Spatial signature analysis

• US 6,718,526 B1
• Filed: 02/07/2003
• Issued: 04/06/2004
• Est. Priority Date: 02/07/2003
• Status: Expired due to Term

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Liu, Kai, Piramuthu, Robinson, Huet, Patrick Y., Plihal, Martin, Eldredge, Peter, Shanbhag, Maruti, Bhagwat, Sandeep, Roan, Shaio, Chi, Kai
• Primary Examiner(s): WHITMORE, STACY
• Application Number:
  US10/360,433
• Time in Patent Office: 424 Days
• Field of Search: 716/1, 716/4, 716/5
• US Class Current: 716/136
• CPC Class Codes: G06T 7/001 using an image reference approach

Abstract

A system for determining an assigned classification for a set of physical events on a substrate. Sensors sense the physical events on the substrate and produce event data. A plug in rule module manager receives and manages any number of plug in rule modules. Each plug in rule module has an input, a local filter, an analyzer, and an output. The input receives the event data and confidence values from preceding plug in rule modules. The local filter analyzes the received confidence values from the preceding plug in rule modules and selectively by passes the plug in rule module based at least in part upon the received confidence values from the preceding plug in rule modules. The analyzer analyzes the event data in view of a given classification associated with the plug in rule module, and assigns a confidence value based at least in part upon how well the event data fits the given classification. The output provides the confidence value to subsequent plug in rule modules. A post processor receives the confidence values provided by the plug in rule modules, and makes a final selection of the assigned classification to be associated with the set of physical events from the given classifications based at least in part upon a comparison of the confidence values produced by all plug in rule modules.

Claims

1. A system for determining an assigned classification for a set of physical events on a substrate, the system comprising:

sensors for sensing the physical events on the substrate and for producing event data,

a plug in rule module manager for receiving and managing any number of plug in rule modules,

at least one plug in rule module, each plug in rule module having,

an input for receiving the event data, the input also for receiving confidence values from preceding plug in rule modules,

a local filter for analyzing the received confidence values from the preceding plug in rule modules and selectively by passing the plug in rule module based at least in part upon the received confidence values from the preceding plug in rule modules,

an analyzer for analyzing the event data in view of a given classification associated with the plug in rule module, and for assigning a confidence value based at least in part upon how well the event data fits the given classification, and

an output for providing the confidence value to subsequent plug in rule modules, and

a post processor for receiving the confidence values provided by the at least one plug in rule module, and for making a final selection of the assigned classification to be associated with the set of physical events from the given classifications based at least in part upon a comparison of the confidence values produced by all plug in rule modules.

2. The system of claim 1, wherein the input of the plug in rule module is further adapted for receiving a user specified weight value, where the weight value selectively increases and decreases the confidence value produced by the plug in rule module.

3. The system of claim 1, wherein the input of the plug in rule module is further adapted for receiving a user specified contrast value, where the contrast value selectively increases and decreases a resolution of the event data from other data collected from the substrate.

4. The system of claim 1, wherein the input of the plug in rule module is further adapted for receiving a user specified interference value, where the interference value selectively increases and decreases a grouping of the event data.

5. The system of claim 1, further comprising a common data storage for receiving the event data and for providing the event data to the at least one plug in rule module.

6. The system of claim 1, further comprising a compatibility module for managing multiple versions of a given plug in rule module within the system.

7. The system of claim 6, wherein the compatibility module further comprises a user selectable setting for always using a reference version of the given plug in rule module.

8. The system of claim 6, wherein the compatibility module further comprises a user selectable setting for always using a newest version of the given plug in rule module, and for adapting output from the newest version of the given plug in rule module to have a same baseline with respect to a reference version of the given plug in rule module.

9. The system of claim 6, wherein the compatibility module further comprises a user selectable setting for always using a newest version of the given plug in rule module, regardless of whether output from the newest version of the given plug in rule module has a same baseline as a reference version of the given plug in rule module.

