Alignment mark system for mass transport processes
First Claim
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1. A mass transported alignment mark system, comprising:
- a substrate that has been subjected to a mass transport process; and
a lens alignment structure formed on the substrate that yields a light pattern when the substrate or a plane near the substrate is imaged;
a metal layer that is aligned to the light pattern from the lens structure.
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Abstract
A technique for creating alignment feature in mass transported substrates yields alignment features that can be located with high degrees of accuracy. Specifically, structures such as concave or convex lenses are created that yield a light pattern in transmission or reflection when the part of the substrate is imaged or a plane near the substrate is imaged. This light pattern is then used to align the substrate during subsequent lithography or packaging processes.
17 Citations
24 Claims
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1. A mass transported alignment mark system, comprising:
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a substrate that has been subjected to a mass transport process; and
a lens alignment structure formed on the substrate that yields a light pattern when the substrate or a plane near the substrate is imaged;
a metal layer that is aligned to the light pattern from the lens structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A mass transported alignment mark system, comprising:
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a substrate that has been subjected to a mass transport process; and
a lens alignment structure formed on the substrate that yields a light pattern when the substrate or a plane near the substrate is imaged;
wherein the lens alignment structure comprises multiple concave cylindrical lenses, as least two of the cylindrical lenses being arranged orthogonally with respect to each other.
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13. An alignment mark system, comprising:
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a substrate; and
a lens alignment structure formed in the substrate that has a focal point in the substrate or near a surface of the substrate; and
a metal layer that is aligned to a light pattern from the lens structure. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. An alignment system, comprising:
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a substrate; and
a lens alignment structure formed in the substrate that has a focal point in the substrate or near a surface of the substrate; and
wherein the lens alignment structure comprises multiple concave cylindrical lenses, as least two of the cylindrical lenses being arranged orthogonally with respect to each other.
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Specification