Soft snap-down optical element using kinematic supports

• US 6,738,177 B1
• Filed: 09/05/2001
• Issued: 05/18/2004
• Est. Priority Date: 09/05/2000
• Status: Expired due to Term

• Current Assignee: Nan Chang O-Film Optoelectronics Technology, Ltd.
• Original Assignee: SIIMPEL CORPORATION (Adeia Inc.)
• Inventors: Tang, Tony K., Jones, Cathleen, Calvet, Robert J., Gutierrez, Roman C.
• Primary Examiner(s): Sugarman, Scott J.
• Assistant Examiner(s): HANIG, RICHARD E
• Application Number:
  US09/948,176
• Time in Patent Office: 986 Days
• Field of Search: 359/298, 359/295, 359/223, 359/224, 359/214
• US Class Current: 359/298
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means

Abstract

The snapped-down position of an optical element is defined by its contact with a plurality of kinematic supports on an associated platform, or on electrodes placed on that platform. Compliant flexures may be provided in association with one or more kinematic supports, such that fine adjustments of the optical element can be made by deflecting the optical element to cause compression of one or more flexures.

Claims

1. A pivoting element, comprising:

three kinematic supports positioned relative to a surface;

an optical element above said surface; and

means for biasing said optical element against said three kinematic supports to a position, wherein said three kinematic supports define a plane into which said optical element is biased.

2. The pivoting element of claim 1, wherein said means comprise an electrode on said surface.

3. The pivoting element of claim 1, wherein said means comprise at least one spring connected to said optical element.

4. The pivoting element of claim 1, wherein said means comprise mechanically preloading said optical element.

5. The pivoting element of claim 1, wherein each said kinematic support has a substantially planar surface, and wherein said kinematic supports are positioned relative to one another such that said surfaces lie in substantially the same plane.

6. The pivoting element of claim 1, further comprising at least one additional kinematic support, whereby at least one different said position is defined.

7. The pivoting element of claim 1, wherein said pivot point comprises a pillar comprising an upper surface.

8. A pivoting element, comprising:

a platform comprising a surface;

a pivot point extending from said platform;

an optical element pivotally mounted on said pivot point; and

at least two kinematic supports raised relative to said surface of said platform,

wherein said optical element defines a position when in contact with two said kinematic supports and said pivot point.

9. The pivoting element of claim 8, wherein said pivot point is a pillar comprising an upper surface.

10. The pivoting element of claim 9, further comprising at least one kinematic support positioned on said upper surface of said pillar.

11. The pivoting element of claim 10, wherein each said kinematic support is a substantially polygonal solid comprising an upper surface and at least one edge, said upper surface substantially parallel to the surface of said platform.

12. The pivoting element of claim 10, wherein each said kinematic support is a substantially rectangular solid comprising an upper surface and at least one edge, said upper surface substantially parallel to the surface of said platform.

13. The pivoting element of claim 8, further comprising at least one electrode placed on the surface of said platform facing said optical element.

14. The pivoting element of claim 13, wherein two said kinematic supports are positioned on each said electrode.

15. The pivoting element of claim 14, wherein said optical element contacts said edge of each of two said kinematic supports on one said electrode and onto said edge of one corresponding said kinematic support on said upper surface of said pillar.

16. The pivoting element of claim 14, wherein said pivoting element contacts said upper surface of each of two said kinematic supports on one said electrode and onto an edge of one corresponding said kinematic support on said upper surface of said pillar.

17. The pivoting element of claim 13, wherein one said kinematic support is positioned on each said electrode.

18. The pivoting element of claim 17, wherein said optical element contacts said edge of one kinematic support on each of two adjacent said electrodes and onto said edge of one corresponding said kinematic support on said upper surface of said pillar.

19. The pivoting element of claim 17, wherein said optical element contacts said upper surface of one kinematic support on each of two adjacent said electrodes and onto said edge of one corresponding said kinematic support on said upper surface of said pillar.

20. The pivoting element of claim 13, wherein said kinematic supports raised relative to said surface of said platform are positioned directly on said platform adjacent said at least one electrode.

22. The pivoting element of claim 20, wherein said optical element snaps down onto said edge of two kinematic supports adjacent one said electrode and onto said edge of one corresponding said kinematic support on said upper surface of said pillar.

23. The pivoting element of claim 20, wherein said optical element snaps down onto said upper surface of two kinematic supports adjacent one said electrode and onto said edge of one corresponding said kinematic support on said upper surface of said pillar.