10. A system for determining an assigned classification for a set of physical events on a substrate, the system comprising:

sensors for sensing the physical events on the substrate and for producing event data,

a plug in rule module manager for receiving and managing any number of plug in rule modules,

at least one plug in rule module, each plug in rule module having,

an input for receiving the event data, the input also for receiving confidence values from preceding plug in rule modules,

a local filter for analyzing the received confidence values from the preceding plug in rule modules and selectively by passing the plug in rule module based at least in part upon the received confidence values from the preceding plug in rule modules,

an analyzer for analyzing the event data in view of a given classification associated with the plug in rule module, and for assigning a confidence value based at least in part upon how well the event data fits the given classification, and

an output for providing the confidence value to subsequent plug in rule modules,

a compatibility module for managing multiple versions of a given plug in rule module within the system, and

a post processor for receiving the confidence values provided by the at least one plug in rule module, and for making a final selection of the assigned classification to be associated with the set of physical events from the given classifications based at least in part upon a comparison of the confidence values produced by all plug in rule modules.

11. The system of claim 10, wherein the input of the plug in rule module is further adapted for receiving a user specified weight value, where the weight value selectively increases and decreases the confidence value produced by the plug in rule module.

12. The system of claim 10, wherein the input of the plug in rule module is further adapted for receiving a user specified contrast value, where the contrast value selectively increases and decreases a resolution of the event data from other data collected from the substrate.

13. The system of claim 10, wherein the input of the plug in rule module is further adapted for receiving a user specified interference value, where the interference value selectively increases and decreases a grouping of the event data.

14. The system of claim 10, further comprising a common data storage for receiving the event data and for providing the event data to the at least one plug in rule module.

15. The system of claim 10, wherein the compatibility module further comprises a user selectable setting for always using a reference version of the given plug in rule module.

16. The system of claim 10, wherein the compatibility module further comprises a user selectable setting for always using a newest version of the given plug in rule module, and for adapting output from the newest version of the given plug in rule module to have a same baseline with respect to a reference version of the given plug in rule module.

17. The system of claim 10, wherein the compatibility module further comprises a user selectable setting for always using a newest version of the given plug in rule module, regardless of whether output from the newest version of the given plug in rule module has a same baseline as a reference version of the given plug in rule module.

18. A system for determining an assigned classification for a set of physical events on a substrate, the system comprising:

sensors for sensing the physical events on the substrate and for producing event data,

a plug in rule module manager for receiving and managing any number of plug in rule modules,

at least one plug in rule module, each plug in rule module having,

an input for receiving,

the event data,

confidence values from preceding plug in rule modules,

a user specified weight value, where the weight value selectively increases and decreases the confidence value produced by the plug in rule module,

a user specified contrast value, where the contrast value selectively increases and decreases a resolution of the event data from other data collected from the substrate, and

a user specified interference value, where the interference value selectively increases and decreases a grouping of the event data,

a local filter for analyzing the received confidence values from the preceding plug in rule modules and selectively by passing the plug in rule module based at least in part upon the received confidence values from the preceding plug in rule modules,

an analyzer for analyzing the event data in view of a given classification associated with the plug in rule module, and for assigning a confidence value based at least in part upon how well the event data fits the given classification, and

an output for providing the confidence value to subsequent plug in rule modules,

a compatibility module for managing multiple versions of a given plug in rule module within the system, and

a post processor for receiving the confidence values provided by the at least one plug in rule module, and for making a final selection of the assigned classification to be associated with the set of physical events from the given classifications based at least in part upon a comparison of the confidence values produced by all plug in rule modules.

19. The system of claim 18, wherein the compatibility module further comprises a user selectable setting for always using a newest version of the given plug in rule module, and for adapting output from the newest version of the given plug in rule module to have a same baseline with respect to a reference version of the given plug in rule module.

20. The system of claim 18, wherein the compatibility module further comprises a user selectable setting for always using a newest version of the given plug in rule module, regardless of whether output from the newest version of the given plug in rule module has a same baseline as a reference version of the given plug in rule module.