Micromechanical shock sensor
First Claim
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1. A micromechanical shock sensor device, comprising:
- a substrate having a surface;
a moveable proof mass formed upon the surface;
at least one spring formed upon and attached to the surface, and attached to the proof mass wherein the proof mass may move a predetermined distance when subjected to a force of a predetermined magnitude;
latching means formed upon and attached to the surface the predetermined distance from the proof mass wherein the proof mass moves the predetermined distance and contacts the latching means when the proof mass is subjected to the force of a predetermined magnitude; and
, indicator means to indicate that the proof mass has contacted the latching means.
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Abstract
The invention comprises a micromechanical shock sensor that is formed on the surface of a micro-substrate. A moveable proof mass is formed on the surface with at least one spring connected to the proof mass and the surface. The spring allows the proof mass to move a predetermined distance. Latching means are formed on the surface the predetermined distance from the proof mass. When the sensor is subjected to a sufficient shock, the proof mass moves and contacts the latching means. An indicator means is provided to allow this contact to be readily known by the user.
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Citations
20 Claims
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1. A micromechanical shock sensor device, comprising:
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a substrate having a surface;
a moveable proof mass formed upon the surface;
at least one spring formed upon and attached to the surface, and attached to the proof mass wherein the proof mass may move a predetermined distance when subjected to a force of a predetermined magnitude;
latching means formed upon and attached to the surface the predetermined distance from the proof mass wherein the proof mass moves the predetermined distance and contacts the latching means when the proof mass is subjected to the force of a predetermined magnitude; and
,indicator means to indicate that the proof mass has contacted the latching means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
a second proof mass formed on the surface at an angle to the first proof mass;
a second spring formed on the surface at the angle of the second proof mass wherein the proof mass may move the predetermined distance;
a second latching means formed on the surface, the predetermined distance from the second proof mass and at the angle of the second proof mass wherein the second proof mass moves the predetermined distance as a result of the force of a predetermined magnitude and contacts the second latching means; and
,a second indicator means to indicate that the second proof mass has contacted the second latching means wherein the shock sensor operates in a plane substantially parallel to the proof mass and in a plane substantially parallel to the second proof mass.
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13. The micromechanical shock sensor of claim 1, wherein the spring comprises one or more beams wherein the beams may be selected from straight, folded or curved.
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14. The micromechanical shock sensor of claim 1, wherein the sensor may detect a shock from about 1 gravity to about 50,000 gravities.
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15. The micromechancial shock sensor of claim 1, wherein the force of a predetermined magnitude comprises from about 1 micronewton to about 10 micronewtons.
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16. The micromechanical shock sensor of claim 1, wherein the predetermined distance comprises from about 50 microns to about 300 microns.
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17. The micromechanical shock sensor of claim 1, further comprising a mass from about 0.1 milligrams to about 50 milligrams.
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18. The micromechanical shock sensor of claim 1, further comprising a coating applied to the substrate wherein the increases the conductance of the substrate.
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19. A method for detecting shock applied to packages, comprising the steps of
providing a micromechanical shock sensor comprising a substrate having a surface, a moveable proof mass formed upon the surface, at least one spring formed upon and attached to the surface, and attached to the proof mass wherein the proof mass may move a predetermined distance when subjected to a force of a predetermined magnitude, latching means formed upon and attached to the surface the predetermined distance from the proof mass wherein the proof mass moves the predetermined distance and contacts the latching means when the proof mass is subjected to the force of a predetermined magnitude, and, indicator means to indicate that the proof mass has contacted the latching means; - and,
attaching the shock sensor to the package. - View Dependent Claims (20)
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Specification