High-frequency, liquid metal, latching relay array

• US 6,730,866 B1
• Filed: 04/14/2003
• Issued: 05/04/2004
• Est. Priority Date: 04/14/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Fong, Arthur, Wong, Marvin Glenn
• Primary Examiner(s): Friedhofer, Michael
• Assistant Examiner(s): KLAUS, LISA NHUNG
• Application Number:
  US10/413,278
• Time in Patent Office: 386 Days
• Field of Search: 200/182, 200/190, 200/193, 200/214, 200/234, 200/199
• US Class Current: 200/182
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
• CPC Class Codes: H01H 2057/006 Micromechanical piezoelectric relay
• CPC Class Codes: H01H 29/24 wherein contact is made and broken between liquid and liquid
• CPC Class Codes: H01H 55/00 Magnetostrictive relays
• CPC Class Codes: H01H 57/00 Electrostrictive relays; Piezoelectric relays
• CPC Class Codes: H01H 67/22 Switches without multi-position wipers

Abstract

An electrical relay array using conducting liquid in the switching mechanism. The relay array is amenable to manufacture by micro-machining techniques. In each element of the relay array, two electrical contacts are held a small distance apart. The facing surfaces of the contacts each support a droplet of a conducting liquid, such as a liquid metal. An actuator, coupled to one of the electrical contacts, is energized in a first direction to reduce the gap between the electrical contacts, causing the two conducting liquid droplets to coalesce and complete an electrical circuit. The actuator is then de-energized and the contacts return to their starting position. The liquid droplets remain coalesced because of surface tension. The electrical circuit is broken by energizing an actuator to increase the gap between the electrical contacts to break the surface tension bond between the conducting liquid droplets. The droplets remain separated when the actuator is de-energized because there is insufficient conducting liquid to bridge the gap between the contacts. Additional conductors may be included in the assembly to provide a coaxial structure and allow for high frequency switching. In an exemplary embodiment, the actuator is a piezoelectric actuator and the conducting liquid is a liquid metal.

Claims

1. An electrical relay array comprising a plurality of switching elements, a switching element of the plurality of switching elements comprising:

a first electrical contact, having a wettable surface;

a first signal conductor, electrically coupled to the first electrical contact;

a first conducting liquid droplet in wetted contact with the first electrical contact;

a second electrical contact, spaced from and aligned with the first electrical contact and having a wettable surface facing the wettable surface of the first electrical contact;

a second signal conductor, electrically coupled to the second electrical contact;

a second conducting liquid volume in wetted contact with the second electrical contact; and

a first actuator in a rest position, coupled to the first electrical contact and operable to move the first electrical contact towards the second electrical contact, to cause the first and second conducting liquid droplets to coalesce and complete an electrical circuit between the first and second electrical contacts, and away from the second electrical contact, to cause the first and second conducting liquid droplets to separate and break the electrical circuit.

2. An electrical relay array in accordance with claim 1, wherein the first actuator is one of a piezoelectric actuator and a magnetorestrictive actuator.

3. An electrical relay array in accordance with claim 1, wherein the first and second conducting liquid droplets are liquid metal droplets.

4. An electrical relay array in accordance with claim 1, further comprising a second actuator, coupled to the second electrical contact and operable to move the second electrical contact towards the first electrical contact, to cause the first and second conducting liquid droplets to coalesce and complete an electrical circuit, and away from the first electrical contact, to cause the first and second conducting liquid droplets to separate and break the electrical circuit.

5. An electrical relay array in accordance with claim 4, wherein the second actuator is one of a piezoelectric actuator and a magnetorestrictive actuator.

6. An electrical relay array in accordance with claim 1, wherein the volumes of the first and second conducting liquid droplets are such that coalesced droplets remain coalesced when the actuator is returned to its rest position, and separated droplets remain separated when the actuator is returned to its rest position.

7. An electrical relay array in accordance with claim 1, wherein the wettable surfaces of the first and second electrical contacts are stepped.

8. An electrical relay array in accordance with claim 1, wherein the first electrical contact is electrically coupled to the first signal conductors by a non-wettable, conductive coating on the first actuator.

9. An electrical relay array in accordance with claim 1, further comprising:

a ground shield, encircling the first and second electrical contacts and the first and second signal conductors; and

a dielectric layer positioned between the ground shield and the first and second signal conductors, the dielectric layer electrically insulating the ground shield from the first and second signal conductors.

10. An electrical relay array in accordance with claim 1, wherein the relay array comprising one or more levels, each level of the one or more levels comprising:

a lower cap layer supporting electrical connections to the first actuator;

an upper cap layer; and

a switching layer positioned between the lower cap layer and the upper cap layer and having a plurality of channels formed therein;

wherein the first actuator, the first and second electrical contacts and the first and second signal conductors are positioned within a channel of the plurality of channels.

11. An electrical relay array in accordance with claim 10, further comprising:

a first end cap supporting electrical connections to the first signal conductor of each relay element; and

a second end cap supporting electrical connections to the second signal conductor of each relay element.

12. An electrical relay array in accordance with claim 11, wherein the electrical connections to the first actuator comprise traces deposited on the surface of the lower cap layer and electrically coupled to connections on the first end cap.

13. An electrical relay array in accordance with claim 11, manufactured by a method of micro-machining.

14. An electrical relay array in accordance with claim 11, wherein the relay array comprises a rectangular grid of relay elements having a plurality of rows and a plurality of columns.

15. An electrical relay array in accordance with claim 14, further comprising:

for each row of the plurality of rows;

connection circuitry formed on the second end cap for coupling an input signal to the row; and

for each column of the plurality of columns;

connection circuitry formed on the first end cap for coupling the column to an output.

16. An electrical relay array in accordance with claim 15, further comprising control circuitry operable to couple a selected input signal to a selected output through the relay array.