×

Flexureless magnetic micromirror assembly

  • US 6,717,715 B2
  • Filed: 07/27/2001
  • Issued: 04/06/2004
  • Est. Priority Date: 07/27/2000
  • Status: Expired due to Fees
First Claim
Patent Images

1. A micromirror assembly, comprising:

  • a micromirror having a reflective top surface and a bottom surface;

    a support member having a member end; and

    the support member end supporting the micromirror for controllable tilting relative to the member end, further comprising liquid positioned relative to the bottom surface such that capillary force of the liquid holds the micromirror on the support member.

View all claims
  • 5 Assignments
Timeline View
Assignment View
    ×
    ×