
• Est. Priority Date: 03/29/2002
• Status: Expired due to Fees

• Current Assignee: Council of Scientific & Industrial Research
• Original Assignee: Council of Scientific & Industrial Research, Indian Institute of Technology Bombay
• Inventors: Kumar, Vinay, Jain, Kamlesh Kumar, Kashyap, Subhash Chand
• Primary Examiner(s): Hirshfeld, Andrew H.
• Assistant Examiner(s): FERGUSON SAMRETH, MARISSA LIANA
• Application Number:
  US10/108,926
• Publication Number:
  US 20030183013A1
• Time in Patent Office: 739 Days
• Field of Search: 735/143.2, 738/62, 737/18, 737/24, 737/06, 361/283--28
• US Class Current: 73/718
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

The present invention discloses a relaxor material lead iron tungstate which has been synthesized in doped and undoped conditions by single and two step heat treatment. The relaxor material is seen to exhibit almost negligible hysteresis and a transducer made thereby shows pressure measurement capability over a wide range from 0.5 MPa to 415 MPa with accuracy of ±0.05%.

Claims

1. A lead iron tungstate capacitive pressure transducer comprising a lead iron tungstate disc having a polished smooth first flat surface, a polished smooth second flat surface, the said polished smooth first flat surface being completely coated with metal electrode, the polished smooth second flat surface also being coated with metal electrode, the said metal electrode on polished smooth second flat surface comprising formed coated circular portions comprising a central portion and a coated annular concentric portion separated from the central portion by an annular concentric clear region, conducting metal wires being fixed to the metal electrode on polished smooth first flat surface, metal electrode on coated central portion of polished smooth second flat surface and metal electrode on coated annular concentric portion of polished smooth second flat surface.

2. A capacitive pressure transducer as claimed in claim 1 wherein the metal electrode is selected from the group consisting of silver, aluminum and gold.

3. A capacitive pressure transducer as claimed in claim 1 wherein the thickness of metal electrode is in the range of 1000-2000 Å

.

4. A capacitive pressure transducer as claimed in claim 1 wherein the width of annular concentric region is in the range of 10-50 λ

.

5. A capacitive pressure transducer as claimed in claim 1 wherein the metal wires are selected from gold and silver wires.

6. A capacitive pressure transducer as claimed in claim 1 wherein the purity of the metal wire is at least 99.99%.

7. A capacitive pressure transducer as claimed in claim 1 wherein the metal electrode is deposited by vacuum evaporation method.

8. A capacitive pressure transducer as claimed in claim 7 wherein the metal electrode is deposited by thermal evaporation.

9. A capacitive pressure transducer as claimed in claim 1 wherein the capacitive pressure transducer is useful for pressure measurement in a range of 0.5 MPa-415 MPa.

10. A capacitive pressure transducer as claimed in claim 9 wherein the accuracy of pressure transducer is ±

0.05% over the entire range.

11. A capacitive pressure transducer as claimed in claim 1 wherein the absolute value of pressure coefficient of the transducer is in the range of 497 ppm/MPa to 622 ppm/MPa.

12. A capacitive pressure transducer as claimed in claim 1 wherein the temperature coefficient of the transducer is in the range of −

0.006/°

C. to 0.008/°

C.

13. A capacitive pressure transducer as claimed in claim 1 wherein the transducer has negligible hysteresis.