System for validating and monitoring semiconductor testing tools
First Claim
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1. A system for monitoring semiconductor testing tools comprising:
- a tester testing a semiconductor device, whereby a test result is derived;
a storage device storing a logic function corresponding to the semiconductor device; and
a processor receiving the test result and the logic function from the tester and the storage device respectively, and applying the logic function to the test result for validation of the tester.
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Abstract
A system for monitoring semiconductor testing tools comprises a tester testing a semiconductor device, whereby a test result is derived, a storage device storing a logic function corresponding to the semiconductor device, and a processor receiving the test result and the logic function from the tester and storage device respectively, and applying the logic function to the test result for validation.
8 Citations
32 Claims
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1. A system for monitoring semiconductor testing tools comprising:
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a tester testing a semiconductor device, whereby a test result is derived;
a storage device storing a logic function corresponding to the semiconductor device; and
a processor receiving the test result and the logic function from the tester and the storage device respectively, and applying the logic function to the test result for validation of the tester. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system for validating semiconductor test tools using a semiconductor device which a first test result has been derived from and validated, the system comprising:
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a tester testing the semiconductor device, whereby a second test result is derived;
a storage device storing the first test result of the semiconductor device;
a processor receiving the first and second test result from the storage device and the tester respectively, and comparing the first and second test result for validation of the second test result;
a tool controller controlling the tester and receiving the second test result from the tester; and
a setup server receiving the first and second test result from the storage device and the tool controller respectively, and comparing the first and the second test result. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A system for validating semiconductor test tools using a semiconductor device which a first test result has been derived from and validated, the system comprising:
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a tester testing the semiconductor device, whereby a second test result is derived;
a storage device storing the first test result of the semiconductor device; and
a processor receiving the first and second test result from the storage device and the tester respectively, and comparing the first and second test result for validation of the tester. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
a tool controller controlling the tester and receiving the second test result from the tester;
a setup server receiving the first and second test result from the storage device and the tool controller respectively, and comparing the first and the second test result.
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30. The system as claimed in claim 29 wherein the processor communicates with the tester through a SECS tool link.
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31. The system as claimed in claim 21 further comprising a display connected to the storage device.
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32. The system as claimed in claim 21 further comprising an input device connected to the storage device.
Specification