Liquid dielectric capacitor for film thickness mapping
First Claim
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1. A film thickness measurement device comprising:
- a) a motion-capable platform for supporting a conductive material, said motion-capable platform adapted to move along a path;
b) a conductive probe located near said conductive material on said motion-capable platform so as to produce a measurable capacitance therebetween, wherein said conductive probe comprises a conductive pin immersed in a contained liquid dielectric;
c) a capacitance-measuring device adapted to measure capacitance between said conductive material and said conductive probe while said conductive material is in motion with respect to said conductive probe.
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Abstract
The present invention includes capacitive film thickness measurement devices and measurement systems. The invention also includes machines or instruments using those aspects of the invention. The present invention additionally includes methods and procedures using those devices of the present invention. The present invention discloses a capacitance measurement device and technique useful in determining lubricant film thickness on substrates such as magnetic thin-film rigid disks. Using the present invention, variations in lubricant thickness on the Angstrom scale or less may be measured quickly and nondestructively.
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Citations
4 Claims
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1. A film thickness measurement device comprising:
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a) a motion-capable platform for supporting a conductive material, said motion-capable platform adapted to move along a path;
b) a conductive probe located near said conductive material on said motion-capable platform so as to produce a measurable capacitance therebetween, wherein said conductive probe comprises a conductive pin immersed in a contained liquid dielectric;
c) a capacitance-measuring device adapted to measure capacitance between said conductive material and said conductive probe while said conductive material is in motion with respect to said conductive probe. - View Dependent Claims (2, 3, 4)
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Specification
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Current AssigneeOhio State University
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Original AssigneeOhio State University
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InventorsBhushan, Bharat, Hahm, Christopher D.
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Primary Examiner(s)Deb, Anjan K.
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Application NumberUS10/165,687Time in Patent Office669 DaysField of Search324/671, 324/662, 324/663, 324/229, 324/761, 324/757, 324/754, 324/514, 324/453, 369/53.1, 369/53.41, 360/235.1, 360/235.4, 360/122, 360/246.2US Class Current324/671CPC Class CodesG01Q 10/06 Circuits or algorithms ther...G11B 2005/001 Controlling recording chara...H02J 1/10 Parallel operation of dc so...
