Star-connected sensor

• US 6,731,107 B2
• Filed: 01/14/2002
• Issued: 05/04/2004
• Est. Priority Date: 05/15/2000
• Status: Expired due to Fees

• Current Assignee: Alcatel SA (Nokia Corporation)
• Original Assignee: Alcatel SA (Nokia Corporation)
• Inventors: Reverdy, Francois
• Primary Examiner(s): Le, N.
• Assistant Examiner(s): He, Amy
• Application Number:
  US10/030,709
• Publication Number:
  US 20020105338A1
• Time in Patent Office: 841 Days
• Field of Search: 324/207.16, 324/545, 324/207.11, 324/207.13, 324/207.15, 324/207.25, 324/219, 324/239, 324/241, 324/654, 324/233, 310/90.5, 310/168, 318/647
• US Class Current: 324/207.16
• CPC Class Codes: F04D 19/04 specially adapted to the production of a high vacuum, e.g. molecular pumps
• CPC Class Codes: F16C 2360/45 Turbo-molecular pumps
• CPC Class Codes: F16C 32/0446 Determination of the actual position of the moving member, e.g. details of sensors
• CPC Class Codes: F16C 32/0482 with three electromagnets to control the two degrees of freedom
• CPC Class Codes: G01D 5/2013 by a movable ferromagnetic element, e.g. a core G01D5/2033 takes precedence

Abstract

In a rotary assembly comprising a rotor mounted in rotation in a stator about a mean axis of rotation, a radial position sensor comprises three induction sensors distributed in the stator substantially at 120° from one another around the rotor and equidistant from the mans axis of ration. The induction sensors are cabled in star connection with a common connection point, and are powered by a balanced three-phase sinusoidal voltage source with a neutral point. The output voltage, present between the common connection point and the neutral point of the balanced three-phase sinusoidal voltage source, is processed by signal processing means which determine its amplitude and its phase relative to the voltage delivered by the balanced three-phase sinusoidal voltage source. Thus, from only three sensors, two signals are obtained constituting the amplitude image and the angular position of the radial displacement of the rotor gravity axis in the stator.

Claims

1. A rotary assembly comprising a rotor mounted to rotate in a stator about a mean axis of rotation, and comprising a detector for detecting the radial position of the rotor within the stator, itself comprising three sensors distributed in the stator at substantially 120°

from one another about the rotor and at equal distances from the mean axis of rotation, wherein;

the sensors are inductive sensors placed facing a segment of the rotor that is made of magnetic material;

a balanced three-phase sinusoidal voltage source having a neutral point feeds the inductive sensors which are wired in a star configuration;

means sense the output voltage between the neutral point of the balanced three-phase voltage source and the connection point common to the star-connected inductive sensors, and deduce therefrom the radial position of the rotor within the stator.

2. A rotary assembly according to claim 1, comprising at least one magnetic bearing having supporting electromagnets fed by a control circuit driven by the output voltage of the corresponding radial position detector.

3. A rotary assembly according to claim 2, wherein the magnetic bearing comprises three supporting electromagnets.

4. A rotary assembly according to claim 3, wherein the inductive sensors are angularly offset between the angular positions occupied by the supporting electromagnets.

5. A rotary assembly according to claim 4, wherein the inductive sensors are engaged between the supporting electromagnets of a single magnetic bearing.

6. A rotary assembly according to claim 2 comprising two magnetic bearings spaced apart longitudinally from each other.

7. A rotary assembly according to claim 2, wherein the output voltage is processed by signal processing means to produce an amplitude signal and a phase signal relative to the voltage delivered by the balanced three-phase voltage source, the amplitude signal constituting a signal that is an image of the amplitude of the radial displacement of the gravity axis of the rotor relative to the mean axis of rotation, the phase signal constituting a signal that is the image of the angular position of the gravity axis of the rotor about the mean axis of rotation relative to the inductive sensors.

8. A rotary assembly according to claim 7, wherein the signal processing means comprise:

an amplitude-measuring circuit connected to the output of the radial position detector and producing an amplitude signal proportional to the amplitude of the output voltage of the radial amplitude detector;

a phase-measuring circuit connected to the output of the radial position detector, and producing a phase signal proportional to the phase offset between the output voltage and one of the three sinewave voltages feeding the star-connected inductive sensors;

digital processing means receiving the amplitude signal and the phase signal, and producing the signals for controlling the feed to the supporting electromagnets seeking to keep the gravity axis of the rotor centered relative to the mean axis of rotation on the stator.

9. A rotary assembly according to claim 2, wherein the output voltage is processed by signal processing means producing at least two amplitude signals constituting images of respective instantaneous displacement components of the center of gravity of the rotor along two different fixed radial directions of the stator about the mean axis of rotation.

10. A rotary assembly according to claim 9, wherein the signal processing means comprise:

a first amplitude-measuring circuit having a first input connected to the output of the radial position detector and having a second input connected to a first phase of the balanced three-phase sinusoidal voltage source, and producing on its output a first amplitude signal proportional to the mean value of the output voltage as computed over a sample that is synchronous with said first phase of the balanced three-phase sinusoidal voltage source;

a second amplitude-measuring circuit having a first input connected to the output of the radial position detector and having a second input connected to another phase of the balanced three-phase sinusoidal voltage source, and producing on its output a second amplitude signal proportional to t

he mean value of the output voltage computed during a sample that is synchronous with said other phase of the balanced three-phase sinusoidal voltage source;

digital processing means receiving the two amplitude signals and producing signals for controlling the feed to the supporting electromagnets seeking to keep the gravity axis of the rotor centered relative to the mean axis of rotation within the stator.

11. A rotary assembly according to claim 1 in which the rotor and the stator constitute a vacuum pump.

12. A rotary assembly according to claim 1, wherein the frequency of the balanced three-phase sinusoidal voltage source is much higher than the rotary frequency of the rotor in the stator.