Flexureless magnetic micromirror assembly

• US 6,717,715 B2
• Filed: 07/27/2001
• Issued: 04/06/2004
• Est. Priority Date: 07/27/2000
• Status: Expired due to Fees

• Current Assignee: The 323 Trust
• Original Assignee: Holl Technologies Company
• Inventors: Lichtenberger, Philip L., Holl, Richard A.
• Primary Examiner(s): Dang, Hung Xuan
• Assistant Examiner(s): TRA, TUYEN Q
• Application Number:
  US09/917,188
• Publication Number:
  US 20020067534A1
• Time in Patent Office: 984 Days
• Field of Search: 359/291, 359/293, 359/212, 359/213, 359/214, 359/221, 359/280, 385/16, 385/17, 385/18, 385/19, 385/20, 385/21, 385/22, 385/23, 385/24
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0816 by means of one or more reflecting elements
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/3564 Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
• CPC Class Codes: G02B 6/3572 Magnetic force magnetic forces controlling reflecting elements in general G02B26/085; magneto-optic devices G02F1/09
• CPC Class Codes: G02B 6/3582 Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
• CPC Class Codes: G02B 7/1828 using magnetic means

Abstract

A micro-optical switch including a flexureless magnetic micromirror hinged centrally over a pin, cone or the like. The pin, cone or the like allows the micromirror to rapidly switch or tilt into a plurality of predefined positions as accurately controlled by an microelectromagnetic assembly. A liquid surrounds the pin or cone, connects the bottom of the surface of the mirror with the substrate supporting the pin or cone, and provides a capillary force holding the mirror onto the pin or cone. The liquid low vapor pressure also dissipates heat generated by the fiberoptic beam reflecting off the top surface of the micromirror.

Claims

1. A micromirror assembly, comprising:

a micromirror having a reflective top surface and a bottom surface;

a support member having a member end; and

the support member end supporting the micromirror for controllable tilting relative to the member end, further comprising liquid positioned relative to the bottom surface such that capillary force of the liquid holds the micromirror on the support member.

2. The assembly of claim 1 wherein the liquid has a low vapor pressure.

3. The assembly of claim 2 wherein the low vapor pressure is less than 0.01 mm mercury at 25 degrees C.

4. The assembly of claim 1 wherein the liquid is an oil.

5. The assembly of claim 1 wherein the bottom surface has a centrally positioned depression and the end engages in the depression.

6. The assembly of claim 1 wherein the end is a pointed end.

7. The assembly of claim 1 wherein the micromirror is able to pivot in any direction about an axis of the pointed end.

8. The assembly of claim 1 wherein the bottom surface has a centrally positioned slot, and the end engages in the slot.

9. The assembly of claim 1 wherein the end is an elongate edge deposed in the slot so that the micromirror can tilt about an axis of the slot.

10. The assembly of claim 1 wherein the support member comprises a pin.

11. The assembly of claim 1 wherein the support member comprises a cone.

12. The assembly of claim 1 wherein the support member comprises a needle.

13. The assembly of claim 1 wherein the end is made of sapphire.

14. The assembly of claim 1 wherein the support end has a hardness greater than Mohs Scale 8.

15. The assembly of claim 1 wherein the micromirror has a round disc shape.

16. The assembly of claim 1 wherein the micromirror is symmetrical about its vertical axis.

17. The assembly of claim 1 wherein the micromirror has a diameter of generally between 100 and 200 microns.

18. The assembly of claim 1 further comprising a beam source oriented so that an incident beam therefrom hits a center of the reflective surface.

19. The assembly of claim 1 further comprising a beam source oriented so that an incident beam therefrom hits the reflective surface at a location spaced from a center of the reflective surface.

20. The assembly of claim 1 further comprising a plurality of beam sources oriented so that their respective beams hit the reflective surface at different locations thereon.

21. The assembly of claim 20 wherein each of the beam sources is an optical fiber.

22. The assembly of claim 1 wherein the micromirror is tiltable about two, three or four equally spaced axes perpendicular to an axis of the member end.

23. The assembly of claim 1 wherein the micromirror is round and has a diameter of generally 200 micrometers.

24. The assembly of claim 1 further comprising an electromagnet on a support surface below the bottom surface.

25. The assembly of claim 24 wherein the electromagnet is sputtered on the support surface.

26. The assembly of claim 24 wherein the electromagnet includes a sputtered core and a sputtered winding on the core.

27. The assembly of claim 1 further comprising a magnet on the bottom surface.

28. The assembly of claim 27 wherein the magnet coats the entire bottom surface.

29. The assembly of claim 27 wherein the magnet is only on peripheral areas of the bottom surface.

30. The assembly of claim 27 wherein the magnet is sputter coated on the bottom surface.

31. The assembly of claim 27 wherein the magnet is a permanent magnet.

32. The assembly of claim 27 wherein the magnet is an electromagnet.

33. A micromirror assembly, comprising:

a micromirror having a reflective ton surface and a bottom surface;

a support member having a member end; and

the support member end supporting the micromirror for controllable tilting relative to the member end and a magnet on the bottom surface, wherein the magnet is a mixture of zumarium, cobalt and nickel.

34. A micromirror assembly, comprising:

a micromirror having a reflective ton surface and a bottom surface;

a support member having a member end; and

the support member end supporting the micromirror for controllable tilting relative to the member end and further comprising a substrate, the support member being a horizontal elongate member, the elongate member having an elongate edge defining the member end, the bottom surface having an elongate upwardly-disposed surfaced, and the elongate edge being disposed in the upwardly-disposed surface.

35. The assembly of claim 34 wherein the upwardly-disposed surface is a groove on the bottom surface.

36. The assembly of claim 34 further comprising liquid in the upwardly-disposed surface which exerts a capillary holding action on the micromirror.

37. The assembly of claim 34 further comprising electromagnets on either side of the elongate member to cause the micromirror to controllably tilt from side to side.

38. The assembly of claim 37 further comprising a substrate, the elongate member being supported by and extending up from the substrate, and the electromagnets being supported on the substrate.