Overdrive structures for flexible electrostatic switch
First Claim
1. A MEMS device driven by electrostatic forces, comprising:
- a substrate defining a planar surface;
at least one substrate electrode disposed on the surface of said substrate;
at least one substrate contact attached to said substrate and electrically isolated from said at least one substrate electrode;
a flexible composite overlying said at least one substrate electrode and having at least one electrode element and at least one biasing element, said flexible composite having a fixed portion attached to the underlying substrate, and a distal portion movable with respect to said substrate electrode;
at least one flexible composite contact attached to said flexible composite and electrically isolated from said at least one flexible composite electrode element, wherein said at least one flexible composite contact defines protrusions that extend from a contact surface; and
an insulator electrically separating said substrate electrode from said flexible electrode, whereby said at least one flexible composite contact and said at least one substrate contact is electrically connected when said flexible composite distal portion is electrostatically attracted to said substrate.
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Accused Products
Abstract
A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage switch or relay device is provided. These devices can switch high voltages while using relatively low electrostatic operating voltages. The MEMS device comprises a substrate, a substrate electrode, and one or more substrate contacts. The MEMS device also includes a flexible composite overlying the substrate, one or more composite contacts, and at least one insulator. The switch or relay device is provided overdrive potential through protrusions on the contact surface of the switch or relay contacts. In one embodiment the substrate contacts define protrusions on the contact surface that extend toward the flexible composite contacts. In another embodiment the flexible composite contacts define protrusions on the contact surface that extend toward the substrate contacts.
127 Citations
26 Claims
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1. A MEMS device driven by electrostatic forces, comprising:
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a substrate defining a planar surface;
at least one substrate electrode disposed on the surface of said substrate;
at least one substrate contact attached to said substrate and electrically isolated from said at least one substrate electrode;
a flexible composite overlying said at least one substrate electrode and having at least one electrode element and at least one biasing element, said flexible composite having a fixed portion attached to the underlying substrate, and a distal portion movable with respect to said substrate electrode;
at least one flexible composite contact attached to said flexible composite and electrically isolated from said at least one flexible composite electrode element, wherein said at least one flexible composite contact defines protrusions that extend from a contact surface; and
an insulator electrically separating said substrate electrode from said flexible electrode, whereby said at least one flexible composite contact and said at least one substrate contact is electrically connected when said flexible composite distal portion is electrostatically attracted to said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification