Transmission line structures for use as phase shifters and switches
First Claim
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1. A transmission line structure comprising:
- a substrate;
a transmission line suspended above said substrate, said transmission line including first and second parallel end sections and a matching section disposed at an angle between said first and second end sections, said transmission line being comprised of first and second parallel conductive beams each comprised of single crystal silicon having a first insulating layer and a second conductive metal layer disposed thereon;
each of said conductive beams being suspended above said substrate, having first and second fixed ends that are positioned to space said beams apart from one another in said first and second end sections of said transmission line by a first predetermined distance, and having first and second bends therein defining first and second ends, respectively, of said matching section of said transmission line; and
an actuator for bending said first conductive beam toward said second conductive beam in said first and second end sections to change said first predetermined distance between said beams and thereby alter the electrical characteristics of said transmission line.
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Abstract
Suspended single crystal silicon (SCS) beams coated with metal form transmission lines that are used in MEMs type microactuated phase shifters and switches. The characteristic impedance of any section of the transmission lines is a function of the beam spacing in that section. Microactuators, such as comb-drive actuators, are connected to the beams to vary this spacing in a controllable manner. A continuos phase shifter is formed that consists of two tunable capacitance sections connected by a matching section that reduces reflections and improves compliance of the beams to reduce the energy required to move the beams.
25 Citations
24 Claims
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1. A transmission line structure comprising:
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a substrate;
a transmission line suspended above said substrate, said transmission line including first and second parallel end sections and a matching section disposed at an angle between said first and second end sections, said transmission line being comprised of first and second parallel conductive beams each comprised of single crystal silicon having a first insulating layer and a second conductive metal layer disposed thereon;
each of said conductive beams being suspended above said substrate, having first and second fixed ends that are positioned to space said beams apart from one another in said first and second end sections of said transmission line by a first predetermined distance, and having first and second bends therein defining first and second ends, respectively, of said matching section of said transmission line; and
an actuator for bending said first conductive beam toward said second conductive beam in said first and second end sections to change said first predetermined distance between said beams and thereby alter the electrical characteristics of said transmission line. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A transmission line structure comprising:
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a substrate;
a transmission line suspended above said substrate, said transmission line including first and second parallel end sections and a matching section disposed at a ninety degree angle between said first and second end sections, said transmission line being comprised of first and second parallel conductive beams each comprised of single crystal silicon having a first insulating layer and a second conductive metal layer disposed thereon;
each of said conductive beams being suspended above said substrate, having first and second fixed ends that are positioned to space said beams apart from one another in said first and second end sections of said transmission line by a first predetermined distance and having first and second ninety degree opposite angled bends therein defining first and second ends, respectively, of said matching section of said transmission line; and
a first actuator for bending said first beam toward said second beam and a second actuator for bending said second beam toward said first beam to change said first predetermined distance between said beams in said first and second end sections and thereby alter the electrical characteristics of said transmission line, while maintaining said second predetermined distance between said beams in said matching section constant. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A adjustable phase shifter structure comprising:
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a substrate;
a transmission line suspended above said substrate, said transmission line including first and second parallel, capacitance tuning end sections and a matching section disposed at an angle between said first and second end sections, said transmission line being comprised of first and second parallel conductive beams suspended above said substrate, each of said conductive beams having first and second fixed ends that are positioned to space said beams apart from one another in said first and second end sections of said transmission line by a first predetermined distance, each of said beams also having first and second bends therein defining first and second ends, respectively, of said matching section of said transmission line; and
an actuator for bending said first conductive beam toward said second conductive beam in said first and second capacitance tuning end sections to change said first predetermined distance between said beams and thereby alter the capacitance of said phase shifter structure. - View Dependent Claims (16, 17, 18, 19, 20)
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21. A phase shifter structure comprising:
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a substrate;
a transmission line suspended above said substrate, said transmission line including first and second parallel, capacitance tuning end sections and a matching section disposed at a ninety degree angle between said first and second end sections, said transmission line being formed of first and second parallel conductive beams suspended above said substrate, each of said conductive beams having first and second fixed ends that are positioned to space said beams apart from one another in said first and second end sections of said transmission line by a first predetermined distance, each of said beams also having first and second ninety degree opposite angled bends therein defining first and second ends, respectively, of said matching section of said transmission line; and
a first actuator for bending said first beam toward said second beam and a second actuator for bending said second beam toward said first beam to change said first predetermined distance between said beams in said first and second capacitance tuning end sections and thereby alter the capacitance of said phase shifter structure, while maintaining said second predetermined distance between said beams in said matching section constant. - View Dependent Claims (22, 23, 24)
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Specification