Integrated circuit inductor structure and non-destructive etch depth measurement

• US 6,720,229 B2
• Filed: 11/08/2001
• Issued: 04/13/2004
• Est. Priority Date: 11/09/2000
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Telefonaktiebolaget LM Ericsson
• Inventors: Johansson, Ted, Norström, Hans, Björmander, Carl
• Primary Examiner(s): Nguyen, Tuyen T.
• Application Number:
  US09/986,394
• Publication Number:
  US 20020057176A1
• Time in Patent Office: 887 Days
• Field of Search: 336/65, 336/83, 336/200, 336/206-208, 336/232, 296/021, 438/381, 438/618, 438/619, 438/622, 257/531, 257/528
• US Class Current: 438/381
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01F 41/041 Printed circuit coils apparatus or processes for manufacturing printed circuits in general H05K3/00
• CPC Class Codes: H01L 23/5227 Inductive arrangements or effects of, or between, wiring layers other inductive arrangements H01L23/645
• CPC Class Codes: H01L 27/08 including only semiconductor components of a single kind
• CPC Class Codes: H01L 28/10 Inductors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/12044 OLED

Abstract

A method for forming an electrical device structure in an integrated circuit comprises providing a substrate; forming a passivation layer thereon; forming a plurality of through holes in the passivation layer, the through holes; removing substrate material under the passivation layer by means of isotropic etching, thus forming at least a first cavity in the substrate beneath the plurality of through holes; forming a dielectric layer on top of the passivation layer to plug the through holes, thereby creating a membrane; and creating an electrical device, such as e.g. an inductor, above the membrane.

Claims

1. In the fabrication of an integrated circuit, particularly an integrated circuit for radio frequency applications, a method for forming an electrical device structure comprised in said circuit, the method comprising:

providing a semiconductor substrate;

forming a first dielectric layer above said substrate;

forming a plurality of through holes in said first dielectric layer;

removing semiconductor substrate material under the first dielectric layer by means of isotropic etching using said first dielectric layer provided with through holes as hardmask, thus forming at least a first cavity in the semiconductor substrate underneath said plurality of through holes;

forming a second dielectric layer on top of said first dielectric layer to plug said plurality of through holes, thereby creating a membrane above said first cavity; and

creating an electrical device above said membrane.

2. The method as claimed in claim 1 wherein said semiconductor substrate is of silicon.

3. The method as claimed in claim 1 wherein said first dielectric layer is a low-temperature oxide, particularly a PETEOS.

4. The method as claimed in claim 1 wherein said first dielectric layer is planarized.

5. The method as claimed in claim 1 wherein said plurality of through holes are formed by means of lithographic patterning followed by etching, particularly dry-etching such as RIE.

6. The method as claimed in claim 1 wherein the plurality of through holes have a diameter of less than 5 μ

m, preferably less than 1 μ

m, more preferably less than 0.5 μ

m, and most preferably in the range of 0.1-0.2 μ

m, to facilitate said subsequent plugging.

7. The method as claimed in claim 1 wherein the distance between adjacent through holes is small enough to ensure that the bottom surface of the cavity formed beneath the through holes is substantially uniform.

8. The method as claimed in claim 7 wherein the distance between adjacent through holes is less than 10 μ

m, preferably less than 5 μ

m, more preferably less than 3 μ

m, and most preferably around or slightly less than 1 μ

m.

9. The method as claimed in claim 1 wherein the semiconductor substrate material under the first dielectric layer is removed to a depth of at least 5 μ

m, preferably of at least 10 μ

m, more preferably of at least 15 μ

m, and most preferably of approximately 25-30 μ

m.

10. The method as claimed in claim 1 wherein semiconductor substrate material is removed in an area of at least 90% of the total semiconductor substrate area above which the electrical device is formed.

11. The method as claimed in claim 1 wherein the second dielectric layer is formed by depositing a three-layer structure of oxide.

12. The method as claimed in claim 1 wherein the first and second dielectric layers are deposited to such thicknesses that their remaining combined thickness coincides with a suitable device-to-metal isolation thickness.

13. The method as claimed in claim 1 wherein the electrical device is an inductor.

14. The method as claimed in claim 13 wherein the inductor is created above said membrane in a multi-layer metallization process comprising the formation of at least two metallic layers, and the formation of a passivation layer between the metallic layers, said passivation layer being provided with a via contact hole.

15. The method as claimed in claim 1 wherein the electrical device is a transmission conductor.

16. The method as claimed in claim 1 wherein:

said through holes are dividable into a first and a second sub-group, respectively, wherein adjacent through holes within a sub-group are more closely located than adjacent through holes belonging to different sub-groups;

semiconductor substrate material is removed under the first dielectric layer to form a second cavity in the semiconductor substrate underneath said plurality of through holes, said first and second cavities being separated by a portion of semiconductor substrate material; and

said second dielectric layer formed on top of said first dielectric layer to plug said plurality of through holes is supported at least by said portion of semiconductor substrate material.

17. The method as claimed in claim 16 wherein the distance between adjacent through holes belonging to different sub-groups of through holes is large enough to ensure that said portion of semiconductor substrate separating the cavities formed beneath said different sub-groups is capable of supporting said membrane mechanically and hindering the same from collapsing.

18. The method as claimed in claim 17 wherein the distance between adjacent through holes belonging to different sub-groups of through holes is selected such that said portion of semiconductor substrate separating the cavities formed beneath said different sub-groups has a width of at least about 1 μ

m, preferably at least about 5 μ

m, more preferably at least about 10 μ

m, and most preferably between about 10 and 20 μ

m.

19. The method as claimed in claim 16 wherein further through holes between said first and second sub-groups of through holes are formed in said first dielectric layer;

and wherein semiconductor substrate material is removed under said further through holes, thus forming at least one passage between said at least first and second cavities.

20. The method as claimed in claim 16 wherein the number of sub-groups of through holes formed and the number of cavities formed beneath a single electrical device is at least 4, preferably at least 8, more preferably at least 12, and most preferably between 10 and 20.

21. The method as claimed in claim 19 wherein the number of sub-groups of through holes formed and the number of cavities formed beneath a single electrical device is at least 4, preferably at least 8, more preferably at least 12, and most preferably between 10 and 20, and wherein said number of cavities and said at least one passage are formed such that said membrane above said number of cavities and said at least one passage is supported by semiconductor substrate material in the form of strings, walls, nets, pillars, or a framework.

22. An electrical device structure, particularly an inductor structure for radio frequency (RF) applications, integrated in an integrated circuit (IC), wherein said electrical device structure is fabricated by using the method as claimed in claim 1.

23. An integrated circuit, particularly an integrated circuit for radio frequency applications, wherein said integrated circuit comprises an electrical device structure as claimed in claim 22.