Micropump

• US 6,720,710 B1
• Filed: 01/06/1997
• Issued: 04/13/2004
• Est. Priority Date: 01/05/1996
• Status: Expired due to Fees

• Current Assignee: Berkeley Microinstruments Incorporated
• Original Assignee: Berkeley Microinstruments Incorporated
• Inventors: Wenzel, Stuart W., Costello, Benedict J.
• Primary Examiner(s): Dougherty, Thomas M.
• Application Number:
  US08/779,545
• Time in Patent Office: 2,654 Days
• Field of Search: 310/326, 310/8, 310/324, 310/323.02, 417/474, 417/475, 417/413.2, 417/321
• US Class Current: 310/328
• CPC Class Codes: B01D 2015/389 using ultra-sound
• CPC Class Codes: B01J 2219/00891 Feeding or evacuation
• CPC Class Codes: B01J 2219/00916 by chromatography
• CPC Class Codes: B01J 2219/00932 Sonic or ultrasonic vibrations
• CPC Class Codes: B01J 2219/00952 Sensing operations
• CPC Class Codes: B01L 2200/10 Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
• CPC Class Codes: B01L 2300/0816 Cards, e.g. flat sample carriers usually with flow in two horizontal directions
• CPC Class Codes: B01L 2300/087 Multiple sequential chambers
• CPC Class Codes: B01L 2300/088 Channel loops
• CPC Class Codes: B01L 2300/0883 Serpentine channels
• CPC Class Codes: B01L 2400/0439 ultrasonic vibrations, vibrating piezo elements
• CPC Class Codes: B01L 2400/0496 Travelling waves, e.g. in combination with electrical or acoustic forces
• CPC Class Codes: B01L 3/50273 characterised by the means or forces applied to move the fluids micropumps F04B19/006, of the membrane type F04B43/043
• CPC Class Codes: B01L 5/02 Gas collection apparatus, e.g. by bubbling under water for sampling G01N1/22
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: F04B 17/00 Pumps characterised by combination with, or adaptation to, specific driving engines or motors
• CPC Class Codes: F04B 43/046 with piezoelectric drive
• CPC Class Codes: G01N 2030/122 cryogenic focusing
• CPC Class Codes: G01N 2030/123 using more than one trap
• CPC Class Codes: G01N 2030/285 electrically driven carrier
• CPC Class Codes: G01N 2030/326 : pumps
• CPC Class Codes: G01N 2030/623 : by modulation of sample feed or detector response
• CPC Class Codes: G01N 2030/77 : detecting radioactive properties
• CPC Class Codes: G01N 30/32 : of pressure or speed G01N30/36 takes precedence
• CPC Class Codes: G01N 30/44 : using recycling of the fraction to be distributed
• CPC Class Codes: G01N 30/6095 : Micromachined or nanomachined, e.g. micro- or nanosize

Abstract

A microsized pump is set forth. It comprises a substrate which at least partially defines one or more walls of a longitudinally extending tunnel. The tunnel has a vibratable wall portion. A sonic energy generator is positioned in sonic energy transmitting relation to the vibratable wall portion. The sonic energy generator is adapted to generate elastic waves which travel along the longitudinal extension of the tunnel. The pump is useful for moving material along the tunnel whereby chemical and biological analysis and reactions can be carried out on a micro scale.

Claims

1. A chromatographic column comprising a micro sized pump, the pump comprising:

a substrate which at least partially defines one or more walls of a longitudinally extending tunnel, wherein the walls of the tunnel are coated with a stationary phase, the tunnel having a vibratable wall portion;

a sonic energy generator positioned in sonic energy transmitting relation to the vibratable wall portion, the sonic energy generator being adapted to generate elastic waves which travel along the longitudinal extension of the tunnel; and

means for limiting the elastic waves such that they travel in substantially only a single direction.

2. The chromatographic column of claim 1, wherein the tunnel has a maximum lateral dimension of less than about 500 microns.

3. The chromatographic column of claim 1, wherein the generator is in the nature of a first plurality of substantially parallel conductors, each one of which is in electrical conducting relation to each other, and a second plurality of substantially parallel conductors, each one of which is in electrical conducting relation to each other, the first and second pluralities of conductors being electrically isolated from one another, the conductors of the first and second pluralities of conductors being interdigitally arranged with one another and extending along the longitudinal extension of the tunnel.

4. The chromatographic column of claim 3, wherein the interdigitally arranged conductors are spaced from one another within a distance of no more than that over which the elastic waves sustain themselves.

5. The chromatographic column of claim 1, wherein the tunnel is in the nature of a trench extending into the substrate and the vibratable wall portion comprises a plate which covers the trench.

6. The chromatographic column of claim 5, wherein the trench includes a piezoelectric layer.

7. The chromatographic column of claim 6, wherein the piezoelectric layer is zinc oxide, aluminum nitride, lead zirconate titanate, barium titanate or lithium niobate.

8. A chromatographic column as set forth in claim 1, wherein the stationary phase is a polymer.

9. A chromatographic column as set forth in claim 1, wherein the stationary phase is a self-assembled monolayer.

10. A analysis system comprising the chromatographic column of claim 1, a sample injector and a detector.

11. An analysis system as set forth in claim 10, wherein the detector is an ultrasonic sensor.

12. An analysis system as set forth in claim 10, wherein the sample injector includes a heated platform along with a sorptive material.

13. A chemical or biological analysis system comprising a micro sized pump in combination with a sensor,

wherein the pump comprises:

a substrate which at least partially defines one or more walls of a longitudinally extending tunnel, the tunnel having a vibratable wall portion;

a sonic energy generator positioned in sonic energy transmitting relation to the vibratable wall portion, the sonic energy generator being adapted to generate elastic waves which travel along the longitudinal extension of the tunnel; and

means for limiting the elastic waves such that they travel in substantially only a single direction, and

wherein the sensor is connected to receive a sample having one or more components pumped via the tunnel and to measure a quantity indicative of at least one of the components.

14. An analysis system as set forth in claim 13, including one or more additional sensors, each being connected to receive the sample pumped via the tunnel and to measure an additional quantity indicative of at least one of the components.

15. A chemical or biological reaction system comprising one or more micro sized pumps in combination with a reaction region, wherein the one or more microsized pumps each comprise:

a substrate which at least partially defines one or more walls of a longitudinally extending tunnel, the tunnel having a vibratable wall portion;

a sonic energy generator positioned in sonic energy transmitting relation to the vibratable wall portion, the sonic energy generator being adapted to generate elastic waves which travel along the longitudinal extension of the tunnel; and

means for limiting the elastic waves such that they travel in substantially only a single direction, wherein the reaction region is adjacent the substrate and is connected to receive a reaction sample having one or more reactants pumped via the tunnel(s) and to carry forth a reaction thereat to thereby form a reacted sample.

16. A reaction system as set forth in claim 15 including an additional reaction region, the additional reaction region being connected to receive the reacted sample pumped via a selected one of the one or more of the tunnels and to carry forth an additional reaction thereat to thereby form a further reacted sample.

17. A reaction system as set forth in claim 16 wherein the additional reaction region is connected to receive an additional reactant for reaction with the reacted sample thereat to thereby form the further reacted sample.