Fluid heating system for processing semiconductor materials

• US 6,736,150 B2
• Filed: 02/06/2003
• Issued: 05/18/2004
• Est. Priority Date: 07/06/1999
• Status: Expired due to Term

• Current Assignee: OEM Group, LLC
• Original Assignee: Semitool Incorporated (Applied Materials Incorporated)
• Inventors: Dolechek, Kert
• Primary Examiner(s): Stinson, Frankie L.
• Application Number:
  US10/359,844
• Publication Number:
  US 20030116180A1
• Time in Patent Office: 467 Days
• Field of Search: 134/108, 134/105, 134/902, 165/163, 165/132, 165/168
• US Class Current: 134/108
• CPC Class Codes: F24H 1/162 using electrical energy supply
• CPC Class Codes: H01L 21/67098 Apparatus for thermal treatment
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

A system for heating solvents in processing semiconductor wafers has a coiled solvent tube, a coiled cooling water tube, and electric heater elements, cast in place within an aluminum casting. The solvent flows through the solvent tube and is heated by conduction of heat through the casting. The solvent is safely isolated from the heating elements. Water is pumped through the cooling water tube, to cool the casting if solvent flow is interrupted, or if the measured casting temperature exceeds a predetermined set point temperature. Solvent temperature is maintained by controlling power to the heating elements based on the measured solvent temperature at the processing chamber.

Claims

1. A heater for heating a process liquid, comprising:

a process liquid coil within a metal block;

a cooling water coil within the metal block,

at least one heating element in the metal block;

a container surrounding the metal block; and

a purge gas space between the container and the metal block.

2. The heater of claim 1 further comprising a layer of insulation around the metal block.

3. The heater of claim 1 further comprising a container surrounding the metal block, wherein inner walls of the container are separated from the metal block by an air gap.

4. The heater of claim 1 wherein the process liquid coil surrounds the cooling water coil.

5. The heater of claim 1 wherein the process liquid coil is concentric with a longitudinal axis of the cooling water coil, and where a plurality of heating elements are equally spaced apart around the longitudinal axis of the cooling water coil.

6. The heater of claim 1 wherein the heating element includes a first leg within the cooling coil and a second leg outside of the cooling coil.

7. The heater of claim 1 wherein the metal block comprises a casting and the heating element is cast in place within the metal casting.

8. The heater of claim 1 wherein the process liquid coil is concentric with a first axis, and wherein the heating element extends parallel to a second axis perpendicular to the first axis.

9. The heater of claim 1 wherein a plurality of elongate heating elements are provided extending substantially from a first end to a second end of the block of metal.

10. A heater for heating a solvent in a wafer processing system, comprising:

a block of metal;

a solvent coil extending through the block of metal and having an inlet connectable with a solvent supply and an outlet connectable with a processing chamber in the processsing system;

a cooling coil extending through the block of metal and having an inlet connectable to a cooling water supply;

at least one heating element in the block of metal;

a container around the block metal with a purge gas space between the container and the block of metal; and

a purge gas supply port connecting into the purge gas space.

11. A heater for heating a solvent in a wafer processing system, comprising:

a block of metal;

a solvent coil extending through the block of metal and having an inlet connectable with a solvent supply and an outlet connectable with a processing chamber in the processsing system;

a cooling coil extending through the block of metal and connectable to a cooling water supply;

one or more heating elements in the block of metal;

a container around the block metal with a purge gas space between the container and the block of metal;

a pipe section attached to a first end of the block of metal; and

a box attached to the pipe section, with electrical leads from the heating elements extending out of the block of metal, through the pipe section and into the box.