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Radiation hardened silicon-on-insulator (SOI) transistor having a body contact

  • US 6,716,728 B2
  • Filed: 03/05/2002
  • Issued: 04/06/2004
  • Est. Priority Date: 08/03/1999
  • Status: Expired due to Term
First Claim
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1. A method for providing a body contact for a field effect transistor, wherein said field effect transistor is disposed on a dielectric layer situated on top of a substrate, wherein said field effect transistor includes a body region formed on a first surface portion of said dielectric layer, a source region formed on a second surface portion of said dielectric layer contiguous with said first surface portion, a drain region formed on a third surface portion of said dielectric layer contiguous with said first surface portion, a gate layer overlying said body region and being operative to induce a channel in that portion of said body region disposed between and adjoining said source region and said drain region, said method comprising:

  • forming a plurality of diffusion regions extending from a first edge of said source region to a second edge of said source region of said field effect transistor, wherein said first edge of said source region is adjacent to said gate layer and said second edge of said source region is opposite to said first edge of said source region;

    forming a plurality of extended portions of said gate layer extending from said first edge of said source region to overlap a portion of a respective one of said plurality of diffusion regions; and

    ohmically connecting said plurality of diffusion regions to said body region of said field effect transistor said plurality of diffusion regions functioning as a body contact.

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