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Micromechanical differential pressure sensor device

  • US 6,725,725 B1
  • Filed: 05/15/2000
  • Issued: 04/27/2004
  • Est. Priority Date: 11/13/1997
  • Status: Expired due to Fees
First Claim
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1. A micromechanical differential pressure sensor device for measuring a pressure difference between two mutually separated spaces, comprising:

  • a single support substrate;

    two capacitive absolute pressure measuring devices monolithically integrated on said single support substrate; and

    pressure connection parts respectively extending from said two capacitive absolute pressure measuring devices and coupling each of the two mutually separated spaces and respective pressures to be measured to a respective one of said two capacitive absolute pressure measuring devices.

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