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Surface acoustic wave device with KNb03 piezoelectric thin film, frequency filter, oscillator, electronic circuit, and electronic apparatus

  • US 6,720,846 B2
  • Filed: 03/20/2002
  • Issued: 04/13/2004
  • Est. Priority Date: 03/21/2001
  • Status: Expired due to Fees
First Claim
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1. A surface wave device comprising:

  • one of a (110) silicon substrate and a (100) silicon substrate;

    a first oxide thin film layer on said substrate formed from one of strontium oxide and magnesium oxide;

    a second oxide thin film layer on said first oxide thin film layer;

    a potassium niobate piezoelectric thin film on said second oxide thin film layer; and

    a protective thin film on said potassium niobate piezoelectric thin film, said protective thin film consisting of one of oxide and nitride.

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