24. The pivoting element of claim 13, furthest comprising a plurality of flexures on said platform, wherein each said electrode extends onto at least one said flexure, and wherein each said kinematic support is positioned above one said flexure.

25. The pivoting element of claim 24, wherein each said flexure is cantilevered from said platform.

26. The pivoting element of claim 13, wherein said platform and said electrodes slope downward and away from said pivot point.

27. The pivoting element of claim 13, further comprising:

at least one additional platform on said baseplate, wherein each said additional platform is located between said optical element and said baseplate, and wherein each said platform is smaller than said platform below it;

a plurality of electrodes arranged on the surface of each said additional platform facing said optical element; and

at least one kinematic support placed on the surface of each said electrode.

28. The pivoting element of claim 10, wherein each said kinematic support is a substantially polygonal solid comprising a substantially planar upper surface angled relative to the surface of said platform, wherein said optical element snaps down onto said upper surface of each of three said kinematic supports.

29. The pivoting element of claim 28, wherein two said kinematic supports are positioned on each said electrode.

30. The pivoting element of claim 28, wherein one said kinematic support is positioned on each said electrode.

31. The pivoting element of claim 28, wherein said kinematic supports raised relative to said surface of said platform are positioned directly on said platform adjacent said electrodes.

32. The pivoting element of claim 8, wherein said optical element is a mirror.

33. The pivoting element of claim 8, further comprising a baseplate comprising an upper surface, said platform positioned on said upper surface of said baseplate.

34. The pivoting element of claim 8, wherein said platform is substantially polygonal.

35. The pivoting element of claim 8, wherein said platform is substantially rectangular.

36. The pivoting element of claim 8, further comprising

a second baseplate;

and

a second pivot point extending from said second baseplate, said baseplate pivotally mounted on said second pivot point.

21. The pivoting element of clam 20, wherein said kinematic supports are positioned between said electrodes.

37. A pivoting element, comprising:

a platform comprising a surface;

a pivot point extending from said platform;

an optical element pivotably mounted on said pivot point, said optical element having an underside;

at least one electrode placed on the surface of said platform facing said optical element; and

at least two kinematic supports raised relative to said underside of said optical element.

38. The pivoting element of claim 37, wherein said optical element defines a snap-down position when two said kinematic supports contact at least one said electrode.

39. The pivoting element of claim 37, wherein said optical element defines a snap-down position when two said kinematic supports contact said surface of said platform.

40. A pivoting element, comprising:

a platform comprising a surface;

an optical element;

a pillar extending from said optical element, said pillar pivotably mounted on said platform;

a plurality of electrodes arranged on the surface of said platform facing said optical element; and

a plurality of kinematic supports positioned between said optical element and said platform.

41. The pivoting element of claim 40, wherein said kinematic supports are positioned on said underside of said optical element facing said platform.

42. The pivoting element of claim 41, further comprising a plurality of flexures on said underside of said optical element, each said flexure associated wit a kinematic support.

43. The pivoting element of claim 40, wherein said kinematic supports are raised relative to said platform.

44. The pivoting element of claim 43, wherein said kinematic supports are positioned on said electrodes.

45. The pivoting element of claim 43, wherein said kinematic supports are positioned on said platform.

46. A pivoting element, comprising;

a platform comprising a surface;

a pivot point extending from said platform;

an optical element pivotably mounted on said pivot point;

at least one electrode placed on said surface of said platform facing said optical element; and

at least two kinematic supports displaced from said surface of said platform, each said kinematic support having a support surface substantially coplanar with said surface of said at least one electrode,

wherein said optical element defines a snap-down position when in contact with two said kinematic supports.

47. An optical switching array, comprising:

a plurality of pivoting elements, each said pivoting element comprising

three kinematic supports positioned relative to a surface,

an optical element above said surface, and

means for biasing said optical element against said three kinematic supports to a position, wherein said three kinematic supports define a plane into which said optical element is biased,

wherein said position of each said pivoting element is determined by said position of its corresponding said kinematic supports.

48. A method for snapping down an optical element onto kinematic supports, comprising:

biasing the optical element to a first selected voltage;

providing at least one electrode spaced apart from the optical element;

biasing at least one said electrode to a second selected voltage, wherein the optical element is induced toward said at least one electrode;

stopping said element by contact with two of the kinematic supports;

providing a plurality of flexures each associated with one kinematic support; and

controlling the position of said element by applying additional voltage to one or more said electrodes, wherein said flexures deflect by an amount related to said additional voltage.