Semiconductor run-to-run control system with missing and out-of-order measurement handling

• US 6,725,098 B2
• Filed: 10/23/2001
• Issued: 04/20/2004
• Est. Priority Date: 10/23/2001
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Zou, Jianping, Edwards, Keith A., Mullins, James A.
• Primary Examiner(s): Picard, Leo
• Assistant Examiner(s): Jarrett, Ryan A.
• Application Number:
  US10/046,359
• Publication Number:
  US 20030078680A1
• Time in Patent Office: 910 Days
• Field of Search: 700/30, 700/31, 700/44, 700/45, 700/47, 700/48, 700/52, 700/121, 700/28, 700/29
• US Class Current: 700/31
• CPC Class Codes: G05B 13/042 in which a parameter or coefficient is automatically adjusted to optimise the performance
• CPC Class Codes: G05B 13/048 using a predictor
• CPC Class Codes: G05B 15/02 electric
• CPC Class Codes: G05B 17/02 electric
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

A method for a run-to-run (R2R) control system includes processing materials using a process input and producing a process output, storing the process input in a database, the storing including using a timestamp, storing at least one measurement of the process output in the database aligned with each process input using the timestamp, iterating over the data from the database to estimate a process state, and, if one or more of the measurements is missing from the database, predicting the missing measurements for the database based on a model, and determining an error for calculating a next process input, the error based on the data in the database.

Claims

1. A method for controlling a manufacturing process, includes:

processing using a process input and producing a process output;

storing the process input in a database;

storing at least one measurement of the process output in the database associated with each process input;

iterating over data from the database to estimate a process state;

if one or more measurements is missing from the database, replacing the missing measurements for the database based on a prediction from a model; and

updating said model with said process state estimate.

3. The method of claim 1 wherein a controller receives the updated model and utilizes said updated model to produce the next process input.

4. The method of claim 3 wherein the controller comprises one or more of a model-predictive control (MPC) type controller, a direct model inverter type controller, and a simple integral controller.

5. The method of claim 3 wherein the controller minimizes the error in each run of the process using the estimate of the process state.

6. The method of claim 1 wherein the process operates on either a lot or a part of a lot of semiconductor devices.

7. The method of claim 1 wherein the database is coupled to one or more modules that operate on the database.

8. The method of claim 7 wherein the modules include an estimation module, a compute module, a sort module, a pairing module and a data storage module.

9. The method of claim 1 wherein the manufacturing process is a run-to-run (R2R) process for one or more of the following processes:

a chemical-mechanical-planarization (CMP) process, a lithography process and a plasma etching process.

11. The method of claim 1 wherein said storing of the process input includes providing a timestamp, and wherein said at least one measurement of the process output is associated with each process input using the timestamp.

27. A program storage media readable by a machine and containing instructions for performing the method contained in claim 1.

2. A method for controlling a manufacturing process, includes:

processing using a process input and producing a process output;

storing the process input in a database;

storing at least one measurement of the process output in the database associated with each process input;

iterating over data from the database to estimate a process state;

if one or more measurements is missing from the database, replacing the missing measurements for the database based on a prediction from a model; and

updating said model with said processing state estimate, wherein if actual measurements become available a time period after process state estimation, for said one or more measurements which was missing, replacing the predicted measurements with said actual measurements, storing said actual measurements in said database, and utilizing said actual measurements in subsequent process state estimation.

10. The method of claim 2 wherein said time period can be variable.

12. A control system includes:

a controller capable of providing a process input;

a process coupled to the controller to receive the process input and provide a process output;

a database configured to receive the process input and a measurement of the process output, the database capable of associating each process input and each process output;

a model capable of providing a model output; and

a state estimator coupled to receive the database output and the model output, the state estimator coupled to the controller and capable of generating process state estimates, and configured to provide an updated model to said controller based on said process state estimates.

13. The control system of claim 12 wherein the process operates on a lot or a part of a lot of semiconductor devices.

14. The control system of claim 12 wherein the controller includes one or more of the following model-predictive control (MPC) type controller, a direct model inverter type controller, and a simple integral controller.

15. An apparatus includes:

means for processing using a process input and producing a process output;

means for storing the process input in a database, the means for storing including providing a timestamp;

means for storing at least one measurement of the process output in the database aligned with each process input using the timestamp;

means for iterating over the data from the database to estimate a process state;

means for replacing measurements missing from the database based on a prediction from a model; and

means for updating said model with said process state estimate.

16. A method for controlling a manufacturing process, includes:

processing using a process input and producing a process output;

storing the process input in a database;

storing at least one measurement of the process output in the database associated with each process input;

iterating over data from the database to estimate a process state, wherein a constrained quadratic optimization is solved at each iteration of data;

if one or more measurements is missing from the database, replacing the missing measurements for the database based on a prediction from a model; and

updating said model with said process state estimate.

18. The method of claims 16 wherein a controller receives the updated model and utilizes said updated model to produce the next process input.

20. The method of claim 16 wherein said storing of the process input includes providing a timestamp, and wherein said at least one measurement of the process output is associated with each process input using the timestamp.

28. A program storage media readable by a machine and containing instructions for performing the method contained in claim 16.

17. A method for controlling a manufacturing process, includes:

processing using a process input and producing a process output;

storing the process input in a database;

storing at least one measurement of the process output in the database associated with each process input;

iterating over data from the database to estimate a process state, wherein a constrained quadratic optimization is solved at each iteration of data;

if one or more measurements is missing from the database, replacing the missing measurements for the database based on a prediction from a model; and

updating said model with said process state estimate wherein if actual measurements become available a time period after process state estimation, for said one or more measurements which was missing, replacing the predicted measurements with said actual measurements, storing said actual measurements in said database, and utilizing said actual measurements in subsequent process state estimation.

19. The method of claim 17 wherein said time period can be variable.

21. A method for controlling a manufacturing process, includes:

providing a database with process input data and associated process output data;

iterating over data from the database to estimate a process state;

if one or more measurements is missing from the database, replacing the missing measurements for the database based on a prediction from a model; and

updating said model with said process state estimate.

23. The method of claim 21 wherein a controller receives the updated model and utilizes said updated model to produce the next process input.

25. The method of claim 21 wherein said process output data is associated with said process input data using a timestamp.

26. The method of claim 21 further including solving a constrained quadratic optimization at each iteration of said data.

29. A program storage media readable by a machine and containing instructions for performing the method contained in claim 21.

22. A method for controlling a manufacturing process, includes:

providing a database with process input data and associated process output data;

iterating over data from the database to estimate a process state;

if one or more measurements is missing from the database, replacing the missing measurements for the database based on a prediction from a model; and

updating said model with said process state estimate, wherein if actual measurements become available a time period after process state estimation, for said one or more measurements which was missing, replacing the predicted measurements with said actual measurements, storing said actual measurements in said database, and utilizing said actual measurements in subsequent process state estimation.

24. The method of claim 22 wherein said time period can be variable.