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Micro pump

  • US 6,716,002 B2
  • Filed: 05/15/2001
  • Issued: 04/06/2004
  • Est. Priority Date: 05/16/2000
  • Status: Expired due to Term
First Claim
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1. A micro pump comprising:

  • a first area including a first flow pass, said first area having a variable flow pass resistance in accordance with a difference in pressure between bilateral ends of the first flow pass area, a second area including a second flow pass, said second area having a variable flow pass resistance is changed in accordance with a difference in pressure between bilateral ends of the second area, wherein a percentage change in the flow pass resistance of the second area in accordance with the difference in pressure between the bilateral ends of the second area is smaller than a percentage change in the flow pass resistance of the first in accordance with the difference in pressure between the bilateral ends of the first area;

    a pressure chamber connecting the first flow pass to the second flow pass;

    an actuator for changing a pressure force within the pressure chamber; and

    a driver for selectively applying to said actuator voltage signals having a first waveform and a second waveform, wherein the voltage signals of the first waveform are for transporting fluid in the pressure chamber toward the first flow pass and the voltage signals of the second waveform are for transporting fluid in the pressure chamber toward the second flow pass.

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