Light-emitting diode with enhanced brightness and method for fabricating the same
First Claim
1. A method for fabricating a light-emitting diode with enhanced brightness, comprising:
- forming an epitaxial LED structure having at least one lighting-emitting active layer on a temporary substrate, wherein a highly doped layer is naturally formed at a bottom surface of said lighting-emitting active layer;
splitting off said temporary substrate;
forming at least one conductive contact on a portion of a bottom surface of said highly doped layer;
removing portions of said highly doped layer not overlaid by said conductive contact so that at least one opening is formed in said highly doped layer;
forming a transparent material layer in said opening;
attaching a permanent substrate to a bottom surface of said transparent material layer; and
forming a bottom electrode on a bottom surface of said permanent substrate and forming an opposed electrode on a top surface of said epitaxial LED structure, said opposed electrode being formed on the top surface of said epitaxial LED structure before said temporary substrate is split off and the bottom electrode is formed on the bottom surface of said permanent substrate before said permanent substrate is attached to said transparent material layer.
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Abstract
The present invention discloses a light-emitting diode with enhanced brightness and a method for fabricating the same. The light-emitting diode comprises: an epitaxial LED structure having at least one lighting-emitting active layer with a plurality of spacers inside the lighting-emitting active layer; at least one conductive contact, formed on the bottom surface where no spacer is formed inside the lighting-emitting active layer; a transparent material layer formed in the spacers; an adhesion layer formed between the transparent material layer and a permanent substrate; a bottom electrode formed on the bottom surface of the permanent substrate; and an opposed electrode formed on the top surface of the epitaxial LED structure.
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Citations
9 Claims
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1. A method for fabricating a light-emitting diode with enhanced brightness, comprising:
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forming an epitaxial LED structure having at least one lighting-emitting active layer on a temporary substrate, wherein a highly doped layer is naturally formed at a bottom surface of said lighting-emitting active layer;
splitting off said temporary substrate;
forming at least one conductive contact on a portion of a bottom surface of said highly doped layer;
removing portions of said highly doped layer not overlaid by said conductive contact so that at least one opening is formed in said highly doped layer;
forming a transparent material layer in said opening;
attaching a permanent substrate to a bottom surface of said transparent material layer; and
forming a bottom electrode on a bottom surface of said permanent substrate and forming an opposed electrode on a top surface of said epitaxial LED structure, said opposed electrode being formed on the top surface of said epitaxial LED structure before said temporary substrate is split off and the bottom electrode is formed on the bottom surface of said permanent substrate before said permanent substrate is attached to said transparent material layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
forming a reflective layer on the bottom surface of said transparent material layer before attaching said permanent substrate to the bottom of said transparent material layer.
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3. The method of claim 1, further comprising a step of:
forming an adhesion layer on a top surface of said permanent substrate and then attaching said permanent substrate to the bottom surface of said transparent material layer by said adhesion layer.
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4. The method of claim 1, further comprising a step of:
forming a current diffusion layer on the top surface of said epitaxial LED structure.
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5. The method of claim 1, wherein said transparent material layer is selected from the group of conductive materials consisting of ITO, zinc oxide, tin oxide, indium oxide and combinations thereof.
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6. The method of claim 1, wherein said transparent material layer is selected from the group of insulating materials consisting of polymer, quartz, glass and combinations thereof.
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7. The method of claim 1, wherein said permanent substrate is formed of a material with good thermal conductivity characteristics.
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8. The method of claim 7, wherein said permanent substrate is formed of a material selected from the group consisting of Si, BN, AlN, Al2O3, MgO, MgO2 and their combinations thereof.
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9. The method of claim 1, further comprising a step of:
forming a planar LED from said epitaxial LED structure and forming a first electrode and a second electrode on the top surface of said epitaxial LED structure.
Specification