Substrate transport apparatus with multiple independent end effectors
First Claim
1. A substrate processing apparatus comprising:
- a frame;
a drive section connected to the frame;
an articulated arm connected to the drive section, the articulated arm having a shoulder and a wrist, the articulated arm being pivotally mounted to the drive section at the shoulder, the drive section being adapted to rotate the articulated arm relative to the frame about an axis of rotation at the shoulder, and to displace the wrist relative to the shoulder; and
at least one pair of end effectors connected to the articulated arm, the at least one pair of end effectors being pivotally jointed to the wrist of the articulated arm to rotate relative to the articulated arm about a common axis of rotation at the wrist, wherein each of the at least one pair of end effectors is independently pivotable relative to each other about the common axis of rotation at the wrist and at least one of the at least one pair of end effectors is independently pivotable about the common axis of rotation at the wrist relative to the articulated arm.
7 Assignments
0 Petitions
Accused Products
Abstract
A substrate processing apparatus comprising a frame, a drive section, an articulated arm, and at least one pair of end effectors. The drive section is connected to the frame. The articulated arm is connected to the drive section. The articulated arm has a shoulder and a wrist. The arm is pivotally mounted to the drive section at the shoulder. The drive section is adapted to rotate the articulated arm relative to the frame about an axis of rotation at the shoulder, and to displace the wrist relative the shoulder. The pair of end effectors is connected to the articulated arm. The pair of end effectors is pivotally jointed to the wrist of the articulated arm to rotate relative to the articulated arm about a common axis of rotation at the wrist. Each end effector is independently pivotable relative to each other about the common axis of rotation at the wrist. At least one end effector is independently pivotable about the common axis of rotation of the wrist relative to the articulated arm.
-
Citations
30 Claims
-
1. A substrate processing apparatus comprising:
-
a frame;
a drive section connected to the frame;
an articulated arm connected to the drive section, the articulated arm having a shoulder and a wrist, the articulated arm being pivotally mounted to the drive section at the shoulder, the drive section being adapted to rotate the articulated arm relative to the frame about an axis of rotation at the shoulder, and to displace the wrist relative to the shoulder; and
at least one pair of end effectors connected to the articulated arm, the at least one pair of end effectors being pivotally jointed to the wrist of the articulated arm to rotate relative to the articulated arm about a common axis of rotation at the wrist, wherein each of the at least one pair of end effectors is independently pivotable relative to each other about the common axis of rotation at the wrist and at least one of the at least one pair of end effectors is independently pivotable about the common axis of rotation at the wrist relative to the articulated arm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
-
12. A substrate transport apparatus comprising:
-
a drive section;
an upper arm connected to the drive section;
a forearm movably connected to the upper arm; and
at least one pair of end effectors movably connected to the forearm so that the at least one pair of end effectors is movable relative to the forearm, the at least one pair of end effectors being located on the forearm, and being operably connected to the drive section for moving the at least one pair of end effectors relative to the forearm, wherein each end effector of the at least one pair of end effectors is independently movable relative to each other. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
-
-
24. A substrate transport apparatus comprising:
-
a drive section having a co-axial shaft assembly;
an articulated arm operably connected to the co-axial shaft assembly at a shoulder of the arm for rotating the arm about the shoulder and extending or retracting the arm relative to the shoulder;
at least one pair of end effectors movably connected to the articulated arm so that each end effector of the at least one pair of end effectors is independently pivotable relative to the articulated arm about a common axis of rotation; and
another drive section operably connected to the at least one pair of end effectors for moving the end effectors relative to the arm, the other drive section having at least one motor mounted on the arm proximate the shoulder. - View Dependent Claims (25, 26, 27)
-
-
28. A substrate transport apparatus comprising:
-
a drive section;
an upper arm connected to the drive section;
a forearm movably connected to the upper arm; and
at least one pair of end effectors movably connected to the forearm;
wherein the forearm has a support member fixed thereto, the at least one pair of end effectors being movably mounted to the support member to allow each end effector of the at least one pair of end effectors to rotate independently of each other relative to the forearm, the drive section being operably connected to each end effector so that each end effector is moved independently of each other by the drive section. - View Dependent Claims (29)
-
-
30. A substrate transport apparatus comprising:
-
a drive section having a co-axial shaft assembly;
an articulated arm operably connected to the co-axial shaft assembly at a shoulder of the arm for rotating the arm about the shoulder and extending or retracting the arm relative to the shoulder;
at least one end effector movably connected to the articulated arm so that the at least one end effector is independently pivotable relative to the articulated arm about an axis of rotation; and
another drive section operably connected to the at least one end effector for moving the end effector relative to the arm, the other drive section having at least one motor mounted on the arm proximate the shoulder.
-
Specification