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MEMS-integrated inertial measurement units on a common substrate

  • US 6,725,719 B2
  • Filed: 04/17/2003
  • Issued: 04/27/2004
  • Est. Priority Date: 04/17/2002
  • Status: Expired due to Fees
First Claim
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1. A planar, integrated inertial measurement unit (IMU) based on a common substrate acting as a gimbal, the IMU including at least two coplanar inertial measurement instruments, the IMU comprising:

  • a common planar gimbal; and

    a responsive member for each instrument, each responsive member coupled to the gimbal by flexures;

    wherein the gimbal is driven in oscillation to provide a common drive motion to all of the instruments.

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