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Wafer test apparatus including optical elements and method of using the test apparatus

  • US 6,731,122 B2
  • Filed: 08/14/2001
  • Issued: 05/04/2004
  • Est. Priority Date: 08/14/2001
  • Status: Expired due to Fees
First Claim
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1. A method of testing an electronic device on a wafer, comprising:

  • providing an electronic device for use in an optical communications system after the electronic device is packaged with an associated photo detector;

    providing a test photo detector having electrical characteristics similar to the associated photo detector; and

    prior to packaging the electronic device with the associated photo detector, detecting defects in the electronic device using the test photo detector by;

    generating an optical test signal;

    providing the optical test signal to the test photo detector; and

    supplying an electrical output of the test photo detector to the electronic device on the wafer.

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