Rotatable counterbalanced actuator

• US 6,735,004 B1
• Filed: 03/15/2002
• Issued: 05/11/2004
• Est. Priority Date: 03/15/2001
• Status: Expired due to Fees

• Current Assignee: C Speed, LLC
• Original Assignee: Nanogear Incorporated
• Inventors: Hagelin, Paul M., Pedersen, David R.
• Primary Examiner(s): Phan, James
• Application Number:
  US10/099,246
• Time in Patent Office: 788 Days
• Field of Search: 359/196-226, 359/871-872, 385/18, 310/90.5, 310/306, 310/307, 310/309, 310/311, 310/313.B, 310/36, 310/40.R, 310/46, 310/66
• US Class Current: 359/198.1
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means

Abstract

A counterbalanced actuator for steering a beam of light is disclosed. The actuator includes a rotatable actuator member coupled to a substrate, a movable portion of an actuator drive mechanism coupled to the rotatable actuator member, a balancing spring coupled between the substrate and the movable portion of the actuator drive mechanism, and an actuator arm operably coupled to the movable portion of the actuator drive mechanism. The balancing spring maintains the movable portion of the actuator drive mechanism nominally, parallel to the substrate when the actuator arm is rotated. An optical mirror element is coupled to the actuator arm. The actuator also includes apparatus for applying a first drive voltage to the movable portion of the actuator drive mechanism and a second drive voltage to a fixed portion of the actuator drive mechanism to position the mirror. Also disclosed is an optical subassembly for directing at least one beam of light including a plurality of micromirror assemblies on a substrate, where each micromirror assembly includes an optical mirror coupled to a plurality of counterbalanced actuators attached to the substrate. A method of actuating a micromirror assembly and a system for actuation the micromirror assembly is also disclosed.

Claims

1. An actuator for steering a beam of light comprising:

a rotatable actuator member coupled to a substrate;

a movable portion of an actuator drive mechanism coupled to the rotatable actuator member;

a balancing spring coupled between the substrate and the movable portion of the actuator drive mechanism; and

an actuator arm operably coupled to the movable portion of the actuator drive mechanism, wherein the balancing spring maintains the movable portion of the actuator drive mechanism nominally parallel to the substrate when the actuator arm is rotated.

2. The actuator of claim 1 wherein the substrate comprises at least a portion of a silicon wafer.

3. The actuator of claim 1 wherein the rotatable actuator member is coupled to the substrate with at least one substrate hinge.

4. The actuator of claim 1 wherein the rotatable actuator member is coupled to the movable portion of the actuator drive mechanism with at least one actuator hinge.

5. The actuator of claim 1 wherein the balancing spring comprises two torsional hinges and a nominally rigid connecting member.

6. The actuator of claim 1 wherein the actuator arm is connected to the rotatable actuator member.

7. The actuator of claim 5 wherein the actuator arm is connected to the nominally rigid connecting member of the balancing spring.

8. The actuator of claim 1 wherein the rotatable actuator member, the movable portion of the actuator drive mechanism, and the balancing spring are formed from a layer of single crystal silicon.

9. The actuator of claim 1 wherein the rotatable actuator member, the movable portion of the actuator drive mechanism, and the balancing spring are formed from a layer of polycrystalline silicon.

10. The actuator of claim 1 wherein the actuator drive mechanism comprises a parallel-plate electrostatic drive mechanism.

11. The actuator of claim 1 wherein the actuator drive mechanism comprises an interdigitated electrostatic drive mechanism.

12. The actuator of claim 1 wherein the actuator drive mechanism is selected from the group consisting of an electrostatic drive mechanism, a thermal drive mechanism, a piezoelectric drive mechanism, and a magnetic drive mechanism.

13. The actuator of claim 1 wherein a ratio of a displacement of at least a portion of the actuator arm to a displacement of the movable portion of the actuator drive mechanism is greater than two.

14. The actuator of claim 1 further comprising:

an optical mirror element coupled to the actuator arm.

15. The actuator of claim 1 further comprising:

means for applying a first drive voltage to the movable portion of the actuator drive mechanism and a second drive voltage to a fixed portion of the actuator drive mechanism.