Structure having laser ablated features and method of fabricating
First Claim
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1. An electronic structure comprising:
- a first dielectric layer of polymeric material having a first top surface;
a second dielectric layer of polymeric material on said first top surface of said first dielectric layer of polymeric material, having a second top surface, said second layer of polymeric material also having trench features therein; and
electrically conductive material deposited in said trench features forming electrically conductive circuit lines being substantially flush with said second top surface of said second dielectric layer of polymeric material, wherein said polymeric material is at least one member selected from the group consisting of thermoplastic resin and thermosetting resin, and further including a third dielectric layer of polymeric material located on said electrically conductive circuit lines, wherein the second dielectric layer of polymeric material is a different material than said first and third dielectric layer of polymeric material.
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Abstract
Embedded flush circuitry features are fabricated by providing a conductive seed layer on the sidewalls and bottom of laser ablated trench features plating a layer of conductive metal onto the seed layer and depositing a later of dielectric material.
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9 Claims
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1. An electronic structure comprising:
a first dielectric layer of polymeric material having a first top surface;
a second dielectric layer of polymeric material on said first top surface of said first dielectric layer of polymeric material, having a second top surface, said second layer of polymeric material also having trench features therein; and
electrically conductive material deposited in said trench features forming electrically conductive circuit lines being substantially flush with said second top surface of said second dielectric layer of polymeric material, wherein said polymeric material is at least one member selected from the group consisting of thermoplastic resin and thermosetting resin, and further including a third dielectric layer of polymeric material located on said electrically conductive circuit lines, wherein the second dielectric layer of polymeric material is a different material than said first and third dielectric layer of polymeric material.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
Specification