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Methods and apparatus for diffractive optical processing using an actuatable structure

  • US 6,724,125 B2
  • Filed: 03/04/2002
  • Issued: 04/20/2004
  • Est. Priority Date: 03/30/1999
  • Status: Expired due to Term
First Claim
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1. A method of redirecting light from a main pathway using a diffracting optical element having a plurality of reflective grating elements, comprising:

  • supporting a plurality of actuating beams over a substrate, each of the plurality of actuating beams forming a corresponding actuation gap relative to the substrate, the plurality of actuating beams forming a plurality of rows, each row including a corresponding at least two of the plurality of actuating beams;

    supporting each of the plurality of grating elements over a corresponding one of the plurality of rows of actuating beams to form a corresponding auxiliary gap therebetween;

    directing a beam of light along the main pathway and onto a portion of each of the plurality of grating elements, the beam having at least light of a first wavelength and light of a second wavelength; and

    positioning at least one of the plurality of grating elements relative to the substrate by actuating the at least two of the actuating beams corresponding to at least one of the plurality of rows of actuating beams, the positioning causing at least a portion of one of the light of a first wavelength and the light of a second wavelength to be diffracted out of the main pathway, whereby the planarity of the at least one of the plurality of grating elements is maintained over the portion of the at least one of the plurality of grating elements onto which the beam of light is directed.

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