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Barrier film and method for production thereof

  • US 6,720,097 B2
  • Filed: 05/31/2002
  • Issued: 04/13/2004
  • Est. Priority Date: 10/13/2000
  • Status: Expired due to Fees
First Claim
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1. A barrier-forming film comprising a substrate film having a vapor-deposited inorganic oxide film, further subjected to an annealing treatment, wherein said annealing treatment is carried out in an air at a temperature within a range of from 55 to 150°

  • C. for a heating treatment time within a range of from 12 hours to three and the steam permeability is within a range of from 2.0 to 0.000001 g/m2.day and the oxygen permeability is within a range of from 2.0 to 0.000001 cc/m2.day.atm.

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