Optical scanner, laser image projector adopting the optical scanner, and method of driving the laser image projector
First Claim
1. An optical scanner comprising:
- a base substrate;
a plurality of parallel stationary comb electrodes arranged on the base substrate extending upwards at right angle;
a stage having a mirror side at its top side, being separated a predetermined distance above the base substrate;
a plurality of parallel driving comb electrodes arranged on the bottom of the stage extending at right angle interdigitated with the stationary comb electrodes;
torsion bars formed at both side edges of the stage with a predetermined length to support such that the stage pivots; and
supports for supporting the torsion bars such that the stage is suspended above the base substrate.
0 Assignments
0 Petitions
Accused Products
Abstract
An optical scanner, a laser image projector using the optical scanner, and a method of driving the laser image projector are provided. The optical scanner includes: a base substrate; a plurality of parallel stationary comb electrodes arranged on the base substrate extending upwards at right angle; a stage having a mirror side at its top side, being separated a predetermined distance above the base substrate; a plurality of parallel driving comb electrodes arranged on the bottom of the stage extending at right angle interdigitated with the stationary comb electrodes; torsion bars formed at both side edges of the stage with a predetermined length to support such that the stage pivots; and supports for supporting the torsion bars such that the stage is suspended above the base substrate. The laser image projector includes the optical scanners using micro mirrors, instead of a horizontal scanning rotating polygonal mirror and a vertical scanning galvanometer, and is driven such that a single horizontal left-to-right scanning is followed by another right-to-left horizontal scanning without redundant flyback interval. Therefore, comparing with a driving method which needs quick returning 5-10 times faster than horizontal scanning rate, the driving speed can be markedly reduced, so that high-speed driving limitations of optical scanner for high-resolution image display can be overcome.
36 Citations
5 Claims
-
1. An optical scanner comprising:
-
a base substrate;
a plurality of parallel stationary comb electrodes arranged on the base substrate extending upwards at right angle;
a stage having a mirror side at its top side, being separated a predetermined distance above the base substrate;
a plurality of parallel driving comb electrodes arranged on the bottom of the stage extending at right angle interdigitated with the stationary comb electrodes;
torsion bars formed at both side edges of the stage with a predetermined length to support such that the stage pivots; and
supports for supporting the torsion bars such that the stage is suspended above the base substrate.
-
-
2. An optical scanner comprising:
-
a first optical scanner having a reflecting side from which an incident beam is reflected in a first direction within the range of a predetermined angle; and
a second optical scanner for scanning a laser beam scanned by the first optical scanner in the first direction, in a second direction perpendicular to the first direction, wherein each of the first and second optical scanners comprises;
a base substrate;
a plurality of parallel stationary comb electrodes arranged on the base substrate extending upwards at right angle;
a stage having a mirror side at its top side, being separated a predetermined distance above the base substrate;
a plurality of parallel driving comb electrodes arranged on the bottom of the stage extending at right angle interdigitated with the stationary comb electrodes;
torsion bars formed at both side edges of the stage with a predetermined length to support such that the stage pivots; and
supports for supporting the torsion bars such that the stage is suspended above the base substrate. - View Dependent Claims (3, 4, 5)
-
Specification