Resonator with a member having an embedded charge and a method of making thereof
First Claim
Patent Images
1. A resonator comprising:
- a member with an embedded charge;
at least one input electrode;
at least one output electrode; and
at least one common electrode, the at least one input and output electrodes are spaced from and on substantially opposing sides of the member from the at least one common electrode, wherein at least one of the member and the input and output electrodes is movable with respect to the other.
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Abstract
A resonator includes a member with an embedded charge, at least one input electrode, at least one output electrode, and at least one common electrode. The input and output electrodes are spaced from and on substantially opposing sides of the member from the common electrode. At least one of the member and the input and output electrodes is movable with respect to the other.
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Citations
56 Claims
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1. A resonator comprising:
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a member with an embedded charge;
at least one input electrode;
at least one output electrode; and
at least one common electrode, the at least one input and output electrodes are spaced from and on substantially opposing sides of the member from the at least one common electrode, wherein at least one of the member and the input and output electrodes is movable with respect to the other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method for making a resonator, the method comprising:
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providing a member with an embedded charge;
providing at least one input electrode;
providing at least one output electrode; and
providing at least one common electrode, the at least one input and output electrodes are spaced from and on substantially opposing sides of the member from the at least one common electrode, wherein at least one of the member and the input and output electrodes are movable with respect to the other. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44)
providing a first insulating layer;
providing a second insulating layer over at least a portion of the first insulating layer;
etching a first trench in second insulating layer which extends to the first insulating layer;
filling at least a portion of the first trench with a first sacrificial material, wherein the providing a member is on at least a portion of the first layer of sacrificial material and on at least a portion of the second insulating layer;
depositing a third insulating layer over at least a portion of the member;
etching a second trench in third insulating layer which extends to the member;
filling at least a portion of the second trench with a second layer of sacrificial material;
depositing a fourth insulating layer on at least a portion of the third insulating layer; and
removing the first and second layers of sacrificial material.
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30. The method as set forth in claim 29 wherein the providing a member further comprises depositing the member on at least a portion of the first layer of sacrificial material and on at least a portion of the second insulating layer.
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31. The method as set forth in claim 23 wherein the providing a chamber further comprises:
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providing a first insulating layer;
providing a second insulating layer over at least a portion of the first insulating layer, wherein the providing a member is on at least a portion of the second insulating layer;
depositing a third insulating layer over at least a portion of the member;
etching a second trench in third insulating layer which extends to the member;
filling at least a portion of the second trench with a first layer of sacrificial material;
depositing a fourth insulating layer on at least a portion of the third insulating layer; and
removing the first layer of sacrificial material.
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32. The method as set forth in claim 31 wherein the providing a member further comprises depositing the member on at least a portion of the second insulating layer.
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33. The method as set forth in claim 19 wherein the member is at least one of a single dielectric layer, a composite of two or more dielectric layers, a floating conductor, and an electret.
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34. The method as set forth in claim 19 wherein the member is made from one or more materials selected from a group consisting of silicon oxide, silicon dioxide, silicon nitride, aluminum oxide, tantalum oxide, tantalum pentoxide, titanium oxide, titanium dioxide, barium strontium titanium oxide.
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35. The method as set forth in claim 19 wherein the at least one output electrode and the corresponding output electrode have a substantially circular shape and the at least one input electrode and the corresponding input electrode are arranged in a substantially annulus fashion around and spaced from the at least one output electrode and the corresponding output electrode.
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36. The method as set forth in claim 19 wherein the at least one input electrode and the corresponding input electrode have a substantially circular shape and the at least one output electrode and the corresponding output electrode are arranged in a substantially annulus fashion around and spaced from the at least one input electrode and the corresponding input electrode.
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37. The method as set forth in claim 19 wherein the providing a member further comprises storing the embedded charge in the member.
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38. The method as set forth in claim 37 wherein the storing the embedded charge in the member comprises at least one of injecting electrons into the member, using ballistic injection to embed the charge, using polarization to embed the charge, and using high field injection to embed the charge.
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39. The method as set forth in claim 19 wherein the providing at least one common electrode further comprises providing a first conducting layer to provide the at least one common electrode.
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40. The method as set forth in claim 39 wherein the providing at least one common electrode further comprises etching the first conducting layer to form a corresponding input electrode for each of the at least one input electrode and to form a corresponding output electrode for each of the at least one output electrode.
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41. The method as set forth in claim 39 wherein the providing the at least one input electrode and providing the at least one output electrode further comprises:
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depositing a second conducting layer on at least a portion of the second layer of sacrificial material to provide the other one of the electrodes for at least one of the pairs of electrodes; and
etching the second conducting layer to form the at least one input electrode and the at least one output electrode.
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42. The method as set forth in claim 41 wherein the etching of the first conducting layer and the second conducting layer for the at least one output electrode and the corresponding output electrode each have a substantially circular shape and for the at least one input electrode and the corresponding input electrode a substantially annulus shape around the at least one output electrode and the corresponding output electrode with the substantially circular shape.
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43. The method as set forth in claim 41 wherein the etching of the first conducting layer and the second conducting layer for the at least one input electrode and the corresponding input electrode each have a substantially circular shape and for the at least one output electrode and the corresponding output electrode a substantially annulus shape around the at least one input electrode and the corresponding input electrode with the substantially circular shape.
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44. The method as set forth in claim 19 wherein the providing at least one common electrode further comprises providing a substrate comprising at least one conductive material, the substrate providing the at least one common electrode.
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45. A method for passing a signal with a resonator, the method comprising:
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receiving an input signal around a resonant frequency for the resonator;
applying a first varying signal on at least a first pair electrodes in response to the received input signal, each of the first pair of electrodes spaced from and on substantially opposing sides of a member with an embedded charge;
oscillating the member in response to the applied varying signal on the first pair of electrodes;
applying a second varying signal on at least a second pair electrodes in response to the oscillation of the member; and
transmitting an output signal based on the applied second varying signal on the second pair of electrodes. - View Dependent Claims (46, 47, 48, 49, 50)
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51. A method for passing a signal with a resonator, the method comprising:
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receiving an input signal around a resonant frequency for the resonator;
applying a first varying signal on at least a first pair electrodes in response to the received input signal, each of the first pair of electrodes spaced from and on substantially opposing sides of a member with an embedded charge;
oscillating one of the first pair of electrodes in response to the applied varying signal on the first pair of electrodes;
applying a second varying signal on at least a second pair electrodes in response to the oscillation of the one of the first pair of electrodes; and
transmitting an output signal based on the applied second varying signal on the second pair of electrodes. - View Dependent Claims (52, 53, 54, 55, 56)
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Specification