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Semiconductor run-to-run control system with missing and out-of-order measurement handling

  • US 6,725,098 B2
  • Filed: 10/23/2001
  • Issued: 04/20/2004
  • Est. Priority Date: 10/23/2001
  • Status: Expired due to Fees
First Claim
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1. A method for controlling a manufacturing process, includes:

  • processing using a process input and producing a process output;

    storing the process input in a database;

    storing at least one measurement of the process output in the database associated with each process input;

    iterating over data from the database to estimate a process state;

    if one or more measurements is missing from the database, replacing the missing measurements for the database based on a prediction from a model; and

    updating said model with said process state estimate.

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