Pulse width modulation drive signal for a MEMS gyroscope
First Claim
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1. A system for measuring a rate of rotation of a microelectromechanical system (MEMS) gyroscope comprising in combination:
- the MEMS gyroscope for measuring a rate of rotation, the MEMS gyroscope generating a pickoff signal; and
drive electronics coupled to the MEMS gyroscope, the drive electronics computing an average voltage of the pickoff signal to create a direct current threshold level, wherein the drive electronics provide a pulse width modulation drive signal based on the direct current threshold level to the MEMS gyroscope.
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Abstract
A MEMS gyroscope may be coupled to drive electronics that provide a pulse width modulation drive signal to the MEMS gyroscope. The pulse width modulation drive signal may be generated by comparing a pickoff signal and/or input signal to a direct current threshold level.
48 Citations
28 Claims
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1. A system for measuring a rate of rotation of a microelectromechanical system (MEMS) gyroscope comprising in combination:
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the MEMS gyroscope for measuring a rate of rotation, the MEMS gyroscope generating a pickoff signal; and
drive electronics coupled to the MEMS gyroscope, the drive electronics computing an average voltage of the pickoff signal to create a direct current threshold level, wherein the drive electronics provide a pulse width modulation drive signal based on the direct current threshold level to the MEMS gyroscope. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 25, 26, 27, 28)
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12. A method for measuring a rate of rotation of a MEMS gyroscope comprising in combination:
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creating a pulse width modulation signal for use in the MEMS gyroscope by comparing an input signal to a direct current threshold level and changing a level of the pulse width modulation signal when the input signal crosses the direct current threshold level;
driving a proof mass at a drive velocity with the pulse width modulation drive signal;
rotating the MEMS gyroscope;
measuring a change in capacitance between the proof mass and a sense plate;
calculating a Coriolis acceleration from the change in capacitance between the proof mass and the sense plate; and
calculating a rate of rotation of the MEMS gyroscope from the Coriolis acceleration and the drive velocity. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A system for measuring a rate of rotation of a MEMS gyroscope comprising in combination:
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the MEMS gyroscope including a motor pickoff comb that is operable to provide a pickoff signal, and wherein the pickoff signal is utilized for determining a direct current threshold level;
an input signal unit for generating an input signal; and
a pulse width modulation drive signal unit for generating a pulse width modulation drive signal based on the input signal and the direct current threshold level, wherein the pulse width modulation drive signal is sent to the MEMS gyroscope. - View Dependent Claims (19, 20, 21, 22, 23, 24)
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Specification