Process apparatus

• US 6,733,620 B1
• Filed: 09/06/2000
• Issued: 05/11/2004
• Est. Priority Date: 03/06/1998
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Sugiyama, Norikazu, Saegusa, Hidehito, Ozawa, Jun, Okayama, Nobuyuki
• Primary Examiner(s): Hassanzadeh, Parviz
• Application Number:
  US09/655,705
• Time in Patent Office: 1,343 Days
• Field of Search: 118/715, 118/723.E, 118/723.R, 118/723.ER, 156/345.29, 156/345.33, 156/345.47, 156/345.26
• US Class Current: 156/345.29
• CPC Class Codes: H01J 37/32633 Baffles
• CPC Class Codes: H01J 37/32834 Exhausting
• CPC Class Codes: Y02C 20/30 of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

The present invention provides a process apparatus including an airtight process vessel, an exhaust system for exhausting gas from the process vessel, and a baffle plate for partitioning the process vessel into a process chamber for processing an object and an exhaust passage communicating with the exhaust system, the baffle plate has a plurality of slits through which the process chamber and the exhaust passage communicate with each other, and each of the slits has a tapered surface on an inner surface toward the process chamber, the tapered surface corresponding to not less than ¼ of a depth of the slit.

Claims

1. A process apparatus including an airtight process vessel, an exhaust system for exhausting gas from the process vessel, and a baffle plate for partitioning the process vessel into a process chamber for processing an object and an exhaust passage communicating with the exhaust system,

wherein the baffle plate includes a plurality of slits through which the process chamber and the exhaust passage communicate with each other,

wherein each slit includes an exhaust-passage opening facing the exhaust passage and a process-chamber opening facing the process chamber,

wherein at least one side of said process-chamber opening includes a sloped inner surface at least along the slit length, said sloped inner surface of the process-chamber opening formed not more than ½

of the thickness of the baffle plate and widens towards the process-chamber opening,

wherein at least one side of said exhaust-passage opening includes an inner surface that is substantially perpendicular to the surface of the baffle plate, said inner surface of the exhaust-passage opening formed not more than ½

of the thickness of the baffle plate, and

wherein the width of said exhaust-passage opening is greater than the minimum width of the process-chamber opening that is surrounded by an inner rim of the sloped inner surface.

2. The process apparatus according to claim 1, wherein the inner sloped surface of the process-chamber opening and the inner surface of the exhaust-passage opening are formed to having depths not less than ¼

of the thickness of the baffle plate.

3. The process apparatus according to claim 1, wherein the baffle plate is shaped like a ring, and the plurality of slits are arranged radially on an entire circumferential surface of the baffle plate.

4. The process apparatus according to claim 1, wherein each slit extends in a radial direction of the baffle plate, and the inner sloped surface of the process-chamber opening slopes from an opening rim of the slit, which faces the process chamber, toward the exhaust passage in which direction the opening of the slit is narrowed.

5. The process apparatus according to claim 4, wherein the exhaust-passage opening and the process-chamber opening communicate with each other through a passage having a diameter which is not larger than the minimum diameter of the process-chamber opening that is surrounded by an inner rim of the sloped surface.

6. The process apparatus according to claim 1, wherein for each slit an angle θ

formed between the sloped surface and an axis perpendicular to the openings of the slit falls within a range from 5°

to 30°

.

7. The process apparatus according to claim 1, wherein the width W1 of the process-chamber opening and the width W2 of the exhaust-passage opening are set as to satisfy a condition of 1≦

W2/W1≦

1.4.

8. The process apparatus of claim 1, wherein the sloped inner surface of said process-chamber opening is smooth.

9. A baffle plate for partitioning a process vessel into a process chamber for processing an object and an exhaust passage communicating with the exhaust system, said baffle plate including a plurality of slits through which the process chamber and the exhaust passage communicate with each other,

wherein each slit includes an exhaust-passage opening facing the exhaust passage and a process-chamber opening fag the process chamber,

wherein at least one side of said process-chamber opening includes a sloped inner surface at least along the slit length, said sloped inner surface of the process-chamber opening formed not more than ½

of the thickness of the baffle plate and widens towards the process-chamber opening,

wherein at least one side of said exhaust-passage opening includes an inner surface that is substantially perpendicular to the surface of the baffle plate, said inner surface of the exhaust-passage opening formed not more than ½

of the thickness of the baffle plate, and

wherein the width of said exhaust-passage opening is greater than the minimum width of the process-chamber opening that is surrounded by an inner rim of the sloped inner surface.

10. The baffle plate according to claim 9, wherein the inner sloped surface of the process-chamber opening and the inner surface of the exhaust-passage opening are formed to having depths not less than ¼

of the thickness of the baffle plate.

11. The baffle plate according to claim 9, wherein the baffle plate is shaped like a ring, and the plurality of slits are arranged radially on an entire circumferential surface of the baffle plate.

12. The baffle plate according to claim 9, wherein each slit extends in a radial direction of the baffle plate, and the inner sloped surface of the process-chamber opening slopes from an opening rim of the slit, which faces the process chamber, toward the exhaust passage in which direction the opening of the slit is narrowed.

13. The baffle plate according to claim 12, wherein the exhaust-passage opening and the process-chamber opening communicate with each other through a passage having a diameter which is not larger than the minimum diameter of the process-chamber opening that is surrounded by an inner rim of the sloped surface.

14. The baffle plate according to claim 9, wherein for each silt an angle θ

formed between the sloped surface and an axis perpendicular to the openings of the slit falls within a range from 5°

to 30°

.

15. The baffle plate according to claim 9, wherein the width W1 of the process-chamber opening and the width W2 of the exhaust-passage opening are set as to satisfy a condition of 1 ≦

W2/W1 ≦

1.4.

16. The baffle plate of claim 9, wherein the sloped inner surface of said process-chamber opening is smooth.