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Liquid dielectric capacitor for film thickness mapping

  • US 6,717,419 B1
  • Filed: 06/07/2002
  • Issued: 04/06/2004
  • Est. Priority Date: 09/28/1999
  • Status: Expired due to Fees
First Claim
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1. A film thickness measurement device comprising:

  • a) a motion-capable platform for supporting a conductive material, said motion-capable platform adapted to move along a path;

    b) a conductive probe located near said conductive material on said motion-capable platform so as to produce a measurable capacitance therebetween, wherein said conductive probe comprises a conductive pin immersed in a contained liquid dielectric;

    c) a capacitance-measuring device adapted to measure capacitance between said conductive material and said conductive probe while said conductive material is in motion with respect to said conductive probe.

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